JPS5786768A - Method of and apparatus for measuring resistance and capacity of electronic composition element - Google Patents

Method of and apparatus for measuring resistance and capacity of electronic composition element

Info

Publication number
JPS5786768A
JPS5786768A JP56151916A JP15191681A JPS5786768A JP S5786768 A JPS5786768 A JP S5786768A JP 56151916 A JP56151916 A JP 56151916A JP 15191681 A JP15191681 A JP 15191681A JP S5786768 A JPS5786768 A JP S5786768A
Authority
JP
Japan
Prior art keywords
capacity
measuring resistance
composition element
electronic composition
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56151916A
Other languages
English (en)
Inventor
Fuoierubaumu Hansupeetaa
Kunaueru Ururitsuhi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Publication of JPS5786768A publication Critical patent/JPS5786768A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP56151916A 1980-09-29 1981-09-25 Method of and apparatus for measuring resistance and capacity of electronic composition element Pending JPS5786768A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803036734 DE3036734A1 (de) 1980-09-29 1980-09-29 Verfahren zur messung von widerstaenden und kapazitaeten von elektronischen bauelementen

Publications (1)

Publication Number Publication Date
JPS5786768A true JPS5786768A (en) 1982-05-29

Family

ID=6113156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56151916A Pending JPS5786768A (en) 1980-09-29 1981-09-25 Method of and apparatus for measuring resistance and capacity of electronic composition element

Country Status (4)

Country Link
US (1) US4460866A (ja)
EP (1) EP0048862B1 (ja)
JP (1) JPS5786768A (ja)
DE (2) DE3036734A1 (ja)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3235461A1 (de) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur kontaktlosen pruefung eines objekts, insbesondere von mikroverdrahtungen, mit einer korpuskularstrahl-sonde
DE3579380D1 (de) * 1984-06-01 1990-10-04 Siemens Ag Verfahren zur elektrischen pruefung von mikroverdrahtungen mit hilfe von korpuskularsonden.
EP0178431B1 (de) * 1984-09-18 1990-02-28 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Gegenfeld-Spektrometer für die Elektronenstrahl-Messtechnik
EP0196804B1 (en) * 1985-03-11 1991-01-23 Nippon Telegraph And Telephone Corporation Method and apparatus for testing integrated electronic device
JPH0682718B2 (ja) * 1985-08-12 1994-10-19 日本電信電話株式会社 電子デバイスの試験装置およびその使用方法
US4730158A (en) * 1986-06-06 1988-03-08 Santa Barbara Research Center Electron-beam probing of photodiodes
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components
US5245294A (en) * 1991-03-08 1993-09-14 General Electric Company Method for evaluating operability of filter components in power conversion system
FR2726369B1 (fr) * 1994-11-02 1996-12-20 Alcatel Cable Procede de mesure du declin de potentiel et de la mobilite electronique d'un materiau
DE19525081B4 (de) * 1995-07-10 2006-06-29 Display Products Group, Inc., Hayward Verfahren und Vorrichtung zum Testen der Funktion von Mikrostrukturelementen
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
AU3354401A (en) 2000-02-14 2001-08-20 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatustherefor
JP4015352B2 (ja) * 2000-02-22 2007-11-28 株式会社日立製作所 荷電粒子ビームを用いた検査方法
US7012438B1 (en) * 2002-07-10 2006-03-14 Kla-Tencor Technologies Corp. Methods and systems for determining a property of an insulating film
US7248062B1 (en) 2002-11-04 2007-07-24 Kla-Tencor Technologies Corp. Contactless charge measurement of product wafers and control of corona generation and deposition
US7893703B2 (en) * 2005-08-19 2011-02-22 Kla-Tencor Technologies Corp. Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer
JP5103050B2 (ja) * 2007-04-06 2012-12-19 株式会社日立ハイテクノロジーズ 電子線応用装置
FR3112393B1 (fr) * 2020-07-10 2022-07-08 Centre Nat Rech Scient Dispositif de détermination de la résistance électrique d’un système et procédé associé
EP3968035A1 (en) * 2020-09-11 2022-03-16 ASML Netherlands B.V. Delay time measurement method and system
WO2023217355A1 (en) * 2022-05-10 2023-11-16 Applied Materials, Inc. Methods and apparatuses for identifying defective electrical connections of a substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51148495A (en) * 1975-06-13 1976-12-20 Ishikawajima Harima Heavy Ind Co Ltd Resistance measuring device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3239664A (en) * 1963-04-23 1966-03-08 High Voltage Engineering Corp Charged particle beam current measuring device
CH408202A (de) * 1963-08-09 1966-02-28 Siemens Ag Verfahren zur Bestimmung des elektrischen Widerstandes eines Körpers aus extrem reinem Halbleitermaterial für elektronische Zwecke
US3403332A (en) * 1964-09-25 1968-09-24 Hitachi Ltd Apparatus for measuring impedance of a specimen employing two opposite polarity charged particle beam probes
US3373353A (en) * 1965-09-30 1968-03-12 Navy Usa Electron beam scanning system for quality control of materials
US3464007A (en) * 1966-11-22 1969-08-26 Northern Electric Co Apparatus for sorting electrical components by current consumption at prescribed voltage
US3531716A (en) * 1967-06-16 1970-09-29 Agency Ind Science Techn Method of testing an electronic device by use of an electron beam
JPS4823385A (ja) * 1971-07-28 1973-03-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51148495A (en) * 1975-06-13 1976-12-20 Ishikawajima Harima Heavy Ind Co Ltd Resistance measuring device

Also Published As

Publication number Publication date
DE3036734A1 (de) 1982-05-06
US4460866A (en) 1984-07-17
EP0048862B1 (de) 1985-03-20
DE3169396D1 (en) 1985-04-25
EP0048862A1 (de) 1982-04-07

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