JPS58102440A - Hollow-cathode electric-discharge device - Google Patents
Hollow-cathode electric-discharge deviceInfo
- Publication number
- JPS58102440A JPS58102440A JP56201100A JP20110081A JPS58102440A JP S58102440 A JPS58102440 A JP S58102440A JP 56201100 A JP56201100 A JP 56201100A JP 20110081 A JP20110081 A JP 20110081A JP S58102440 A JPS58102440 A JP S58102440A
- Authority
- JP
- Japan
- Prior art keywords
- hollow cathode
- electrode
- cathode
- discharge
- starting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Plasma Technology (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Solid Thermionic Cathode (AREA)
Abstract
Description
【発明の詳細な説明】
発明の技術分野
本発明は、放電起動の容易化を図れるようにしたホロー
カソード放電装置に関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a hollow cathode discharge device that facilitates discharge starting.
発明の技術的背景
周知のように１ホローカソード放電値置は、放電室内に
配置された中空陰極（ホローカソード）と陽極との間で
アーク放電を生じさせてデラズ！を生成させるもので、
イオン源中プラズマ発生装置として広く利用されている
。Technical Background of the Invention As is well known, a hollow cathode discharge device generates an arc discharge between a hollow cathode and an anode placed in a discharge chamber. It generates
It is widely used as a plasma generator in an ion source.
このようなホローカソード電電装置は、通常、第１図に
示すように構成されている。すなわち、図示しない放電
室内に熱電子の放出し品い材料で形成された円筒状の中
空陰極Ｊを設けるとともにこの中空陰極１と同軸的に１
かつ上記中空陰極ＩＫ離間対向させて陽極１を設けてい
る。Such a hollow cathode electrical device is usually constructed as shown in FIG. That is, a cylindrical hollow cathode J made of a high-quality material that emits thermoelectrons is provided in a discharge chamber (not shown), and a cylindrical hollow cathode J is provided coaxially with this hollow cathode 1.
In addition, an anode 1 is provided to face and be spaced from the hollow cathode IK.
上記中空陰極ｌの外側には、ソレノイド状の加熱ヒータ
１が中空陰極１とは非接触に設値されており、この加熱
ヒータ１０入力端はリード線４を介して加熱用電源ＩＫ
接続されている。さらに１上記加熱ヒータ１の外側には
熱シールド筒Ｃが設電されておシ、この熱Ｖ−ルド筒Ｃ
は、上記中空陰極１の前記陽極２儒端部に固着された絶
縁りンダ１ｔ−介して上記中空陰極１に支持されている
。ｔた上記絶縁リンダｒの陽極１側端面には、上記熱シ
ールド筒Ｃの一部を介して中央部に小径の孔１を有する
円板状の起動電極−が固定されている。まえ、上記中空
陰極１内には上記起動電極＃に対向する関係に内部電極
１１が装置されている。この内部電極１１は上記中空陰
極１と電気的Ｋｌｌ続されている。そして、上記中空陰
極１０反陽極儒に嵌合した導電筒体１２と前記起動電極
＃に電気萄に接続された熱シールド筒６との間に放電制
限抵抗ＩＪおよびスイッチ１４ｔ−介して起動電源１１
が接続されている。さらに、上記内部電極１１と前記陽
極２との間には電流制限抵抗ＩＩＩおよびスイ、チＪＦ
ｆ介してアーク電源Ｊ＃が接続されている。なお、図中
１ｇはガス供給ノ譬イデを示している。A solenoid-shaped heater 1 is set outside the hollow cathode 1 without contacting the hollow cathode 1, and the input end of this heater 10 is connected to a heating power source IK via a lead wire 4.
It is connected. Furthermore, a heat shield cylinder C is installed on the outside of the heater 1, and this heat shield cylinder C is installed.
is supported by the hollow cathode 1 through an insulating resin it fixed to the end of the anode 2 of the hollow cathode 1. A disc-shaped starting electrode having a small-diameter hole 1 in the center is fixed to the end surface of the anode 1 side of the insulating cylinder R through a part of the heat shield cylinder C. In the front, an internal electrode 11 is disposed within the hollow cathode 1 so as to face the starting electrode #. This internal electrode 11 is electrically connected to the hollow cathode 1. The starting power supply 11 is connected between the conductive cylinder 12 fitted with the hollow cathode 10 and the heat shield cylinder 6 connected to the starting electrode # through a discharge limiting resistor IJ and a switch 14t.
is connected. Further, a current limiting resistor III and a current limiting resistor III are connected between the internal electrode 11 and the anode 2.
Arc power supply J# is connected via f. Note that 1g in the figure indicates an example of gas supply.
仁のような構成のホローカソード放電装置にありて、起
動時には、まず加熱ヒータＪ【付勢して中空陰極ｉＹｔ
加熱し、この中空陰極１がら熱電子を放出させる。中空
陰極ＪＩｉ−十分に加熱した時点で、上記中空陰極１内
に放電に必要な作動ガスをガス供給・量イブ１りを通し
て供給すると同時に１スイ、チ１４を投入して起動電極
−と内部電極１１との間に起動電圧【印加し、両極間で
グロー放電ｔ＠ζさせる。このグロー放電によりて上記
中空陰極１内に上記中空陰極１と陽極１との間のアーク
放電起動に必要な量のシラ）ｅ−ｗが発生した時点で、
スイッチ１ｒ會投入して上記中空陰極１と陽極２との間
にアーク起動電圧上印加し、これＫよってアーク放電へ
と移行させるようにしている。なお、一旦アータ放電が
開始するとスイッチ１４を開放し、起動電圧上除去して
も上記アーク放電が持続する。The hollow cathode discharge device has a similar configuration, and at startup, first the heater J [energizes the hollow cathode iYt].
It is heated to cause the hollow cathode 1 to emit thermoelectrons. When the hollow cathode JIi is sufficiently heated, a working gas necessary for discharge is supplied into the hollow cathode 1 through the gas supply/quantity tube 1, and at the same time, the first switch 14 is turned on to connect the starting electrode and the internal electrode. 11, a starting voltage is applied between the two electrodes to cause a glow discharge t@ζ between the two poles. At the time when an amount of slag (e-w) necessary for starting the arc discharge between the hollow cathode 1 and the anode 1 is generated in the hollow cathode 1 by this glow discharge,
A switch 1r is turned on to apply an arc starting voltage between the hollow cathode 1 and anode 2, thereby causing a transition to arc discharge. Note that once the arc discharge starts, the arc discharge continues even if the switch 14 is opened and the starting voltage is removed.
第２図も従来のホローカソード放電装置を示す断面図で
あり、第１図と同一部分は同一符号で示しである。この
ホローカッ−Ｐ放電装置では、内部電極１１の起動電極
＃に対向する儒に熱電子の放出し易い、すなわち仕事函
数の小さい電極部材２０を固着することＫよりてグロー
放電の容易化を図るようＫしている。FIG. 2 is also a sectional view showing a conventional hollow cathode discharge device, and the same parts as in FIG. 1 are designated by the same symbols. In this hollow cut-P discharge device, glow discharge is facilitated by fixing the electrode member 20, which is easy to emit thermoelectrons, that is, has a small work function, to the point opposite to the starting electrode # of the internal electrode 11. I'm doing K.
背景技術の問題点
しかしながら、これ勢Ｏ放電装置にあっては次のような
問題がありた。す表わち、従来装置にありては、起動の
きっかけｔ作夛出すために中空陰極１から熱電子を放出
させる方式を採用しておシ、この九めに上記中空陰極１
の外１ｉｉｌＫルノイド状の加熱ヒータ１を設置するよ
うにしている。このような構成であると、上記加熱し−
タＳへの通電時にこの加熱し−タ１が熱変形を起こして
中空陰極１あるいは外側の熱シールド簡−に接触し易く
、故障し易い問題があうえ、を圧接触防止の九めに加熱
ヒータ１と中空陰極１および熱シールド筒Ｃとの間隔を
十分に取るようにすると、装置が大型化するの會免れ得
ない問題がありた。さらに１構造が複雑な友め、保守点
検も困難であり九。Problems with the Background Art However, these O discharge devices have the following problems. In other words, in the conventional device, a method is adopted in which thermoelectrons are emitted from the hollow cathode 1 in order to generate a trigger for starting.
In addition, a lunoid-shaped heater 1 is installed. With such a configuration, the above-mentioned heating
When electricity is applied to the terminal S, this heating terminal 1 causes thermal deformation and easily comes into contact with the hollow cathode 1 or the outer heat shield, causing a problem that it is easy to fail. If the heater 1, the hollow cathode 1, and the heat shield tube C are sufficiently spaced apart from each other, there is an unavoidable problem that the device becomes larger. Furthermore, the structure is complicated, making maintenance and inspection difficult.
を九、仁のようなホローカノード放電装置ｔイオン発生
源として使用する場合には、イオン発生時のガス効率向
上を図る九めに１できるだけ作動ガスを低流量で供給す
る必要があシ、このためＫｔｊ中空陰極１内が十分低ガ
ス圧力状態下であってもアーク放電に移行できることが
望まれるが、従来の放電装置では低ガス圧下での起動が
困難であった。9. When using a hollow canode discharge device such as the ion generator as an ion generation source, it is necessary to supply the working gas at a low flow rate as possible to improve gas efficiency during ion generation. Although it is desired to be able to proceed to arc discharge even when the inside of the Ktj hollow cathode 1 is under a sufficiently low gas pressure state, it has been difficult to start up under low gas pressure in conventional discharge devices.
発明の目的
本発明は、このような事情に鑑みてなされ九もので、そ
の目的とするところは、小型軽量で、故障が少く、シか
も低ガス圧下であっても放電起動全容易に行なえ、その
う、え電力消費が少くイオン、グッズマ発生効率の向上
化に寄与で自るホローカソード放電装置を提供するとと
にある。OBJECTS OF THE INVENTION The present invention has been made in view of the above circumstances, and its objects are to be small and lightweight, have few failures, and to be able to start discharge easily even under low gas pressure. In addition, the present invention provides a hollow cathode discharge device that consumes less power and contributes to improved efficiency in generating ions and goods.
発明の概要
本発明は、起動の１！ｉりかけをっ（る熱電子を中空陰
極とは絶縁して設けられ喪内部電極から放出させるよう
にするととｋよって、熱電子を放出させるための加熱し
一タの小型化、簡素化を図り、さらに１アーク放電に到
るｔでに内部電極と起動電極との間および起動電極と中
空陰極との間の２段階の放電を経てアーク放電に移行さ
せるようにした仁とｔ％黴とする。Summary of the Invention The present invention provides 1 start-up! By emitting the thermionic electrons from the inner electrode, which is insulated from the hollow cathode, it is possible to miniaturize and simplify the heating process for emitting thermionic electrons. Furthermore, in the time it takes to reach 1 arc discharge, the discharge transitions to arc discharge through two stages of discharge between the internal electrode and the starting electrode and between the starting electrode and the hollow cathode. do.
発明の実施例
本発明の実施ＰＩｌｔｗＪ面を参照しながら説明する・
ｊｌＩｓ図は本発明に係るホローカソード放電装置の概
略構成を示す断ｍｓであル、第１１１と同一部分は同一
符号で示してあゐ・し九がって重複する部分の説明は省
略する。Embodiments of the Invention Implementation of the present invention will be explained with reference to the PIltwJ plane. The diagram is a cross-sectional view showing a schematic configuration of a hollow cathode discharge device according to the present invention, and the same parts as No. 111 are indicated by the same reference numerals. Explanation of duplicate parts will be omitted.
この実施例では、中空陰極１の壁部に作動ガス流入用の
流入口１１Ｙｔ＠方向ＫＩＩ数個設け、中空陰極１と熱
シールド筒Ｃとの間の空間をガス導入路２１として用い
ている。ｔた中空陰極１内でかつ反陽極側の位置に円板
状の内部電極１１を起動電極＃に対向させて配置し、こ
の内部電極１１ｔ−超高温耐熱性の絶縁材である１Ｎ（
がロンナイトライド）で形成された支持体ｚ１を介して
上記中空陰極１の内面に固定している・内部電極１１は
仕事関数の小さい電極材料にて形成されており、中空陰
極１とはスイ。In this embodiment, several inlets 11Yt@direction KII for inflowing the working gas are provided in the wall of the hollow cathode 1, and the space between the hollow cathode 1 and the heat shield tube C is used as the gas introduction path 21. A disk-shaped internal electrode 11 is disposed within the hollow cathode 1 and on the opposite side of the anode, facing the starting electrode #.
The inner electrode 11 is fixed to the inner surface of the hollow cathode 1 through a support z1 made of ronnitride).The internal electrode 11 is made of an electrode material with a small work function, and is different from the hollow cathode 1.
チ１４を介して電気的に接続されている。さらに、上記
内部電極１１０反陽極側端面の近傍に上記内部電極１１
を加熱するヒータｚｔｔｔ−配置し、とのヒータ１５ｔ
−上記中空陰極１内に固定された円板状の耐熱性支持板
２−にて支持させている。したがって、本発明装置では
、従来装置に見られる中空陰極加熱用のヒータは存在し
ていない。They are electrically connected via a channel 14. Furthermore, the internal electrode 11 is placed near the end surface of the internal electrode 110 opposite to the anode.
Place the heater zttt to heat the heater 15t.
It is supported by a disk-shaped heat-resistant support plate 2 fixed within the hollow cathode 1. Therefore, in the device of the present invention, there is no heater for heating the hollow cathode, which is found in conventional devices.
このように構成されたホローカソード放電装置の放電起
動を行なうｋは次のようＫする。まず加熱電ｆｌｌｉＫ
よりヒータＩＩＫ電流を流し内部電極ＪＪＩ熱電子放出
可能な状１！１ｔで十分加熱する。そして図示しない作
動ガス供給源よ〕ガス導入路ｘｓｔ−通して作動ガスを
中空陰極１内へと導入する。同時にスイッチ１４ｔ−投
入し、熱シールド筒−に電気的に接続された起動電極ｔ
と内部電極１１との間に起動電源ＩＪの出力電圧を印加
する。なお仁の時、スイッチ１４會開放して中空陰極１
と内部電極１１とを電気的に絶縁させておく、シかして
、上記のようにスイッチ１４を投入すると、起動電極−
と内部電極ＩＪとの二つの平板電極間にグロー放電が発
生し、この結果、中空陰極１内にプラズマが生成される
。上記プラズマが十分生成された後、スイッチ２４′ｆ
ｒ閉じて内部電極１１と中空陰極１とｔ等電位とする。K for starting the discharge of the hollow cathode discharge device configured as described above is determined as follows. First, the heating electric fliK
A current is applied to the heater IIK to heat the internal electrode JJI sufficiently at 1!1t so that thermionic electrons can be emitted. Working gas is then introduced into the hollow cathode 1 through the gas introduction path xst- (from a working gas supply source (not shown)). At the same time, the switch 14t is turned on, and the starting electrode t is electrically connected to the heat shield cylinder.
The output voltage of the starting power source IJ is applied between the internal electrode 11 and the starting power source IJ. At the same time, open the switch 14 and open the hollow cathode 1.
When the switch 14 is turned on as described above, the starting electrode -
A glow discharge occurs between the two flat electrodes, i.e., the internal electrode IJ, and as a result, plasma is generated within the hollow cathode 1. After the plasma is sufficiently generated, the switch 24'f
R is closed to make the internal electrode 11 and the hollow cathode 1 equal potential.
中空陰極１内には十分なプラズマが存在するので、中空
陰極１と起動電極−との間に容易にグロー放電が発生す
る。このグロー放電によ）中空陰極１の内壁は十分加熱
され、中空陰極１と陽極２との間のアーク放電に必要な
初期熱電子とデラズｉが中空陰極１内に供給される。次
に、スイッチ１ｒｔ−投入し、中空陰極１と陽極２との
間にアーク電源１１の出力電圧、つｔ）、７−タ電圧を
印加する。仁の結果、中空陰極ｌと陽極２との間にアー
ク放電、すなわちホローカソード放電が起動する。Since sufficient plasma exists within the hollow cathode 1, a glow discharge easily occurs between the hollow cathode 1 and the starting electrode. The inner wall of the hollow cathode 1 is sufficiently heated by this glow discharge, and the initial thermoelectrons and deraz i necessary for arc discharge between the hollow cathode 1 and the anode 2 are supplied into the hollow cathode 1. Next, the switch 1rt- is turned on, and the output voltage of the arc power source 11, t) and 7-ta voltage are applied between the hollow cathode 1 and the anode 2. As a result of this, an arc discharge, ie, a hollow cathode discharge, is started between the hollow cathode 1 and the anode 2.
なお、起動後はスイッチ１４ｔ−開放して起動電圧全除
去してもアーク放電は持続する。Incidentally, after starting, the arc discharge continues even if the switch 14t is opened and the starting voltage is completely removed.
このように、起動のきっかけをつくる熱電子発生源とし
て内部電極を用いるようＫしている。In this way, the internal electrode is used as a source of thermionic electrons that triggers startup.
したがって、従来装置とは違って中空陰＆１【加熱する
大型の加熱ヒータ會必要としないので、中空陰極加熱用
のヒータＳを設けたときに起）易い中空陰極１および熱
シールド簡Ｃへの接触による故障の懸念が解消され、し
かも、装置の小型軽量化を図る仁とができる。を九本発
明によると、ヒータ１５は内部電極１１のみ加熱すれば
十分であるので、従来の中空陰極加熱用と一タ會設は九
ものに比較してヒータによる電力消費を少くでき、装置
の効率的な運転が可能である。Therefore, unlike the conventional device, there is no need for a large heating heater for heating the hollow cathode &1, so contact with the hollow cathode 1 and the heat shield C that easily occurs when a heater S for heating the hollow cathode is provided. This eliminates concerns about malfunctions caused by malfunctions, and allows the device to be made smaller and lighter. According to the present invention, since it is sufficient for the heater 15 to heat only the internal electrode 11, the power consumption by the heater can be reduced compared to the conventional hollow cathode heating and one-taper installation, and the equipment can be Efficient operation is possible.
それに加え、最終のアーク放電に到るまでに内部電極１
１と起動電極ｔとの間および中空陰極１と起動電極−と
の間の２段階の放電を経るので、放電起動を低い作動ガ
ス圧力で、容易にしかも確実に行うことが可能である・
したがって、十分高いガス効率を得ることができイオン
、グッズマ発生効率の高い装置を得る仁とができる。In addition, the internal electrode 1
Since the discharge occurs in two stages, between the hollow cathode 1 and the starting electrode t and between the hollow cathode 1 and the starting electrode t, it is possible to easily and reliably start the discharge at a low working gas pressure.
Therefore, it is possible to obtain a sufficiently high gas efficiency and to obtain an apparatus with high ion and gas generation efficiency.
また、実施例のように内部電極１１ｔ−仕事函数の小さ
い電極部材で形成することＫよって、初期ダロー放電管
さらに容易に行表わせることができる。なお、内部電極
としては、必ずしも円板状に限定されるものではない・
発明の詳細
な説明したように１本発明によれば、放電起動のきっか
けをつくる熱電子を内部電極から放出させるようＫして
いるので、熱電子管放出させるための加熱し一夕の小型
化、簡素化、装置としての信頼性向上化を図ることがで
き、しかも、アーク放電に到るまでに内部電極と起動電
極との間および起動電極と中空陰極との間の２段階の放
電ｉｓてアーク放電に移行させることが°できるので低
ガス圧下における放電起動の容易化を図ることができ、
イオン、プラノ１０発生効率を向上させることができる
。Further, by forming the internal electrode 11t with an electrode member having a small work function as in the embodiment, the initial Darrow discharge tube can be more easily formed. Note that the internal electrodes are not necessarily limited to a disk shape. As described in detail, according to the present invention, K is used to emit thermoelectrons that trigger the discharge from the internal electrodes. This makes it possible to reduce the size of the thermionic tube by heating it overnight, simplify it, and improve the reliability of the device.Moreover, it is possible to reduce the size and simplification of the device by heating it to emit the thermionic tube, and to improve the reliability of the device. Since the two-stage discharge between the starting electrode and the hollow cathode can be transferred to an arc discharge, it is possible to facilitate the starting of the discharge under low gas pressure.
Ion and Plano 10 generation efficiency can be improved.
第１および第２図はそれぞれ従来のホローカソード放電
装置の概略構成を示す断面図、第３図は本発明の一実施
例に係るホローカソード放電装置の概略構成管示す断面
図である。
１・・・中空陰極（ホローカソード）、１・・・陽極、
１・・・加熱ヒータ、６・−熱シールド筒、夕・−・起
動電極、１１−・内部電極、ｚｌ・・・流入口、ＩＪ・
・・支持体、２５・・・ヒータ、２ｄ・・・耐熱性支持
板。
出願人代理人 弁理士 鈴 江 武 彦第１図
第２図
第３図1 and 2 are sectional views showing a schematic configuration of a conventional hollow cathode discharge device, respectively, and FIG. 3 is a sectional view showing a schematic configuration of a hollow cathode discharge device according to an embodiment of the present invention. 1...Hollow cathode, 1...Anode,
1... Heater, 6--heat shield tube, evening-- starting electrode, 11-- internal electrode, zl... inlet, IJ-
...Support, 25...Heater, 2d...Heat-resistant support plate. Applicant's representative Patent attorney Takehiko Suzue Figure 1 Figure 2 Figure 3
Claims (1)
に上記中空陰極内を通して上記陽極側へ向けて作動ガス
を通流させている状態で上記中空陰極と上記陽極とＯ関
にアーク放電管性なわせるようＫし九ホ四−カノード放
電装置において、前記中空陰極の前記陽１儒に位置する
開口部に上記中空陰極とは絶縁されて設けられえガス流
量制限機能を有する起動電極と、前記中空陰極内に上記
中空陰極とは絶縁されかつ前記起動電極に対向して設置
られた内部電極と、この内部電極を加熱するヒータとを
備え、放電起動時に、前記と一タを付勢して前記内部電
極を加熱している条件下で上記内部電極と前記起動電極
との間でグロー放電を行なわせた後、前記中空陰極と前
記起動電極との間でグロー放電を行なわせ、続いて上記
中空陰極と前記陽極との関でアーク放電を行なわせるよ
うにしてなることを特徴とするホローカソード放電装置
。A hollow cathode and an anode are arranged facing each other in a spaced manner in a discharge chamber, and a working gas is allowed to flow through the hollow cathode toward the anode side, and an arc discharge tube-shaped tube is connected between the hollow cathode, the anode, and the O-separator. In the four-cathode discharge device, a starting electrode having a gas flow rate limiting function is provided in an opening located in the positive direction of the hollow cathode and is insulated from the hollow cathode, and The cathode is provided with an internal electrode that is insulated from the hollow cathode and placed opposite to the starting electrode, and a heater that heats the internal electrode. After a glow discharge is caused between the internal electrode and the starting electrode under the condition that the internal electrode is heated, a glow discharge is caused between the hollow cathode and the starting electrode, and then the hollow A hollow cathode discharge device characterized in that arc discharge is caused between a cathode and the anode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56201100A JPS5853460B2 (en) | 1981-12-14 | 1981-12-14 | Hollow cathode discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56201100A JPS5853460B2 (en) | 1981-12-14 | 1981-12-14 | Hollow cathode discharge device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58102440A true JPS58102440A (en) | 1983-06-18 |
| JPS5853460B2 JPS5853460B2 (en) | 1983-11-29 |
Family
ID=16435391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56201100A Expired JPS5853460B2 (en) | 1981-12-14 | 1981-12-14 | Hollow cathode discharge device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853460B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2640807A1 (en) * | 1988-12-21 | 1990-06-22 | Beljuk Sergei | HOLLOW CATHODE FOR PLASMA ELECTRONIC AND IONIC SOURCE |
| EP0464383A2 (en) * | 1990-06-26 | 1992-01-08 | Hauzer Techno Coating Europe Bv | Plasma neutralisation cathode |
| GB2387963A (en) * | 2001-12-31 | 2003-10-29 | Applied Materials Inc | Ion sources |
| WO2003075305A3 (en) * | 2002-03-06 | 2003-11-27 | Applied Materials Inc | Indirectly heated button cathode for an ion source |
| US6878946B2 (en) | 2002-09-30 | 2005-04-12 | Applied Materials, Inc. | Indirectly heated button cathode for an ion source |
| GB2409928A (en) * | 2004-01-09 | 2005-07-13 | Applied Materials Inc | Improvements relating to ion implantation and instabilities |
| JP2015045038A (en) * | 2013-08-27 | 2015-03-12 | 株式会社不二越 | Pressure gradient type plasma gun |
-
1981
- 1981-12-14 JP JP56201100A patent/JPS5853460B2/en not_active Expired
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2640807A1 (en) * | 1988-12-21 | 1990-06-22 | Beljuk Sergei | HOLLOW CATHODE FOR PLASMA ELECTRONIC AND IONIC SOURCE |
| EP0464383A2 (en) * | 1990-06-26 | 1992-01-08 | Hauzer Techno Coating Europe Bv | Plasma neutralisation cathode |
| GB2387963A (en) * | 2001-12-31 | 2003-10-29 | Applied Materials Inc | Ion sources |
| GB2387963B (en) * | 2001-12-31 | 2004-09-29 | Applied Materials Inc | Ion sources |
| US7586101B2 (en) | 2001-12-31 | 2009-09-08 | Applied Materials, Inc. | Ion sources for ion implantation apparatus |
| WO2003075305A3 (en) * | 2002-03-06 | 2003-11-27 | Applied Materials Inc | Indirectly heated button cathode for an ion source |
| US6878946B2 (en) | 2002-09-30 | 2005-04-12 | Applied Materials, Inc. | Indirectly heated button cathode for an ion source |
| GB2409928A (en) * | 2004-01-09 | 2005-07-13 | Applied Materials Inc | Improvements relating to ion implantation and instabilities |
| GB2409928B (en) * | 2004-01-09 | 2007-03-21 | Applied Materials Inc | Improvements relating to ion implantation |
| GB2432039A (en) * | 2004-01-09 | 2007-05-09 | Applied Materials Inc | Improvements relating to ion implantation and instabilities |
| GB2432039B (en) * | 2004-01-09 | 2009-03-11 | Applied Materials Inc | Improvements relating to ion implantation |
| JP2015045038A (en) * | 2013-08-27 | 2015-03-12 | 株式会社不二越 | Pressure gradient type plasma gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5853460B2 (en) | 1983-11-29 |
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