JPS58109244U - heat treatment equipment - Google Patents
heat treatment equipmentInfo
- Publication number
- JPS58109244U JPS58109244U JP520382U JP520382U JPS58109244U JP S58109244 U JPS58109244 U JP S58109244U JP 520382 U JP520382 U JP 520382U JP 520382 U JP520382 U JP 520382U JP S58109244 U JPS58109244 U JP S58109244U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment equipment
- blocks
- heating elements
- heating coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の加熱コイルに雄ネジをろう付は又は溶接
して加熱コイルピヅチ間隔を設定固定することを可能に
した加熱コイルを有する気相成長装置の反応部の構成図
、第２図は本考案の一実施例として使用される加熱コイ
ル固定用治具の構造図、第３図は本考案の一実施例によ
る加熱コイル 、固定用治具を取りつけた時の外
観図ζ第４図は本考案による加熱フィル固定用治具を取
りつけた時の加熱コイル部の断面図である。
１・・・・・・反応チューブ、２・・・・・・加熱用コ
イル、３・・・・・・雄ネジ、４・・・・・・絶縁物、
５・・・・・・雄ネジ用ナッ −ト、６・・・・・
・コイル固定用治具、７・・・・・・コイル固定用ナツ
ト。Fig. 1 is a configuration diagram of a reaction section of a vapor phase growth apparatus having a conventional heating coil that makes it possible to set and fix the heating coil pitch by brazing or welding a male screw to the heating coil. Fig. 3 is a structural diagram of a heating coil fixing jig used as an embodiment of the present invention, and Fig. 4 is an external view of the heating coil according to an embodiment of the present invention when the fixing jig is installed. FIG. 3 is a cross-sectional view of the heating coil portion when the heating filter fixing jig according to the present invention is attached. 1... Reaction tube, 2... Heating coil, 3... Male screw, 4... Insulator,
5... Male screw nut, 6...
- Coil fixing jig, 7... Coil fixing nut.
Claims (1)
ブロック化し、各ブロックの間隔を任意に設定して熱処
理部に取り付けたことを特徴とする熱処理装置。A heat treatment apparatus characterized in that the heating elements are formed into blocks using a jig for grouping one or more heating elements, and the intervals between the blocks are arbitrarily set and the blocks are attached to a heat treatment section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP520382U JPS58109244U (en) | 1982-01-19 | 1982-01-19 | heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP520382U JPS58109244U (en) | 1982-01-19 | 1982-01-19 | heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58109244U true JPS58109244U (en) | 1983-07-25 |
Family
ID=30018014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP520382U Pending JPS58109244U (en) | 1982-01-19 | 1982-01-19 | heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58109244U (en) |
-
1982
- 1982-01-19 JP JP520382U patent/JPS58109244U/en active Pending
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