JPS58115312A - Detector for surface defect - Google Patents

Abstract

PURPOSE:To easily and precisely enter an optical cutting signal obtained by irradiating slit light to an object to be detected by detecting the optical cutting signal through a photodetector in which plural one-dimensional position sensors are arrayed in parallel to detect the surface status of the object. CONSTITUTION:Slit light L is irradiated to the object 4 to be detected from the 45 deg. inclined direction, the object 4 to be detected is moved in the direction of an arrow and optically cut light indicating the change of hight direction due to the slit light L is detected by one-dimensional position sensors arranged just above the object to be detected so as to be intersected with the slit light L at right angles. Optically cut light (l) obtained by irradiating the slit light L to the object 4 to be detected behaves as shown in the figure (a). When an observation part for the one-dimensional position sensor is defined as (a), the object 4 to be detected is continuously moved in the direction of an arrow and the optical cutting signal is analog-processed, so that the height in each peak point, an interval between peaks, width more than a level, width less than a level, etc. are obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface defect detection device that performs three-dimensional measurement to detect defects in local height dimensions, and its purpose is to easily detect optical cutting signals. Another objective is to enable high-speed defect ejection by being able to capture accurately.

As shown in Figure 1, a conventional surface defect detection device detects fly spot light by passing light from a light source (1) such as a laser beam through a vibrating mirror (2) and a parabolic mirror (3). Thing 14)
The two-dimensional position sensor (6) sequentially captures the cut light from the upper diagonal 450, and the processing circuit (6)
The surface condition was inspected by treating the surface with In this case, as shown in Figure 2, when the two-dimensional position sensor (6) captures diffused light, it detects the center (X mark) of the light distributed on the detection surface, so it cuts the light. When used for this purpose, a fly-sighted spot light is used, and data at each point must be taken in sequentially, which has the disadvantage that data cannot be taken in at the same time.

The present invention has been devised in view of this point, and will be explained in detail below using Examples.

In Fig. 8, +4) is the object to be tested, and the light from the light source il+ is made into parallel light by the lens (7) and reflected! A beam of light is irradiated onto the object (4) through the mirror (8) and the slit (9) to obtain a light cutting signal. The sensor is a light receiving element, and as shown in Figure 4, it is composed of multiple one-dimensional position sensors (11υ, (1
1t)...(lln) are arranged in parallel, and the surface condition is inspected by detecting from an obliquely upward direction 45 with this light-receiving element. n one-dimensional position sensors (lt
+), (us)...(lln) were arranged in parallel, and the nine light-receiving elements received the light cutting light, position t! shi”j
(111) produces a current that is inversely proportional to the distance χ1 from the terminal. 1g (lit)... (ttn
), the current l, . . . 1 . occurs. These signals are converted into a current-voltage conversion circuit +1! + converts it to voltage, inputs it into the main field circuit α, processes the signal in processing circuit 6), and displays it. Here, these analogies do not have any time lag, and at the same time the interwoven circuit (
It will be incorporated into one score. If there is no defect on the surface of the test object (4), there will be no disturbance in the optical cutting light, so Fig. 5C
There is a lot of disturbance in the detection signal as shown in a), but if there is a defect on the surface, the optical cutting light will be disturbed as shown in Fig. 5(b). l1g
)...(lln), some detection signals change. This allows surface conditions to be revealed and defects to be detected.

FIG. 6 shows another embodiment of the present invention, in which the test object I4) is irradiated with slit light from an oblique angle 45° in the same manner as in FIG. The one-dimensional position sensor (11) shown in Fig. 7, which is arranged from above at right angles to the slit light, detects the light cutting light that shows the change in the height direction due to the slit light hitting the object 14)K. It is something. In Figure 1, Q4 is a peak hold circuit,
0 @ is the peak interval detection circuit, - is the protrusion width detection circuit, Q is the table control unit, U is the calculation control unit, (I-F
This is the i display section.

The light-cutting light l#i obtained by irradiating the slit light onto the test object (4) is as shown in Fig. 8 (+1), and the observation part of the one-dimensional position sensor (11) is a, and the test object By continuously moving the object +4) with the moving direction of the object (4) in the direction of the arrow, and performing analog processing on the optical cutting signal, the height of each peak point and the peak , the width above a certain level, the width below a certain level, etc. can be obtained. When inspecting a three-dimensional shape, the continuity of the shape, the dimensions of characteristic points, and the spacing are often more problematic than the absolute dimension measurement of each point. In addition, even when inspecting the dimensions of a fixed position, a table control unit αη such as a Nijicoater is provided on the table that moves the object (4) without stopping, and a signal of the fixed position is output from there. Dimensions can be measured by sampling the position signal from the dimensional position center tj (11).

As described above, the present invention detects a light cutting signal obtained by irradiating a specimen with a pick-and-slide light using a light receiving element formed by arranging a plurality of one-dimensional position sensors in parallel, and detects the surface condition. Since the inspection is carried out in a similar manner, it is possible to easily and accurately capture the optical cutting signal, and to easily inspect defects on the surface of the object to be inspected, and also to move the object by irradiating the object with a slit light. Since the surface condition is inspected by detecting the optical cutting signal which is generated by a one-dimensional one-motion sensor, it is possible to detect defects on the surface at high speed.

[Brief explanation of drawings]

Figure 1 is a configuration diagram of a conventional surface defect ejection device, and Figure 2 is a 2
An explanatory diagram of the dimensional position sensor, Fig. 8 is a configuration diagram of an embodiment of the present invention, Fig. 4 is a block circuit diagram of the same as above, Fig. 5 (@), (- is an explanatory diagram of the same as above, sS diagram is A main part configuration diagram of another embodiment of the present invention, FIG. 7 is a block circuit diagram same as above, and FIGS. 8(a) and (b) are operation explanatory diagrams same as above. (4)... Test subject Thing, (9)...slit, (to)
... Light receiving element, (11), (11+), (11m
) = (lln) = 1-dimensional vehicle Jisho J sensor. Agent Patent Attorney Ishi 1) Chief 7th Question 1 Figure 4 Figure 5 (a) (b) Figure 6 Figure 7] (o) IS8″ Procedural Amendment (Spontaneous) August 23, 1982 Mr. Commissioner of the Japan Patent Office 1, Indication of the case 1982 Patent II [No. 214456: 6 Name of the invention Shape defect detection device (name change) (Relationship with the person making the amendment Patent applicant address Osaka prefecture) 1048 Kadoma, Kadoma City Name (583) Matsushita Electric Works Co., Ltd. Representative Iku Kobayashi 1, Agent postal code 530 Telephone Osaka (06) 345-7777 (Representative) 15,
Date of amendment order as attached. Application number for corrected specification: Japanese Patent Application No. 56-214456 1. Title of invention: Shape defect detection device 2. Box 11 of claim: Light obtained by irradiating the object to be inspected with slit light. 1. A wide defect detection device characterized in that a cut vIT signal is detected by a light receiving element formed by arranging a plurality of one-dimensional position sensors in parallel to inspect a surface condition. 1. Shape defect detection characterized in that a one-dimensional position sensor detects a light cutting signal obtained by irradiating a slit light onto a test object and moving the test object to detect a surface condition. Device. 3. Detailed Description of the Invention The present invention relates to a shape defect detection device that detects defects in partial height dimensions by performing four three-dimensional measurements, and its purpose is to easily detect optical cutting signals. In addition, the Kt value is set so that defect detection can be carried out with high accuracy. To measure height using the light section method, a plane light is projected onto the object from an angle of 45 degrees, and the plane light hits the object through a sensor placed at right angles to the plane light from the true angle. The object cannot be moved until a change in the height direction is detected due to r! The disadvantage is that the measurement interval needs to be sufficiently short, and the complexity of post-processing makes it difficult to achieve high-speed detection. Figures 1 and 112 show the schematic configuration and circuit blocks of the embodiment according to @28 light in the case of detection by the above-mentioned optical cutting method. Irradiate from 45 degrees, and use the test object (1-dimensional position 3 sensor 111 shown in @2@, moving the ship in the direction of the arrow and placing it at right angles to the slit light from directly above) to test object 14). It detects the light cutting light that shows the change in height direction due to the slit light hitting K. In the second m, α4 is a peak main field circuit, a@ is a peak interval detection circuit, a@ is a protrusion width detection circuit, llh is a table-based m section,
The α-shape is the arithmetic control section, and the pen is the display section. The light-cutting light trxss diagram obtained by irradiating the slit light onto the test object 141 (as shown in al). By continuously moving the test object (41) in the direction of the arrow and performing analog processing on the optical cutting signal, the height of each peak point, the interval between peaks, and the In the case of inspecting a three-dimensional shape with a width below a certain level, the continuity of the shape and the dimensions and spacing of characteristic points are more important than the absolute measurement of each point. In addition, even when inspecting the dimensions of a fixed position, a table control unit such as an encoder is provided on a table that moves the object 14) without stopping, and a fixed position signal is output from there. The dimensions can be measured by sampling the position signal from the one-dimensional four-dimensional sensor (11) at that timing. 11411rill1 A conventional shape defect detection device corresponding to the invention is shown. This conventional device converts light from a light source such as a laser beam into a lid interspot through a vibrating mirror 12) and a parabolic mirror 1B). Irradiate light onto the test object (41) and position it in a two-dimensional position from a 45° angle to Hijikata.
The cutting light was sequentially taken in by the processing circuit (J6) and the surface condition was inspected. When capturing diffused light, the center (X mark) of the light distributed on the detection surface is detected, so when using it for light cutting, a flinter spot light must be used and data at each point must be captured sequentially. It had a drawback that II7 was affected by the simultaneous incorporation of both.I11 Invention r! This invention was made in view of this point, and will be explained in detail in Examples below.In Fig. 1g6, (41 is the specimen) Then, the light from the light source (11) is made into parallel light from the lens (Ma IK), and the slit light is irradiated onto the test object (4) through a set of reflection mirrors and the slit (9) to obtain a light cutting signal. The light receiving element is formed by arranging a plurality of one-dimensional position sensors (Ill), (lim)...(lln) in parallel as shown in No. 71i! Detect the diagonal 45@ and inspect the superficial layer.n 1
Dimensional position sensor (l1l), (l1m) -(
When the light-cutting light is received by the light-receiving elements arranged in parallel, the position sensor (1111 is the distance XI from the terminal.
A current 1st inversely proportional to K is generated. Position sensor (I
Im) Also for the river (lln), 1i1sK current Im...
・Produces In. These signals are converted to voltage by a current-voltage conversion circuit +111, taken into a rate circuit (II), and processed and displayed by an N & j1 circuit (1).Here, each of these data is The hold circuit QIK is captured at the same time without any deviation.If there is no defect on the surface of the object 14), there is no disturbance in the light cutting light, so the detection signal K
If there are no scratches but there are defects on the surface, use the
n position sensors (111). Some of the detection signals among (Ill)...(lln) change. This allows the surface condition to be detected and defects to be detected.0 Like the ridges, the present invention uses a plurality of one-dimensional position sensors arranged in parallel to transmit the light cutting signal obtained by irradiating the object with slit light. Since the surface condition is inspected by detecting the surface condition using the formed light receiving element, the light cutting signal can be easily and accurately inputted, and defects on the surface of the object to be inspected can be easily inspected. The surface condition is inspected by irradiating the inspection object with Thrirad light and moving the object to detect the optical cutting signal, which is then detected by a one-dimensional tabletop sensor, which enables high-speed detection of defects on the surface. This has the effect that it can be done with 4. Brief explanation of the drawings 111 is a schematic diagram of an embodiment of the present invention, FIG. 2 is a block circuit diagram of the same as above, FIG. 3 is a fat diagram, and (b) is a -
The above operation explanatory diagram, Fig. 4 shows the II origin of the conventional shape defect detection device corresponding to the Fi111 invention, Fig. 5 shows the theory #4 of the two-dimensional position sensor, and Fig. 116 shows another uninvented implementation. The configuration diagram of the example, Figure 7 is the block circuit diagram of the same as above, and Figure 8 (m
l, (The figure is the same operation explanatory diagram as above.
(1ls), (ll5) ”・(lln) = One-dimensional desk diagram Figure 1 to Figure 8 are corrected in the attached sheet. Figure 1 Figure 3 Figure 4

Claims (2)

[Claims] (1) A light cutting signal obtained by irradiating the object with slit light is detected by a light receiving element formed by arranging a plurality of one-dimensional position sensors in parallel, and the surface state t-inspection is performed. A surface defect detection device characterized by (2) A one-dimensional position sensor detects a light cutting signal obtained by irradiating the object to be inspected with one-strip light and moving the object to detect the surface condition. Surface defect detection device.