JPS58118743U - Crystal evaluation device - Google Patents

Crystal evaluation device

Info

Publication number
JPS58118743U
JPS58118743U JP1501782U JP1501782U JPS58118743U JP S58118743 U JPS58118743 U JP S58118743U JP 1501782 U JP1501782 U JP 1501782U JP 1501782 U JP1501782 U JP 1501782U JP S58118743 U JPS58118743 U JP S58118743U
Authority
JP
Japan
Prior art keywords
evaluation device
crystal evaluation
sample
crystal
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1501782U
Other languages
Japanese (ja)
Other versions
JPS6243287Y2 (en
Inventor
英樹 津屋
賢 小川
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1501782U priority Critical patent/JPS58118743U/en
Publication of JPS58118743U publication Critical patent/JPS58118743U/en
Application granted granted Critical
Publication of JPS6243287Y2 publication Critical patent/JPS6243287Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案を模式的に示す図であり、１は試料、２はコ
ンパ−／ド、３はゴニオメータ、４は試料載置台、５は
光軸、６はヘキカイ面、７は照射光、８は光学筒、９は
ハーフミラ−１１０はピンホール、１１は窓、１２及び
１３は反射鏡、１４は反射光、１５は検出器、１６は上
下移動機構、１７は対物レンズ部である。The figure schematically shows the present invention, in which 1 is a sample, 2 is a comparator, 3 is a goniometer, 4 is a sample mounting stage, 5 is an optical axis, 6 is a hexagonal plane, 7 is an irradiation light, 8 9 is an optical tube, 9 is a half mirror, 110 is a pinhole, 11 is a window, 12 and 13 are reflecting mirrors, 14 is reflected light, 15 is a detector, 16 is a vertical movement mechanism, and 17 is an objective lens section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 試料の位置を微小に移動・調整させるための移動調整治
具と該試料のセツティングを光学的に行うための光学系
を具備した光学顕微鏡からなることを特徴とする結晶評
価装置。1. A crystal evaluation device comprising an optical microscope equipped with a movement adjustment jig for minutely moving and adjusting the position of a sample, and an optical system for optically setting the sample.
JP1501782U 1982-02-05 1982-02-05 Crystal evaluation device Granted JPS58118743U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1501782U JPS58118743U (en) 1982-02-05 1982-02-05 Crystal evaluation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1501782U JPS58118743U (en) 1982-02-05 1982-02-05 Crystal evaluation device

Publications (2)

Publication Number Publication Date
JPS58118743U true JPS58118743U (en) 1983-08-13
JPS6243287Y2 JPS6243287Y2 (en) 1987-11-10

Family

ID=30027463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1501782U Granted JPS58118743U (en) 1982-02-05 1982-02-05 Crystal evaluation device

Country Status (1)

Country Link
JP (1) JPS58118743U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271542A (en) * 1988-09-06 1990-03-12 Nec Corp Jig for observing section of semiconductor integrated circuit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126812A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Automatic focusing mechanism of optical equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126812A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Automatic focusing mechanism of optical equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271542A (en) * 1988-09-06 1990-03-12 Nec Corp Jig for observing section of semiconductor integrated circuit

Also Published As

Publication number Publication date
JPS6243287Y2 (en) 1987-11-10

Similar Documents

Publication Publication Date Title
JPS58118743U (en) Crystal evaluation device
JP2579955Y2 (en) Lens barrel
JPH01136913U (en)
JPS5960639U (en) Optical path length adjustment device for distance measurement sensor
JPS614601U (en) Pupillary reaction testing device
JPS6111121U (en) Enlarged projection/microscope
JPS6354114U (en)
JPS6419911U (en)
JPS58109730U (en) overhead type projector
JPS59152406U (en) Leveling device with laser cross marker
JPS5974354U (en) Line optical head
JPS5814110U (en) Ball center measuring device
JPS6224256Y2 (en)
JPS5881727U (en) Magnetic head mounting angle inspection device
JPS6334589U (en)
JPS6090467U (en) Optical humidity compensation device
JPS6187342U (en)
JPS58104959U (en) visual inspection device
JPS5814235U (en) Optical pickup device
JPS6111148U (en) Reflector projector lighting system
JPH0227109U (en)
JPS5971157U (en) Scanning device in spectrometer
JPS62195774U (en)
JPS5968313U (en) Epi-illumination optical system of an infinity-corrected epi-illumination microscope
JPS5839533U (en) optical information detection device