JPS58113903A - Waveguide type optical wavelength filter - Google Patents
Waveguide type optical wavelength filterInfo
- Publication number
- JPS58113903A JPS58113903A JP21398381A JP21398381A JPS58113903A JP S58113903 A JPS58113903 A JP S58113903A JP 21398381 A JP21398381 A JP 21398381A JP 21398381 A JP21398381 A JP 21398381A JP S58113903 A JPS58113903 A JP S58113903A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- main channel
- channel waveguide
- refractive index
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（１） 発明の技術分野
本発明は小型でかつ量産性にすぐれた導波路型光波長フ
ィルタに関する。DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a waveguide-type optical wavelength filter that is compact and easy to mass-produce.
（２） 技術の背景
−）テ、波長フィルタは光波長分割多重伝送システムヤ
資、′；″、−タリン′クシステム等の光通信シ′ステ
ムぐ実現するりえで必要不可欠な光回路部品である。(2) Technical Background Wavelength filters are essential optical circuit components for realizing optical communication systems such as optical wavelength division multiplexing transmission systems, link systems, etc. be.
（３）従来技術と問題点
従来の光波長フィルタはプリズム、誘電体多層膜フィル
タ、回折格子等とレンズ等の光学系を組み合わせて構成
されている。この様な従来の光波長フィルタは、まず各
構成素子の機械的位置調整を行った後接着剤でそれぞれ
を接着して製造されているが１位置調整が難しいため製
造に時間がかかり生産性が低く、また接着剤の経年変化
などがあり信頼度の高い光波長フィルタを得ることが困
難であった。(3) Prior Art and Problems Conventional optical wavelength filters are constructed by combining optical systems such as prisms, dielectric multilayer filters, diffraction gratings, and lenses. Conventional optical wavelength filters like this are manufactured by first adjusting the mechanical positions of each component and then gluing them together with adhesive, but because it is difficult to adjust one position, manufacturing takes time and reduces productivity. It has been difficult to obtain a highly reliable optical wavelength filter due to the low wavelength and aging of the adhesive.
（４）発明の目的
本発明は上述の問題点に鑑み、量産性に虐み、かつ低価
格、小型の導波路型波長フィルタを提供することを目的
とする本のである。(4) Purpose of the Invention In view of the above-mentioned problems, the present invention is a book aimed at providing a small-sized waveguide type wavelength filter that is easy to mass-produce and is inexpensive.
（５）発明の構成
すなわち本発明は誘電体結晶等の基板の表面近傍に、該
基板よりも屈折率の高い屈折率を有する主チャネル導波
路と該主チャネル導波路の一部から分岐する分岐チャネ
ル導波路を形成すると共に、該主チャネル導波路を伝搬
する光のうち特定の波長の元のみが核分岐チャネル導波
路へ屈曲する様に該主チャネル導波路と該分岐チャネル
導波路の接続部に該主チャネル導波路と屈折率が異なる
部分を所定の周期で核主チャネル導波路の光路方向に形
成して成ることを％徴とする導波路型光波長フィルタを
提供°するものである。(5) Structure of the invention That is, the present invention provides a main channel waveguide having a refractive index higher than that of the substrate near the surface of a substrate such as a dielectric crystal, and a branch branching from a part of the main channel waveguide. A connecting portion between the main channel waveguide and the branch channel waveguide to form a channel waveguide and to bend only the source of a specific wavelength of light propagating through the main channel waveguide to the nuclear branch channel waveguide. The present invention provides a waveguide-type optical wavelength filter in which portions having a refractive index different from that of the main channel waveguide are formed at predetermined intervals in the optical path direction of the core main channel waveguide.
（６）発明の実施例 以下図を用いて本発明の実施例につき詳述する。(6) Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.
第１色は本発明の一実施例である。図中１は基板、２は
主チャネル導波路、３は分岐チャネル導波路、４はグレ
ーティングである。The first color is an example of the invention. In the figure, 1 is a substrate, 2 is a main channel waveguide, 3 is a branch channel waveguide, and 4 is a grating.
本実施例においては、基＆１としてＬｉＮｔ）Ｏ，等の
誘電体結晶やガラス、ＧａＡｓ等の半導体基板が使用さ
れ、その表面近傍に例えばＴ１等の金属を選択的に拡散
するか、あるいｆ４ ｃ Ｖ Ｄ法、エビタキ７ヤル成
長等の方法により基板１の屈折率ｎより＾い屈折４ｎ十
Δｎを有する主チャネル導波路２及び分岐チャネル導波
路３を形成する。In this embodiment, a dielectric crystal such as LiNt)O, glass, or a semiconductor substrate such as GaAs is used as the base &1, and a metal such as T1 is selectively diffused near the surface of the substrate, or a metal such as T1 is selectively diffused in the vicinity of the surface thereof, or A main channel waveguide 2 and a branch channel waveguide 3 having a refractive index 4n + Δn which is higher than the refractive index n of the substrate 1 are formed by a method such as the cVD method or epitaxial growth.
次に主チャネル導波路２と分岐チャネル導波路３の接続
部に一定の周期、例えば分岐させたい光の導波路内波長
の１／２波長の周期でイオンを打ち込み、その部分だけ
屈折率を変化させ、いわゆるグレーティング４を形成す
る。尚、図中黒印で示す部分がイオンを打ち込んだ部分
である。Next, ions are implanted into the connecting part between the main channel waveguide 2 and the branch channel waveguide 3 at a certain period, for example, at a period of 1/2 the wavelength in the waveguide of the light to be branched, and the refractive index is changed only in that part. to form a so-called grating 4. In addition, the part indicated by the black mark in the figure is the part into which ions were implanted.
グレーティング番には波長選択性があるので、回折格子
と同様の原理で特定の波長のみが分岐チャネル導波路３
へ回折される。従って主チャネル導波路２と屈折率の異
なるグレーティング４を形成する周期を変えることで任
意の波長の光を分岐することが可能となる。Since the grating number has wavelength selectivity, based on the same principle as a diffraction grating, only a specific wavelength is transferred to the branch channel waveguide 3.
is diffracted to Therefore, by changing the period in which the grating 4 having a different refractive index from the main channel waveguide 2 is formed, it becomes possible to branch light of an arbitrary wavelength.
この時分岐導波路と主導導波路のなす角全グレーティン
グの周期をかえる事によってＯ”〜３６０’まで任意に
とることも可能である。At this time, the angle formed by the branch waveguide and the main waveguide can be arbitrarily set from 0'' to 360' by changing the period of the total grating.
また第２図に示す様に主チャネル導波路１から複数の分
岐チャネル導波路５．６．７を分岐することにより、光
波長分割多重された光信号を各チャネルごとに分離して
取シ出すことも可能である、尚、本実施例ではグレーテ
ィング４をイオン注入で形成したが、これに限るもので
はない。In addition, as shown in Fig. 2, by branching a plurality of branch channel waveguides 5, 6, 7 from the main channel waveguide 1, the optical wavelength division multiplexed optical signal is separated and extracted for each channel. Although the grating 4 is formed by ion implantation in this embodiment, the present invention is not limited to this.
（１）発明の詳細
な説明した様に本発明にかかる導波路型光波長フィルタ
呟、半導体集積回路技術と同様の技術を用いてバッヂ処
理により製造できるので量産性に富み、低コスト化を図
ることが可能である。(1) As described in detail, the waveguide-type optical wavelength filter according to the present invention can be manufactured by badge processing using the same technology as semiconductor integrated circuit technology, so it is highly mass-producible and reduces costs. Is possible.
また、本発明にかかる導波路型波長フィルタを単体とし
て用いるだけでなく、同一基板上に他の光機能回路と共
に形成することにより光集積回路を形成することも可能
となる。Further, it is possible to form an optical integrated circuit by not only using the waveguide type wavelength filter according to the present invention as a single unit, but also forming it together with other optical functional circuits on the same substrate.
第１図は本発明の一実施例、第２図は本発明の他の実施
例を示す甲である。
１・・・・・・基板、２・・・・・・主チャネル導波路
、３．５．６、フ分岐チャネル導波路、４・・・・・・
グレーティング。FIG. 1 shows one embodiment of the present invention, and FIG. 2 shows another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Main channel waveguide, 3.5.6, Branch channel waveguide, 4...
Grating.
Claims (1)
の＾い屈折率を有する主チャネル導波路と核主チャネル
導波路の一部から分岐する分岐チャネル導波路を形成す
ると共に、核主チャネル導波路を伝搬する光のうち特許
の波長の元のみが該分岐チャネル導波路へ屈曲する様に
該主チャネル導波路と該分岐チャネル導波路の接続部に
該主チャネル導波路と屈折率が異なる部分を所足の周期
で核主チャネル導波路の光路方向に形成して成ることを
特徴とする導波路型光波長フィルタ。A main channel waveguide having a refractive index lower than that of the substrate and a branch channel waveguide branching from a part of the core main channel waveguide are formed near the surface of a substrate such as a dielectric crystal. The main channel waveguide and the refractive index are connected to the connecting portion of the main channel waveguide and the branch channel waveguide so that only the source of the patented wavelength of the light propagating through the main channel waveguide is bent to the branch channel waveguide. 1. A waveguide-type optical wavelength filter characterized in that portions having different wavelengths are formed at a predetermined period in the optical path direction of a nuclear main channel waveguide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21398381A JPS58113903A (en) | 1981-12-26 | 1981-12-26 | Waveguide type optical wavelength filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21398381A JPS58113903A (en) | 1981-12-26 | 1981-12-26 | Waveguide type optical wavelength filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58113903A true JPS58113903A (en) | 1983-07-07 |
Family
ID=16648298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21398381A Pending JPS58113903A (en) | 1981-12-26 | 1981-12-26 | Waveguide type optical wavelength filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58113903A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156306A (en) * | 1984-08-28 | 1986-03-22 | Fujitsu Ltd | Optical demultiplexer |
| JPS63229377A (en) * | 1987-03-18 | 1988-09-26 | Nec Corp | Waveguide type light/sound spectrum analyzer |
| EP1182472A2 (en) * | 2000-08-23 | 2002-02-27 | Matsushita Electric Industrial Co., Ltd. | Optical element and method of fabrication thereof |
| JP2016031433A (en) * | 2014-07-28 | 2016-03-07 | 日本放送協会 | Optical control device |
-
1981
- 1981-12-26 JP JP21398381A patent/JPS58113903A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156306A (en) * | 1984-08-28 | 1986-03-22 | Fujitsu Ltd | Optical demultiplexer |
| JPS63229377A (en) * | 1987-03-18 | 1988-09-26 | Nec Corp | Waveguide type light/sound spectrum analyzer |
| EP1182472A2 (en) * | 2000-08-23 | 2002-02-27 | Matsushita Electric Industrial Co., Ltd. | Optical element and method of fabrication thereof |
| EP1182472A3 (en) * | 2000-08-23 | 2004-02-04 | Matsushita Electric Industrial Co., Ltd. | Optical element and method of fabrication thereof |
| US6826344B2 (en) | 2000-08-23 | 2004-11-30 | Matsushita Electric Industrial Co., Ltd. | Optical element and method of fabrication thereof |
| JP2016031433A (en) * | 2014-07-28 | 2016-03-07 | 日本放送協会 | Optical control device |
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