JPS58111703A - スペックル応用測定装置 - Google Patents

スペックル応用測定装置

Info

Publication number
JPS58111703A
JPS58111703A JP21525181A JP21525181A JPS58111703A JP S58111703 A JPS58111703 A JP S58111703A JP 21525181 A JP21525181 A JP 21525181A JP 21525181 A JP21525181 A JP 21525181A JP S58111703 A JPS58111703 A JP S58111703A
Authority
JP
Japan
Prior art keywords
signal
image sensor
target
lens
speckle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21525181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6212443B2 (enExample
Inventor
Toshitsugu Ueda
敏嗣 植田
Eiji Ogita
英治 荻田
Yutaka Ono
裕 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP21525181A priority Critical patent/JPS58111703A/ja
Publication of JPS58111703A publication Critical patent/JPS58111703A/ja
Publication of JPS6212443B2 publication Critical patent/JPS6212443B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21525181A 1981-12-25 1981-12-25 スペックル応用測定装置 Granted JPS58111703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21525181A JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21525181A JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Publications (2)

Publication Number Publication Date
JPS58111703A true JPS58111703A (ja) 1983-07-02
JPS6212443B2 JPS6212443B2 (enExample) 1987-03-18

Family

ID=16669214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21525181A Granted JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Country Status (1)

Country Link
JP (1) JPS58111703A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015114279A (ja) * 2013-12-13 2015-06-22 國防部軍備局中山科學研究院 精密角度位置決め装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015114279A (ja) * 2013-12-13 2015-06-22 國防部軍備局中山科學研究院 精密角度位置決め装置

Also Published As

Publication number Publication date
JPS6212443B2 (enExample) 1987-03-18

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