JPS5790857A - X-ray radiation system - Google Patents

X-ray radiation system

Info

Publication number
JPS5790857A
JPS5790857A JP55167487A JP16748780A JPS5790857A JP S5790857 A JPS5790857 A JP S5790857A JP 55167487 A JP55167487 A JP 55167487A JP 16748780 A JP16748780 A JP 16748780A JP S5790857 A JPS5790857 A JP S5790857A
Authority
JP
Japan
Prior art keywords
ray
delivery window
vacuum chamber
generated
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55167487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160895B2 (enExample
Inventor
Masahiro Okabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55167487A priority Critical patent/JPS5790857A/ja
Publication of JPS5790857A publication Critical patent/JPS5790857A/ja
Publication of JPH0160895B2 publication Critical patent/JPH0160895B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission
    • H01J2235/183—Multi-layer structures

Landscapes

  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP55167487A 1980-11-28 1980-11-28 X-ray radiation system Granted JPS5790857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55167487A JPS5790857A (en) 1980-11-28 1980-11-28 X-ray radiation system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55167487A JPS5790857A (en) 1980-11-28 1980-11-28 X-ray radiation system

Publications (2)

Publication Number Publication Date
JPS5790857A true JPS5790857A (en) 1982-06-05
JPH0160895B2 JPH0160895B2 (enExample) 1989-12-26

Family

ID=15850586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55167487A Granted JPS5790857A (en) 1980-11-28 1980-11-28 X-ray radiation system

Country Status (1)

Country Link
JP (1) JPS5790857A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034455U (enExample) * 1989-06-01 1991-01-17

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53134675U (en) * 1977-03-31 1978-10-25 Tokyo Shibaura Electric Co.Ltd X-ray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53134675U (en) * 1977-03-31 1978-10-25 Tokyo Shibaura Electric Co.Ltd X-ray tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034455U (enExample) * 1989-06-01 1991-01-17

Also Published As

Publication number Publication date
JPH0160895B2 (enExample) 1989-12-26

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