JPS578437A - Optical defect inspecting device - Google Patents
Optical defect inspecting deviceInfo
- Publication number
- JPS578437A JPS578437A JP8324680A JP8324680A JPS578437A JP S578437 A JPS578437 A JP S578437A JP 8324680 A JP8324680 A JP 8324680A JP 8324680 A JP8324680 A JP 8324680A JP S578437 A JPS578437 A JP S578437A
- Authority
- JP
- Japan
- Prior art keywords
- plates
- main surfaces
- box
- viewed
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
PURPOSE:To inspect optical materials easily, accurately and quickly by varying the incident angle of light to an inspecting box having an inner side surface of high reflectivity, a bottom surface of high absorbance, and windows for holding the objects to be inspected. CONSTITUTION:A quartz plate 1 is mounted to a holder 2 and is cleaned, and each of these holders 2 is mounted to an inspecting box 3. The side surface in the box 3 is a surface of high reflectivity, and a bottom surface 7 is a surface of high absorbance and is an inspection surface. To examine the internal defects of the quartz plates 1, a light source part 4 consisting of a fluorescent lamp 5 and a reflection plate 6 is adjusted to tilt to the extent of lighting for the bottom surface 7, and the bottom surface of the box 3 is viewed from above through the main surfaces of the plates 1. To examine the defects on the surfaces, the main surfaces of the plates 1 are viewed from the position which is about 45 deg.C to the main surfaces of the plates 1. Thereby, the inclusions in the quartz plates are viewed as luminous spots, and the fogging owing to washing flaws and the fogging owing to insufficient polishing are inspected by the reflection states of the main surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324680A JPS578437A (en) | 1980-06-18 | 1980-06-18 | Optical defect inspecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324680A JPS578437A (en) | 1980-06-18 | 1980-06-18 | Optical defect inspecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS578437A true JPS578437A (en) | 1982-01-16 |
Family
ID=13796965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8324680A Pending JPS578437A (en) | 1980-06-18 | 1980-06-18 | Optical defect inspecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578437A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977392A (en) * | 1982-08-03 | 1984-05-02 | アルケム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method of processing nuclear fuel rod |
| JP2017093302A (en) * | 2015-11-18 | 2017-06-01 | パナソニックヘルスケアホールディングス株式会社 | Cabinet for biohazard countermeasure |
-
1980
- 1980-06-18 JP JP8324680A patent/JPS578437A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977392A (en) * | 1982-08-03 | 1984-05-02 | アルケム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method of processing nuclear fuel rod |
| JP2017093302A (en) * | 2015-11-18 | 2017-06-01 | パナソニックヘルスケアホールディングス株式会社 | Cabinet for biohazard countermeasure |
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