JPS5787057U - - Google Patents
Info
- Publication number
- JPS5787057U JPS5787057U JP16255580U JP16255580U JPS5787057U JP S5787057 U JPS5787057 U JP S5787057U JP 16255580 U JP16255580 U JP 16255580U JP 16255580 U JP16255580 U JP 16255580U JP S5787057 U JPS5787057 U JP S5787057U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980162555U JPS6214127Y2 (ja) | 1980-11-12 | 1980-11-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980162555U JPS6214127Y2 (ja) | 1980-11-12 | 1980-11-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5787057U true JPS5787057U (ja) | 1982-05-28 |
JPS6214127Y2 JPS6214127Y2 (ja) | 1987-04-10 |
Family
ID=29521412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980162555U Expired JPS6214127Y2 (ja) | 1980-11-12 | 1980-11-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6214127Y2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4928463U (ja) * | 1972-06-15 | 1974-03-11 | ||
JPS5068657U (ja) * | 1973-10-27 | 1975-06-19 | ||
JPS5421973A (en) * | 1977-07-20 | 1979-02-19 | Cho Lsi Gijutsu Kenkyu Kumiai | Gas phase reaction apparatus |
-
1980
- 1980-11-12 JP JP1980162555U patent/JPS6214127Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4928463U (ja) * | 1972-06-15 | 1974-03-11 | ||
JPS5068657U (ja) * | 1973-10-27 | 1975-06-19 | ||
JPS5421973A (en) * | 1977-07-20 | 1979-02-19 | Cho Lsi Gijutsu Kenkyu Kumiai | Gas phase reaction apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6214127Y2 (ja) | 1987-04-10 |