JPS5787299A - Manufacture of ultrasonic probe - Google Patents
Manufacture of ultrasonic probeInfo
- Publication number
- JPS5787299A JPS5787299A JP16308480A JP16308480A JPS5787299A JP S5787299 A JPS5787299 A JP S5787299A JP 16308480 A JP16308480 A JP 16308480A JP 16308480 A JP16308480 A JP 16308480A JP S5787299 A JPS5787299 A JP S5787299A
- Authority
- JP
- Japan
- Prior art keywords
- cut
- metallic film
- cutting
- stress
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 239000000919 ceramic Substances 0.000 abstract 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000012856 packing Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
PURPOSE:To prevent connection failure due to stress when cutting, by cutting a piezoelectric ceramic plate by a specific method, when said plate is cut in order to form a probe of plural blocks. CONSTITUTION:On one metallic film 10 of a piezoelectric ceramic substrate 8 having metallic films 9, 10 on both surfaces, a flexible cable 11 is connected together with a packing material 12. Subsequently, the metallic film 9 is cut to width W each, simultaneously the ceramic substrate is cut into depth (t) of about 80%-100% of its plate thickness, and the grooves 13 for forming a comb-like or strip-like vibrator group are provided. Moreover, for instance, in order to form a block of 3 pieces each, the substrate is cut to the metallic film 10 by a narrow groove 14 from on the groove 13. After it has been cut, a lead wire 15 is connected. When the substrate is cut in this way, stress put on the connecting part of the metallic film 10 and the cable 11 is reduced when cutting. Accordingly, connection failure due to stress is prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16308480A JPS5911239B2 (en) | 1980-11-18 | 1980-11-18 | Manufacturing method of ultrasonic probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16308480A JPS5911239B2 (en) | 1980-11-18 | 1980-11-18 | Manufacturing method of ultrasonic probe |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5787299A true JPS5787299A (en) | 1982-05-31 |
JPS5911239B2 JPS5911239B2 (en) | 1984-03-14 |
Family
ID=15766872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16308480A Expired JPS5911239B2 (en) | 1980-11-18 | 1980-11-18 | Manufacturing method of ultrasonic probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5911239B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60192500A (en) * | 1984-03-14 | 1985-09-30 | Nippon Dempa Kogyo Co Ltd | Matrix array type ultrasonic wave probe and its manufacture |
JPH04109479A (en) * | 1990-12-28 | 1992-04-10 | Matsushita Electric Ind Co Ltd | Tape cassette |
US5698928A (en) * | 1995-08-17 | 1997-12-16 | Motorola, Inc. | Thin film piezoelectric arrays with enhanced coupling and fabrication methods |
US6979937B2 (en) * | 1999-03-09 | 2005-12-27 | Mide Technology Corporation | Laser machining of electroactive ceramics |
-
1980
- 1980-11-18 JP JP16308480A patent/JPS5911239B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60192500A (en) * | 1984-03-14 | 1985-09-30 | Nippon Dempa Kogyo Co Ltd | Matrix array type ultrasonic wave probe and its manufacture |
JPH04109479A (en) * | 1990-12-28 | 1992-04-10 | Matsushita Electric Ind Co Ltd | Tape cassette |
US5698928A (en) * | 1995-08-17 | 1997-12-16 | Motorola, Inc. | Thin film piezoelectric arrays with enhanced coupling and fabrication methods |
US6979937B2 (en) * | 1999-03-09 | 2005-12-27 | Mide Technology Corporation | Laser machining of electroactive ceramics |
Also Published As
Publication number | Publication date |
---|---|
JPS5911239B2 (en) | 1984-03-14 |
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