JPS58126679A - Formation of electrode for thin-film lithium battery - Google Patents
Formation of electrode for thin-film lithium batteryInfo
- Publication number
- JPS58126679A JPS58126679A JP57007595A JP759582A JPS58126679A JP S58126679 A JPS58126679 A JP S58126679A JP 57007595 A JP57007595 A JP 57007595A JP 759582 A JP759582 A JP 759582A JP S58126679 A JPS58126679 A JP S58126679A
- Authority
- JP
- Japan
- Prior art keywords
- film
- positive electrode
- thickness
- thin
- lithium battery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/14—Cells with non-aqueous electrolyte
- H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
Abstract
Description
【発明の詳細な説明】
本発明は、電池の電極の形成方法、特に金属カルコゲ／
化物および金属酸化物を正極に用いる薄膜リチウム電池
において、高性能の正極を形成する技術に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming battery electrodes, particularly a metal chalcogen/
The present invention relates to technology for forming high-performance positive electrodes in thin-film lithium batteries that use oxides and metal oxides as positive electrodes.
近年、電子機器の小型化、薄型化に伴い、その電源部と
なる電池の小型化、薄型化に対する要望が大きくなって
いる。この要望を満す技術として、薄層の固体電解質を
用い念全固体電池が検討され、その中でもエネルギー密
度が高いという点で全固体リチウム電池がとくに有望視
さｎている。１１た、この全固体リチウム電池は、ガス
発生や液漏れがなく、自己放電も小さいという利点を持
っている。In recent years, as electronic devices have become smaller and thinner, there has been a growing demand for smaller and thinner batteries, which serve as power sources. As a technology that satisfies this demand, all-solid-state batteries using a thin layer of solid electrolyte are being considered, and among these, all-solid-state lithium batteries are particularly promising because of their high energy density. 11. Furthermore, this all-solid-state lithium battery has the advantage of no gas generation or liquid leakage, and low self-discharge.
ところで、上記の電池の薄型化の要望とならんで、電池
を二次電池とし、未使用時には充電を可能とし念いとい
う要望がある。この要望を満すリチウム電池用の正極材
料としては、これまで液体電解質電池の研究から、硫化
チタンやセレン化バナジウムなどの金属カルコゲン化物
、あるいは、酸化バナジウムなどの金属酸化物が有望で
ある。Incidentally, in addition to the above-mentioned demand for thinner batteries, there is also a demand for batteries to be secondary batteries that can be charged when not in use. Research on liquid electrolyte batteries has shown that metal chalcogenides such as titanium sulfide and vanadium selenide, or metal oxides such as vanadium oxide are promising positive electrode materials for lithium batteries that meet this demand.
し念がって、これらの材料を薄膜化できれば超薄型のリ
チウム二次電池を製造することが可能となる。However, if these materials can be made into thin films, it will be possible to manufacture ultra-thin lithium secondary batteries.
上記の正極材料の薄膜を形成する方法は、蒸着法、スパ
ッタリング法、イオンブレーティング法。Methods for forming the thin film of the above-mentioned positive electrode material include vapor deposition, sputtering, and ion blating.
気相化学反応法（以下、ＣＶＤ法と記す）などがある。There are gas phase chemical reaction methods (hereinafter referred to as CVD methods) and the like.
最も代表的な正極材料であるＴｔ８ｍを例にとると、四
塩化チタン（ＴｉＣｌ４）と硫化水素（Ｈ鵞８）ｔ−次
式１）の工うに反応させてＴｉ８゜七基板上に作成する
。Taking Tt8m, which is the most typical positive electrode material, as an example, it is prepared on a Ti8°7 substrate by reacting titanium tetrachloride (TiCl4) and hydrogen sulfide (H) using the following formula (1).
ＴｉＣｌ４＋２Ｈ，Ｓ−＋Ｔｉ８．＋４ＨＣ２・・・・
・・（１〕ｔた、その他の正極材料の薄膜もこのＣＶＤ
法で作成することができる。TiCl4+2H, S-+Ti8. +4HC2...
...(1) Thin films of other cathode materials can also be coated with this CVD process.
can be created by law.
しかしながら、上記の正極材料をいすｎの薄膜技術によ
って作成する場合でも、その基板となる材料は１００〜
７００Ｃという高い温度に加熱さｆるため、その表面に
カルコゲン化され念膜、ないしは酸化さｎた膜が生成し
てしまう。そしてこｎらのカルコゲ／化膜や酸化膜は絶
縁体ないしは半導体であるため、基板と正極材料との電
気的接触が低下し基板の集電体としての機能が低下する
ことになる。また、嘔らに、これらのカルコゲン化膜や
酸化膜の構造が正極材料と異なる場合には、正極材料と
基板の機械的接着もまた低下するという欠点を有してい
る。However, even when the above-mentioned cathode material is made using Isun's thin film technology, the substrate material is
Since it is heated to a high temperature of 700C, a chalcogenized film or an oxidized film is formed on its surface. Since these chalcogen/oxide films and oxide films are insulators or semiconductors, the electrical contact between the substrate and the positive electrode material is reduced, and the function of the substrate as a current collector is reduced. Moreover, if the structure of these chalcogenated films or oxide films is different from that of the positive electrode material, there is a drawback that the mechanical adhesion between the positive electrode material and the substrate is also reduced.
本発明は、金属カルコゲン化物および金属酸化物を正極
に用いる薄膜リチウム電池において、こ几らの正極材料
と正極集電体の電気的接触および機械的接着が優ｎてい
る電極の形成法を提供することにある。The present invention provides a method for forming an electrode in a thin film lithium battery using a metal chalcogenide or a metal oxide as a positive electrode, which has excellent electrical contact and mechanical adhesion between these positive electrode materials and a positive electrode current collector. It's about doing.
すなわち、本発明は、正極材料の一成分となる金属上に
正極材料を薄膜技術で作製した場合、その金属上に生成
する物質が正極材料と同じ、ないしは、類似し九物質で
あり、電子伝導性も良くかつ構造の相異も少ないことに
注目したものである。In other words, the present invention provides that when a positive electrode material is produced using thin film technology on a metal that is a component of the positive electrode material, the substances generated on the metal are the same or similar to the positive electrode material, and the electron conductivity is improved. We focused on the fact that it has good properties and has few differences in structure.
すなわち、本発明は、正極材料と正極集電体の界面に正
極材料の原料金属の膜をあらがじめ介在させ念ところに
特徴がある。That is, the present invention is characterized in that a film of the raw material metal of the positive electrode material is preliminarily interposed at the interface between the positive electrode material and the positive electrode current collector.
以下、本発明を実施例によって詳細に説明する。Hereinafter, the present invention will be explained in detail with reference to Examples.
実施例１
第１図に示した全固体電池の断面図のように、Ｉｆ、０
．４■厚みの鉄板（υ上に、チタンを約０．１μｍの厚
みの膜りに形成し、その上に、Ｔｉｓ！をＣＶＤ法によ
り約３μｍの厚みの膜印に形成し、その上に、固体電解
質材料（（１−Ｘ）Ｌｉ４８ｉ０４Ｘ Ｌ １． ＰＯ
いただしＯ〈×〈１〕 をスパッタリングによって約２
μｍの厚みの膜（４）に形成し、最後にリチウムを蒸着
法により約１μｍの厚みの膜＜５Ｊに形成して、薄膜リ
チウム電池の基本構成とする。Example 1 As shown in the cross-sectional view of the all-solid-state battery shown in FIG.
．． On a 4■ thick iron plate (υ), titanium is formed into a film with a thickness of about 0.1 μm, and on top of that, Tis! is formed into a film mark with a thickness of about 3 μm by the CVD method, and on top of that, Solid electrolyte material ((1-X)Li48i04X L 1.PO
Approximately 2
A film (4) with a thickness of .mu.m is formed, and finally lithium is formed into a film (4) with a thickness of about 1 .mu.m <5J by vapor deposition to form the basic structure of a thin film lithium battery.
本電池の開路電池、短絡電池などの基本特性を得られ念
。Please be sure to obtain the basic characteristics of this battery, such as open circuit battery and short circuit battery.
一万、チタン膜を形成せずにＴｉＳ、％固体電解質、リ
チウムを形成した電池の基本特性を同様に測定したとこ
ろ、回路電圧１４Ｖ、短絡電流二〇−５” Ａ ／ ｃ
ｍ”の値しか得られなかった。When the basic characteristics of a battery with TiS, % solid electrolyte, and lithium formed without forming a titanium film were similarly measured, the circuit voltage was 14 V, and the short circuit current was 20-5" A/c.
Only a value of m'' was obtained.
第１図は、本発明の薄膜リチウム電池の断面図である。
１・・・ｐｅ板、２・・・Ｔｉ膜、３・・・ＴＩＳい
４・・・固体３６
′￥Ｊ １ 図FIG. 1 is a cross-sectional view of the thin film lithium battery of the present invention. 1...PE board, 2...Ti film, 3...TIS
4...Solid 36'\J 1 Figure
Claims (1)
る薄膜リチウム電池において、正極集電体と正極材料と
の界面に、正極材料の原料である金属の薄膜ｔＳらかし
め介在させておくことを特徴とする薄膜リチウム電池の
電極形成法。1. In a thin film lithium battery using a metal chalcogen compound and a metal oxide as a positive electrode, a thin film tS of metal, which is a raw material for the positive electrode material, is interposed at the interface between the positive electrode current collector and the positive electrode material. Electrode formation method for thin film lithium batteries.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57007595A JPS58126679A (en) | 1982-01-22 | 1982-01-22 | Formation of electrode for thin-film lithium battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57007595A JPS58126679A (en) | 1982-01-22 | 1982-01-22 | Formation of electrode for thin-film lithium battery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58126679A true JPS58126679A (en) | 1983-07-28 |
Family
ID=11670153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57007595A Pending JPS58126679A (en) | 1982-01-22 | 1982-01-22 | Formation of electrode for thin-film lithium battery |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58126679A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2581483A1 (en) * | 1985-05-03 | 1986-11-07 | Balkanski Minko | INTEGRATED SOLID CELL AND METHOD FOR PRODUCING THE SAME |
| JPS63241859A (en) * | 1987-03-11 | 1988-10-07 | ハイドロ−ケベック | Thin film electrode supported on electron conducting sheet and manufacture thereof |
| US4816356A (en) * | 1985-05-03 | 1989-03-28 | Minko Balkanski | Process for producing a solid state battery |
| JPH05211059A (en) * | 1991-06-18 | 1993-08-20 | Wisconsin Alumni Res Found | Battery using ceramic film |
| WO2001073883A3 (en) * | 2000-03-24 | 2003-02-20 | Cymbet Corp | Low-temperature fabrication of thin-film energy-storage devices |
| KR100387121B1 (en) * | 2000-08-31 | 2003-06-12 | 주식회사 애니셀 | Multi-layered Thin Film Battery Vertically Integrated and Fabrication Method thereof |
| EP1174936A3 (en) * | 2000-07-19 | 2006-08-30 | Sumitomo Electric Industries, Ltd. | Thin alkali metal film member and method of producing the same |
| JP2009534810A (en) * | 2006-06-02 | 2009-09-24 | インダストリー−アカデミック コーオペレーション ファンデーション キョンサン ナショナル ユニバーシティ | Current collector-electrode integrated Ti-Ni alloy-Ni sulfide element |
| JP2012049023A (en) * | 2010-08-27 | 2012-03-08 | Toyota Motor Corp | Battery |
| US9853325B2 (en) | 2011-06-29 | 2017-12-26 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
| US10601074B2 (en) | 2011-06-29 | 2020-03-24 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
| US10658705B2 (en) | 2018-03-07 | 2020-05-19 | Space Charge, LLC | Thin-film solid-state energy storage devices |
| US11527774B2 (en) | 2011-06-29 | 2022-12-13 | Space Charge, LLC | Electrochemical energy storage devices |
-
1982
- 1982-01-22 JP JP57007595A patent/JPS58126679A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2581483A1 (en) * | 1985-05-03 | 1986-11-07 | Balkanski Minko | INTEGRATED SOLID CELL AND METHOD FOR PRODUCING THE SAME |
| EP0201422A2 (en) * | 1985-05-03 | 1986-11-12 | Minko Balkanski | Integrable solid cell and process for its manufacture |
| US4730383A (en) * | 1985-05-03 | 1988-03-15 | Minko Balkanski | Integrable solid state battery and process for producing same |
| US4816356A (en) * | 1985-05-03 | 1989-03-28 | Minko Balkanski | Process for producing a solid state battery |
| JPS63241859A (en) * | 1987-03-11 | 1988-10-07 | ハイドロ−ケベック | Thin film electrode supported on electron conducting sheet and manufacture thereof |
| JPH05211059A (en) * | 1991-06-18 | 1993-08-20 | Wisconsin Alumni Res Found | Battery using ceramic film |
| WO2001073883A3 (en) * | 2000-03-24 | 2003-02-20 | Cymbet Corp | Low-temperature fabrication of thin-film energy-storage devices |
| EP1174936A3 (en) * | 2000-07-19 | 2006-08-30 | Sumitomo Electric Industries, Ltd. | Thin alkali metal film member and method of producing the same |
| KR100789540B1 (en) * | 2000-07-19 | 2007-12-28 | 스미토모덴키고교가부시키가이샤 | Thin alkali metal member and method of producing the same |
| KR100387121B1 (en) * | 2000-08-31 | 2003-06-12 | 주식회사 애니셀 | Multi-layered Thin Film Battery Vertically Integrated and Fabrication Method thereof |
| JP2009534810A (en) * | 2006-06-02 | 2009-09-24 | インダストリー−アカデミック コーオペレーション ファンデーション キョンサン ナショナル ユニバーシティ | Current collector-electrode integrated Ti-Ni alloy-Ni sulfide element |
| JP2012049023A (en) * | 2010-08-27 | 2012-03-08 | Toyota Motor Corp | Battery |
| US9853325B2 (en) | 2011-06-29 | 2017-12-26 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
| US10199682B2 (en) | 2011-06-29 | 2019-02-05 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
| US10601074B2 (en) | 2011-06-29 | 2020-03-24 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
| US11527774B2 (en) | 2011-06-29 | 2022-12-13 | Space Charge, LLC | Electrochemical energy storage devices |
| US10658705B2 (en) | 2018-03-07 | 2020-05-19 | Space Charge, LLC | Thin-film solid-state energy storage devices |
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