JPS58114709U

JPS58114709U - Beam diameter measuring device

Info

Publication number: JPS58114709U
Application number: JP1110082U
Authority: JP
Inventors: 育夫前田
Original assignee: Ricoh Co Ltd
Current assignee: Ricoh Co Ltd
Priority date: 1982-01-29
Filing date: 1982-01-29
Publication date: 1983-08-05

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来のビーム径測定装置（回転式）を示す概略
図、第２図は従来の他の測定装置（直進式）を示す概略
図、第３図はこの考案の一実施例を示す概略図、第４図
は、上記実施例におけるビーム走査の変位を示す説明図
、第５図は上記ビー　　　　−ム歩査によって得られる
レーザビ」ムの出力変化の波形図である。Ｋｌ、　Ｋ２・・・ナイフェツジ、Ｄ・・・フォトディ
テクタ、１・・・移動板、２・・・ガイド′板、３・・
・基板、４・・・圧縮バネ、５・・・マイクロメータ、
Ｈ・・・マイクロメータヘッド、６・・・支持枠、Ｏ２
０・・・オシロスコープ。Fig. 1 is a schematic diagram showing a conventional beam diameter measuring device (rotary type), Fig. 2 is a schematic diagram showing another conventional measuring device (straight type), and Fig. 3 is a schematic diagram showing an embodiment of this invention. The schematic diagram, FIG. 4, is an explanatory diagram showing the displacement of the beam scan in the above embodiment, and FIG. 5 is a waveform diagram of the output change of the laser beam obtained by the beam walking. Kl, K2... knife, D... photodetector, 1... moving plate, 2... guide' plate, 3...
・Substrate, 4... Compression spring, 5... Micrometer,
H...Micrometer head, 6...Support frame, O2
0...Oscilloscope.

Claims

[Scope of utility model registration request]

a moving plate having two knives perpendicular to each other;
means for supporting the movable plate so as to be linearly movable in a direction forming an angle of 45 degrees with respect to the knife; means for linearly moving the movable plate in the direction; and transmission of the beam blocked by the movement of the knife. A beam diameter measuring device comprising: a light receiving element that receives light; and means for calculating or displaying a beam diameter from the amount of movement of the knife and the output of the light receiving element.