JPS58114328A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To unify a floating slider and a thin film magnetic head element for a thin film magnetic head of a floating structure, by providing numbers of thin film magnetic head elements to form a magnetic circuit on a flat substrate and a coil and forming a floating rails among these head elements. CONSTITUTION:Numbers of thin film magnetic head elements 11 are provided on a flat substrate 10 of Al2O3, etc. to form a magnetic circuit 12 and a coil conductor part 13. Then floating rails 15 are formed between the elements 11. Thus a thin film magnetic head of a floating structure which has a reading/writing R/W gap 14 is obtained. In this case, a vertical or horizontal thin film magnetic head is obtained for the elements 11. As a result, it is possible to unify the thin film magnetic head with a slider which floats up with a fluid dynamic air current and in accordance with the revolutions of magnetic disk.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) The present invention relates to a magnetic disk device as a magnetic arrangement medium oriented to Wi4Fi high-density magnetic Ie, and a thin film of a magnetic head element for recording or reading for the disk. The present invention relates to a method of manufacturing a magnetic head intended to be used as a magnetic head.

(2) Prior art and problems Recently, in this type of magnetic disk device, attention has been focused on thin film magnetic heads that make full use of thin film or thick layer techniques as part of the trend toward high performance. The thin-film magnetic head element not only has a space Wl (hereinafter abbreviated as R/W gap) that provides a lead to the magnetic circuit of the element itself, but also has an extremely fine gap that allows access to the opposing disk medium surface. The IWJ that realizes density magnetic recording is a thin sIS head with a droop type configuration, and an lI
8 shows a thin-layer magnetic head with a horizontal configuration, and the thin-film head element and its operation will be explained with reference to both figures.

In the perspective view of the magnetic head in Figure 1B), l is a slider that floats or floats due to hydrodynamic air flow as the magnetic disk rotates, and 2 is the rear end of slider l, that is, the magnetic disk in the direction of the arrow. This is a thin film head element attached to the rear end for one direction of rotation. Right side of the figure ←) Figure #'i front layout》 The component shown in the figure is an aluminum alloy disk coated with a magnetic material, a so-called magnetic head lI? in contact with a so-called magnetic disk 3? iI
It is a diagram.

As shown in the simplified diagram, the thin-film head element 2 has a magnetic layer 5 equivalent to that of conventional magnetism;
A gap is formed. Also, it is an electromagnetic coil or coil with one 6Fi-member wound conductor as shown in the figure. 1111←) 7 in the figure is an external lead terminal portion of the coil.

On the other hand, in the 2m-th horizontal lid thin magnetic head, the basic structure of the thin film head element 2 and the structure 1 of the floating slider l are used.
1! is Okaji. However, the difference is that the thin film head element is attached horizontally to the bottom surface of the floating slider. 2nd M
) The figure clearly shows how the thin film head element 2 is mounted and how the rails 8 are formed on the floating slider.

However, H)It in Figure 2 is the thin S seen from the magnetic disk side.
*This is a perspective view of the air head, and a cross-sectional view taken along the indicator line A-A of 11H) II.

However, the -1 thin film head, which is currently the mainstream of magnetic head elements, requires a large number of man-hours to perform gap dibs processing and floating rail processing after cutting the forming elements in a line from a wafer. The problem of Takashi Dogami remains. On the other hand, although it has not been put into practical use because the horizontal layer thin film head formation is unknown, machining after element formation is easy and suitable for mass production.

(First Purpose of the Invention The present invention @ aims to horizontally
Therefore, it is an object of the present invention to provide a novel manufacturing method for integrally assembling the floating slider and the thin film head element.

(4) Structure of the invention It is popular to form a floating magnetic head for arranging magnetic recording media or reading recorded information in a thin layer, and a thin film consisting of a magnetic circuit, a coil conductor, etc. on at least a flat substrate. a step of forming a head element, a step of forming a convex rail layer for floating the wrinkled head on the thin film head element substrate, and a step of etching the rail portion of the layered film to form a floating rail at a predetermined NIl. This is a method for manufacturing a magnetic head Om.

(5) Examples of the invention Below, No. 311 to all! Referring to 6WJ, this issue is 1l.
1 IO example! - to do. Each figure is a diagram for explaining the main process related to manufacturing.

Figure 3 shows, for example, the front surface M) and 1IiI of the head forming base @10 on which the flat surface processing of Ale On +1TIC, that is, the titanium carbide-containing aluminum ζdecera construction composition has been completed.
illll←) (The 0) and (b) figures of each cabinet are also the same front space and side WUIIl).

No. 411, the thin film head element 11 is placed on the ma-diagram substrate 10.
When this is formed, an enlarged front view (C) of the head element 11 and an enlarged side cross-sectional view of the element formation are shown to the right (No. 511 and No. 6 WJ4 are shown in the same arrangement). In the figure, reference numeral 12 denotes a magnetic circuit forming portion formed by pattern-covering a highly magnetically permeable metal which is a component of the element 11, 13 a fill conductor layer formed by pattern-covering a conductor such as steel in a vortex IIk or spiral shape, and 14a magnetic@ Ml! This is the R/W gap provided inside. The magnetic circuit section 12 and the conductor layer 1
Although not shown, an insulating layer is formed between the coil conductor layer 3 and each coil conductor layer. Thus, the height of the formed head element is several μm to several tens of μm.

The thin film head element 11 shown in FIG. 411 is a conventional integrated circuit (
It is formed as a module on a substrate by applying IJ printing technique.

#! Continuing from the above, Figure 5 shows the floating rail 1 floating by air flow.
5 (#Todoroki at 8 in FIG. 2) is formed on the substrate 1G. That is, a convex rail is formed between the array pitches of the head elements 11, and in combination with a substrate material, for example, 810. It is formed using a film material having a composition such as Tom 40S. However, as shown in the figure, the height of the convex rail 15 is the same or higher depending on the height of the head element 1m.
This is layered.

In this case, if the element height is relatively low, the IFi lift-off method is used, and if the element height is relatively high, for example, several tens of micrometers, the entire surface of the substrate is patterned using a mask vapor deposition technique. A film is formed 15 thereon. Further, if necessary, a film is formed on the entire surface, and after that, the gap dibs are flat-wrapped so that they have the required dimensions.

Figure 6 shows floating rail 1 with splashed patterns in the preliminary process! This is one way to achieve the desired pattern accuracy for the rail convex portions of the film formed by the mass vapor deposition method, etc., in the sO reprocessing process. In order to create a finer rail pattern on the rail attachment surface, the # process involves, for example, applying a resist to the entire surface of the board and selectively etching the coated surface by pattern exposure and chemical etching. A rail surface 16 is formed. However, the rail surface can be processed with high precision by ion etching or plasma etching using an ion showering method using gas plasma, or by mechanical processing means.

In the case of processing using the ion etching process, processing for imparting accuracy to the core width of the thin film head element 11 or the width of the magnetic circuit 12 can also be carried out in the same process, which is convenient.

The enlarged front view e1 and side cross-sectional view of the thin film head element in FIG. It is sufficient to cut the element substrate 10, which has been marked with regularity, with a diamond cutter.

In this way, it is possible to manufacture a large number of thin film magnetic head elements at the same time.

(6) According to the method for manufacturing a magnetic head' element of the present invention described in detail, the element forming group IN (see No. 311 jll) of an appropriate size can be used.
By using the floating rail, it is possible to integrate the floating rail, and it is easy to manufacture even a slide with an intricate rail shape. Further, the magnetic head element of the present invention has the advantage that it can be easily applied to a flying force control slider configured to use negative pressure with respect to an opposing magnetic disk. From this point of view, the practical effects of the present invention are significant.

[Brief explanation of the drawing]

(A) Figure and side view (B) Figures, and Figures 3 to 6 are diagrams for explaining the manufacturing method of the present invention. (A) Figure is a front view, (B) Figure is a side view, (/1 The figure is an enlarged front view of the thin film head element, and Figure 2) is a side sectional view of Figure 3C. In the figure, 1 is a slider, 2 and 11 are thin film head elements, 3 is a magnetic recording medium (magnetic disk), 4 and 14 are R/W gaps, 5 and 12 are magnetic circuits, 6 and 13 are coil conductor parts,
lO is the substrate for forming the head element, and 8, 15, and 16 are the floating or floating rails of l.

Claims (1)

[Claims] A floating magnetic head for recording or distributing information for Ugukiki Brass #11I3 is formed into a thin film, and the thin film head is formed from a magnetic circuit and a coil conductor on at least a flat substrate. a step of forming an element, a step of forming a convex rail laminated film for the head floating on the substrate, and a step of etching the rail portion of the front laminated layer to form a floating rail in a predetermined area. A method of manufacturing a magnetic head, comprising: