JPS58127150A - グロ−放電装置 - Google Patents
グロ−放電装置Info
- Publication number
- JPS58127150A JPS58127150A JP981682A JP981682A JPS58127150A JP S58127150 A JPS58127150 A JP S58127150A JP 981682 A JP981682 A JP 981682A JP 981682 A JP981682 A JP 981682A JP S58127150 A JPS58127150 A JP S58127150A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- anode
- electrode
- cathode
- glow discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 18
- 239000007789 gas Substances 0.000 abstract description 11
- 229910052786 argon Inorganic materials 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 4
- 239000010453 quartz Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 239000011810 insulating material Substances 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 4
- 230000005284 excitation Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 231100000567 intoxicating Toxicity 0.000 description 1
- 230000002673 intoxicating effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP981682A JPS58127150A (ja) | 1982-01-25 | 1982-01-25 | グロ−放電装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP981682A JPS58127150A (ja) | 1982-01-25 | 1982-01-25 | グロ−放電装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58127150A true JPS58127150A (ja) | 1983-07-28 |
JPS6326332B2 JPS6326332B2 (enrdf_load_stackoverflow) | 1988-05-30 |
Family
ID=11730671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP981682A Granted JPS58127150A (ja) | 1982-01-25 | 1982-01-25 | グロ−放電装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58127150A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63503009A (ja) * | 1986-02-24 | 1988-11-02 | ゲゼルシャフト ツァ フェルダ−ルング デァ スペクトロヒェミ− ウント アンゲヴァンテン スペクトロスコピ− エ−.ファウ. | グロー放電ランプ |
-
1982
- 1982-01-25 JP JP981682A patent/JPS58127150A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63503009A (ja) * | 1986-02-24 | 1988-11-02 | ゲゼルシャフト ツァ フェルダ−ルング デァ スペクトロヒェミ− ウント アンゲヴァンテン スペクトロスコピ− エ−.ファウ. | グロー放電ランプ |
US4830492A (en) * | 1986-02-24 | 1989-05-16 | Gesellschaft zur Forderung der Spektrochemie und angewandten Spektrochemie e.V. | Glow-discharge lamp and its application |
Also Published As
Publication number | Publication date |
---|---|
JPS6326332B2 (enrdf_load_stackoverflow) | 1988-05-30 |
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