JPS58106945U - Substrate storage jig with lubricant coating - Google Patents

Substrate storage jig with lubricant coating

Info

Publication number
JPS58106945U
JPS58106945U JP486082U JP486082U JPS58106945U JP S58106945 U JPS58106945 U JP S58106945U JP 486082 U JP486082 U JP 486082U JP 486082 U JP486082 U JP 486082U JP S58106945 U JPS58106945 U JP S58106945U
Authority
JP
Japan
Prior art keywords
substrate storage
storage jig
lubricant coating
conducted
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP486082U
Other languages
Japanese (ja)
Other versions
JPS6233322Y2 (en
Inventor
鵜飼　勝三
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP486082U priority Critical patent/JPS58106945U/en
Publication of JPS58106945U publication Critical patent/JPS58106945U/en
Application granted granted Critical
Publication of JPS6233322Y2 publication Critical patent/JPS6233322Y2/ja
Granted legal-status Critical Current

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  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

゛１図は本考案の外観斜視図、第２図は要部拡゛′−−
大断面図で゛ある。　　　−゛　、Figure 1 is an external perspective view of the present invention, Figure 2 is an enlarged view of the main parts.
This is a large cross-sectional view. −゛、

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体製造−一のウェイ寸搬送機−に付帯するメタル製
基板収納治具の表面に潤滑性被験を施し１．たこと二〒
徴とする潤滑性被膜材ｉ板収納竺具。A lubricity test was conducted on the surface of a metal substrate storage jig attached to semiconductor manufacturing - one way size transfer machine.1. Two things
Features a lubricating coating material i-board storage tool.
JP486082U 1982-01-18 1982-01-18 Substrate storage jig with lubricant coating Granted JPS58106945U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP486082U JPS58106945U (en) 1982-01-18 1982-01-18 Substrate storage jig with lubricant coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP486082U JPS58106945U (en) 1982-01-18 1982-01-18 Substrate storage jig with lubricant coating

Publications (2)

Publication Number Publication Date
JPS58106945U true JPS58106945U (en) 1983-07-21
JPS6233322Y2 JPS6233322Y2 (en) 1987-08-26

Family

ID=30017686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP486082U Granted JPS58106945U (en) 1982-01-18 1982-01-18 Substrate storage jig with lubricant coating

Country Status (1)

Country Link
JP (1) JPS58106945U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148075A (en) * 1974-05-20 1975-11-27
JPS55143765A (en) * 1979-04-26 1980-11-10 Mitsubishi Electric Corp Ion injection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148075A (en) * 1974-05-20 1975-11-27
JPS55143765A (en) * 1979-04-26 1980-11-10 Mitsubishi Electric Corp Ion injection device

Also Published As

Publication number Publication date
JPS6233322Y2 (en) 1987-08-26

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