JPS5787057U - - Google Patents

Info

Publication number
JPS5787057U
JPS5787057U JP16255580U JP16255580U JPS5787057U JP S5787057 U JPS5787057 U JP S5787057U JP 16255580 U JP16255580 U JP 16255580U JP 16255580 U JP16255580 U JP 16255580U JP S5787057 U JPS5787057 U JP S5787057U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16255580U
Other languages
Japanese (ja)
Other versions
JPS6214127Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980162555U priority Critical patent/JPS6214127Y2/ja
Publication of JPS5787057U publication Critical patent/JPS5787057U/ja
Application granted granted Critical
Publication of JPS6214127Y2 publication Critical patent/JPS6214127Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1980162555U 1980-11-12 1980-11-12 Expired JPS6214127Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980162555U JPS6214127Y2 (cg-RX-API-DMAC10.html) 1980-11-12 1980-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980162555U JPS6214127Y2 (cg-RX-API-DMAC10.html) 1980-11-12 1980-11-12

Publications (2)

Publication Number Publication Date
JPS5787057U true JPS5787057U (cg-RX-API-DMAC10.html) 1982-05-28
JPS6214127Y2 JPS6214127Y2 (cg-RX-API-DMAC10.html) 1987-04-10

Family

ID=29521412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980162555U Expired JPS6214127Y2 (cg-RX-API-DMAC10.html) 1980-11-12 1980-11-12

Country Status (1)

Country Link
JP (1) JPS6214127Y2 (cg-RX-API-DMAC10.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928463U (cg-RX-API-DMAC10.html) * 1972-06-15 1974-03-11
JPS5068657U (cg-RX-API-DMAC10.html) * 1973-10-27 1975-06-19
JPS5421973A (en) * 1977-07-20 1979-02-19 Cho Lsi Gijutsu Kenkyu Kumiai Gas phase reaction apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928463U (cg-RX-API-DMAC10.html) * 1972-06-15 1974-03-11
JPS5068657U (cg-RX-API-DMAC10.html) * 1973-10-27 1975-06-19
JPS5421973A (en) * 1977-07-20 1979-02-19 Cho Lsi Gijutsu Kenkyu Kumiai Gas phase reaction apparatus

Also Published As

Publication number Publication date
JPS6214127Y2 (cg-RX-API-DMAC10.html) 1987-04-10

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