JPS58116811A - Piezoelectric oscillator - Google Patents

Abstract

PURPOSE:To decrease the number of parts and to reduce the size and thickness of a piezoelectric oscillator by forming the piezoelectric oscillator of two parts, i.e. a piezoelectric oscillating piece with a specifically shaped base part and a glass case. CONSTITUTION:The piezoelectric oscillating piece 10 has the base part 11 and oscillating parts 12 and part of the base part has a connection part 14 projecting outward and a seal part 13 sealed airtightly in the case 9. In flanks of the base part 11, the oscillator has oscillating piece positioning parts 19 conforming to the internal size of the case 9 and flow preventing parts 20 for preventing a case partial fused part 21 from flowing during airtight sealing. Then, the case 9 and oscillating piece 10 are coupled together at the seal part 13 to form the piezoelectric oscillator. Thus, the piezoelectric oscillator consists of the oscillating piece 10 and case 9, i.e. two parts, so the number of parts is decreased to obtain the small-sized thin device.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a large piezoelectric vibrator tightly sealed in a glass case.

An object of the present invention is to reduce the number of parts constituting the EF electric tube, thereby improving the structure. Kansaku Saku Ibishi.

The purpose of the present invention is to provide a piezoelectric vibrator that is small, thin, and has good performance at a low price. It is applied to piezoelectric vibrators in general, but
In particular, a tuning fork type piezoelectric vibrator using a tuning fork type piezoelectric oscillator tube and having a relatively low m-wave will be explained below.

The conventional piezoelectric pendulum shown in FIG. 11 will be explained.

1 is Tob, made of Kovar, 1F, 2 lead wires, 2.21F, made of Kovar, large metal 4g
& (Q Into the inside, position the tube and set it. It has the same coefficient of thermal expansion as copper, but it is made of glass X4 which is close to it. It has a koji layer (hermetic sea) and is fF4hO.

It is a piezoelectric oscillator piece made from quartz crystal, and its outer shape is formed by photolinking or machining, and its surface is formed by vapor deposition and 4L<Fi sputtering. The piezoelectric oscillating piece 5, which has an electrode layer made of gold (not shown), and the inner lead wires 2a, 2m' are joined using solder, gold and tin (not shown). -1u) This is accomplished by brazing with a relatively low melting point material such as eutectic, or by adhesion with a paste, s-glue, etc.

This joint serves both to hold the piezoelectric oscillation piece and to provide external conduction.

Metal thin film for adjusting the 1lfII number at the tip of the piezoelectric oscillating piece after welding $7.7/Method of removing the mass tube by tube laser triangulation, or Metal thin film for adjusting the fly wave number at the tip of the piezoelectric oscillating piece 7.7 The wave number adjustment is carried out by adding a mass tube by vapor depositing gold or silver on the surface.

Next, the case 8, the stem 1, and the piezoelectric oscillation piece 6f were each heated in the center 9 to improve maw performance.

11. Thoroughly remove the gas section pipe attached to the surface.

This one degassed ★Case 8 and the aforementioned stem metal 3J! 5 in the center 9 to hold the center 9 and protect the vibrator. This is called encapsulation. The case 78 is generally formed by plating nickel silver with a solid metal such as solder, but this soft gold m is used as a sealing material for holding the true 9. Since it is press-fitted, there is a gap between the inner diameter of the case and the outer diameter of the stem.

Below is the conventional piezoelectric I! - Manage child's shortcomings.

(1) The stem, which has a high component unit price, and the case, which has a high unit price, account for the components of the component unit price in the pressure w oscillator.

The material cost is high due to the use of metal external heat for the HB stem and copal pipe for the wire.

Also, due to the fact that K:XF is press-fitted into the metal *Fs* when manufacturing the stem, there is a fee for producing a high-precision wL-shaped tube.

Roughly put glass powder into a box shape, take out the SMT position, melt the glass, put it on 4 pieces, and then apply N1 grade T plating to improve the corrosion resistance of the metal surface and the metal surface of the lead wire. The processing cost is high and left.

When joining the fF13-V wire and the piezoelectric oscillator piece, is there any brazing material used? However, the material and processing costs were high due to the process of aligning the tubes and heating them.

In the conventional method, which has poor aging characteristics, in the degassing process by heating in a
The connection between the piezoelectric oscillating piece and the inside @ 11 + As a result, degassing becomes insufficient, residual -J1 is generated after sealing, and the frequency of the piezoelectric 1r1 becomes t. That is, it has the disadvantage of poor aging characteristics.

The present invention @Ia removes the defective tube of the conventional demi-oscillator,
A 1m piezoelectric vibrator with a simple structure, low cost, and large-sized product.
Marry with what you have to offer.

Implementation of the piezoelectric vibrator according to the present invention is shown in FIG. 2, FIG.
The cross section WJf including the surface S pipe is expressed. Piezoelectric oscillation piece 10. It is composed of two parts: a glass case 9.

It has 101 piezoelectric oscillating pieces @ 11 and vibration 1 [12 f, and a part of the base protrudes outside the glass case 9. A connecting part 14 and a sealing part 15 that is hermetically sealed between the glass case and the glass case. It has

Roughly match the inner dimensions of the case to the 111th surface of the base of the piezoelectric oscillator piece. When the electric oscillation piece positioning portion 19 and the case portion melted portion 21 are hermetically sealed, the case portion fusion portion 21 has a fitting portion 20f that is attached to the tuning fork or 1111. For processing the piezoelectric oscillation piece 10, use the crystal h evereliphotoringraphy method, or 1
A tuning fork-like external shape is obtained by machining.The surface is vapor-deposited and then sputtered to form a W pole of gold, Ig, and a film made of Cjr and Au, etc.
6.161f. The basic electric 11 shape is the special public service of 1984.
-254! 4゜ Or Ike JP-A-55-2558? Description 1
- Other electrode shapes may be used.

A lead electrode film 15.157 is formed on a part of the base 11 for extending the electrode from the electrode 16.161, and extends through the seal portion to the connection portion 14 protruding outside the case. .

For the piezoelectric oscillation piece C9 part 15, a glass material tube is used whose temperature is about 575° C. or lower and whose coefficient of thermal expansion is close to that of the crystal. The piezoelectric oscillation piece positioning part 1t positioned on one surface of the sealing part 15 of the EF electric oscillation piece 10 is engaged with the glass case 9 as a straight tube, and the opening part of the glass cane 'f is heated in the stem 9 to heat the glass cane itself. The mixture is converted to IIK or dissolved in I and hermetically sealed. At this time, the crystal has a fluctuation point f at #:r57j℃
IX bubbles, if heated to a temperature higher than this, twin crystals f will occur, and even if the temperature is lowered, the softening degree of t, which remains as it is, is 575.
A material with a temperature below ℃ is selected.

When a piezoelectric oscillator piece is made of crystal and a glass case material with a coefficient of thermal expansion of
A glass material having a coefficient of thermal expansion equal to or close to the coefficient of thermal expansion of crystal is selected so that il'' can be maintained.

The glass case t is made of glass with a softening point of 575''C or lower and has a one-second molding time of 1F, and one end is open.

The other end is closed, forming a spear with a length of approximately 1-5 degrees.

The piezoelectric oscillating piece positioning portion 19 is machined into the inner dimensions of the Otgarry 7 case 9 and explodes slightly larger. Therefore, when the case and piezoelectric oscillation piece t are set, the case and piezoelectric oscillation piece are simultaneously positioned in the width direction of the base.

Generally, a 1Ω piezoelectric oscillation piece and a 9f glass case are set in a graphite jig 18. i! Inside, the graphite jig is energized to extremely heat the fused portion, and the fused portion of the case is melted or softened and bonded.

At this time, the direction of the glass tuning fork is melted or softened.
In order to prevent the tube from coming out, a constriction is formed at the end of the tuning fork seal part in the width direction of the base, and a fat stop part 20 is formed at the end of the tuning fork seal part, and t7? The piezoelectric oscillation piece 10 has a ** portion 14 protruding outside the case, and a lead electrode [115, 15'
It is also pulled out to the outside. The length L of the base of the piezoelectric oscillator piece is about 7 times the length of the tuning fork in the chest W, and the length from the tuning fork's folded part 11' to the seal S in the airtight interior is more than twice the length of the tuning fork in the arm and chest. The length of the cool part is 1h, which is a tuning fork in the chest W.
It is about 5 times as long as the 11-ribbon part, and is twice as long as the tuning fork in the chest.

Soii, hermetically sealed metal film for adjusting the 1m wave number is pre-formed on the piezoelectric oscillator by irradiating the tip of the snow compacted oscillator with a laser beam through a glass case.$17
, 17/f is removed by evaporation to adjust the wave number of one shot.

Regarding the shape of the cylindrical case according to the present invention, please refer to No. Sw.
8-piece case 22 shown in J. The rectangular case 72k shown in the 6th WIJ and the oval plow-shaped case 724 shown in Figure 97 can be used for calligraphy in 6 seconds. In addition, No. + SWJ, No. 6-1
FIG. 7(a) is a sectional view of each case.

(ball is a Moum sectional view of each case.

Especially the square 0III-shaped case 25. And IIIi circular plow-shaped case 724 is Fj, FEwwi A small, thin case with small dimensional intervals arranged around the external tube of the piezoelectric oscillating piece to accommodate the oscillator.

Reliably seals airtight by reducing the amount of heat during heat sealing.

The advantages of the piezoelectric vibrator according to the present invention described above are summarized below. (1) The structure is heavy and inexpensive. As a result, significant cost reductions can be achieved through the following items:

0 Material costs such as bonding materials and processing costs for joining the inner lead wire Yr11 to the lead #j of the stem and the piezoelectric oscillation piece, which are conventionally used, can be reduced.

■ Conventional stem metal 111fA# is not included, so the metal ring and gold plating are not included in membership fees, reducing material and processing costs.

θ Glass powder, which is the insulating and airtight material of the conventional step, is not used, and the processing cost for completing the step by sealing the lead wire of the metal ring and the glass powder tube is reduced.

Since only the glass tube 1 is formed in the O case and the work costs include solder plating of the case, the material cost and processing cost are reduced.

(2) Quality improves.

According to the present invention, the frequency change of the piezoelectric vibrator after sealing is small (and even when operating at high temperatures, the frequency is sufficiently stabilized and fF performance can be maintained).

Conventionally, solder was used to join the piezoelectric oscillator piece and lead wire.

A brazing filler metal with a relatively low melting point, such as Mu-8n eutectic alloy, was used. In this tJh sealing sealing film gas step, sufficient heat treatment could not be performed. However, outgas was generated after sealing, and the piezoelectric oscillating single tube and Rio <True 9K
The frequency becomes worse and a difference in frequency occurs.

Book! In this case, the base of the piezoelectric oscillator piece itself has a connecting tube that protrudes to the outside, which is larger, and there is an electric wire inside the package.
The lead wire that comes out e, the piezoelectric oscillation piece and the 11-wire ti
By not using a brazing filler metal or the like, it is possible to reduce the number of gas generating tubes, and to make it possible to fully remove the gas at temperatures of about 400°C.

(s) Because it has a two-piece structure of a piezoelectric oscillation piece and a glass case, which makes it smaller and thinner, the space 7 of the conventional stator is eliminated, and the general cylindrical case is replaced by a rectangular cylindrical case, and an elliptical one. By making it into a cylindrical case.

A small, thin case can be created in which the piezoelectric oscillating piece is surrounded by an outer tube with as small a distance as possible.

[Brief explanation of the drawing]

FIG. 1 shows a cross-sectional view of a conventional piezoelectric vibrator using a tuning fork type piezoelectric oscillator piece tube. Fig. 2, Fig. 5, and Fig. 4 show the actual embodiment of the present invention.
The figure is a cross-sectional view showing the structure of a piezoelectric vibrator, Figure 5 is a flat WM diagram of a piezoelectric oscillator piece, and Figure 4 is a @wjJWA diagram of a piezoelectric vibrator.
A schematic diagram showing the cross-section of the koji-layered S-tube on a graphite jig - @5Fia, Figures 6 and 7ai! 10 shots q Oke-x
Show shape. *5Wa (b) is a cross-sectional view of the cylindrical case, Figure 5 (-Light round case Moum cross-sectional view, 4g (a) is a square O cylindrical case: xwl I side view, Figure 7 (a) is an ellipse Figure 6 is a cross-sectional view of a rectangular chain case. Figure 7 (b) is a cross-sectional view of an oval cylindrical case. Lead wires 2a, 2a' - Inner l1111 - Easy to connect...Metal damping 4...Glass 5--EEIF oscillation piece 7.7'...Metal thin film electrode for frequency adjustment 8-Case 9-Glass case 10--Piezoelectric oscillation piece 11--Base 11'--Tuning fork fork section 12--Vibration section 15...Sheet Al 1 minute 14--tan section 15.157...Lead electrode film 16, 147--Electrode 17 .17'... Metal thin film electrode for same wave number adjustment 18-.
Craphite jig 19...Piezoelectric vibrating piece positioning part 20...Crossing prevention part 21...Case part melting part 22...Cylindrical case 25...Square cylindrical case 24...Oval shape Tubular case or above Applicant: Suwa Seikokai Co., Ltd. 1 Daishoto Patent attorney Mogami (eP) (6) (6) 3 years old Yare Ya, □ Off.

Claims (1)

[Claims] (1) Piezoelectric I in which piezoelectric oscillation piece tgL is hermetically sealed in a cylindrical case
In the l-element, the piezoelectric oscillating piece has a vibrating part, a base part, and f*
In addition, a part of the base includes a sealing part that is airtight between the connection part protruding outside of the case and the case, and a voltage distribution power oscillation piece. ? 11
It has a positioning part that fits inside the case, and a swimming prevention part when moving the case fd@min**. -The upper case and the pressure distribution voltage droplet ft# seal part are combined to form a large and f4! A piezoelectric vibrator. (2) Ill1 of the patent claim which is characterized in that the case is made of glass! 1. The piezoelectric vibrator according to item 1. (5) K: Let's assume that R is Enjoyari and f% mold 7? A piezoelectric vibrator described in Patent No. 1-11111111. (4) The case must be square and cylindrical.
The piezoelectric vibrator according to claim 1. (5) The piezoelectric vibrator according to claim 1p [1], wherein the base is cylindrical with an ellipse ν.