JPS5787299A - Manufacture of ultrasonic probe - Google Patents

Manufacture of ultrasonic probe

Info

Publication number
JPS5787299A
JPS5787299A JP16308480A JP16308480A JPS5787299A JP S5787299 A JPS5787299 A JP S5787299A JP 16308480 A JP16308480 A JP 16308480A JP 16308480 A JP16308480 A JP 16308480A JP S5787299 A JPS5787299 A JP S5787299A
Authority
JP
Japan
Prior art keywords
cut
metallic film
cutting
stress
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16308480A
Other languages
Japanese (ja)
Other versions
JPS5911239B2 (en
Inventor
Toshikatsu Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16308480A priority Critical patent/JPS5911239B2/en
Publication of JPS5787299A publication Critical patent/JPS5787299A/en
Publication of JPS5911239B2 publication Critical patent/JPS5911239B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

PURPOSE:To prevent connection failure due to stress when cutting, by cutting a piezoelectric ceramic plate by a specific method, when said plate is cut in order to form a probe of plural blocks. CONSTITUTION:On one metallic film 10 of a piezoelectric ceramic substrate 8 having metallic films 9, 10 on both surfaces, a flexible cable 11 is connected together with a packing material 12. Subsequently, the metallic film 9 is cut to width W each, simultaneously the ceramic substrate is cut into depth (t) of about 80%-100% of its plate thickness, and the grooves 13 for forming a comb-like or strip-like vibrator group are provided. Moreover, for instance, in order to form a block of 3 pieces each, the substrate is cut to the metallic film 10 by a narrow groove 14 from on the groove 13. After it has been cut, a lead wire 15 is connected. When the substrate is cut in this way, stress put on the connecting part of the metallic film 10 and the cable 11 is reduced when cutting. Accordingly, connection failure due to stress is prevented.
JP16308480A 1980-11-18 1980-11-18 Manufacturing method of ultrasonic probe Expired JPS5911239B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16308480A JPS5911239B2 (en) 1980-11-18 1980-11-18 Manufacturing method of ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16308480A JPS5911239B2 (en) 1980-11-18 1980-11-18 Manufacturing method of ultrasonic probe

Publications (2)

Publication Number Publication Date
JPS5787299A true JPS5787299A (en) 1982-05-31
JPS5911239B2 JPS5911239B2 (en) 1984-03-14

Family

ID=15766872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16308480A Expired JPS5911239B2 (en) 1980-11-18 1980-11-18 Manufacturing method of ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS5911239B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192500A (en) * 1984-03-14 1985-09-30 Nippon Dempa Kogyo Co Ltd Matrix array type ultrasonic wave probe and its manufacture
JPH04109479A (en) * 1990-12-28 1992-04-10 Matsushita Electric Ind Co Ltd Tape cassette
US5698928A (en) * 1995-08-17 1997-12-16 Motorola, Inc. Thin film piezoelectric arrays with enhanced coupling and fabrication methods
US6979937B2 (en) * 1999-03-09 2005-12-27 Mide Technology Corporation Laser machining of electroactive ceramics

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192500A (en) * 1984-03-14 1985-09-30 Nippon Dempa Kogyo Co Ltd Matrix array type ultrasonic wave probe and its manufacture
JPH04109479A (en) * 1990-12-28 1992-04-10 Matsushita Electric Ind Co Ltd Tape cassette
US5698928A (en) * 1995-08-17 1997-12-16 Motorola, Inc. Thin film piezoelectric arrays with enhanced coupling and fabrication methods
US6979937B2 (en) * 1999-03-09 2005-12-27 Mide Technology Corporation Laser machining of electroactive ceramics

Also Published As

Publication number Publication date
JPS5911239B2 (en) 1984-03-14

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