JPS5782754A - Inspection device for printed wiring substrate - Google Patents

Inspection device for printed wiring substrate

Info

Publication number
JPS5782754A
JPS5782754A JP14768381A JP14768381A JPS5782754A JP S5782754 A JPS5782754 A JP S5782754A JP 14768381 A JP14768381 A JP 14768381A JP 14768381 A JP14768381 A JP 14768381A JP S5782754 A JPS5782754 A JP S5782754A
Authority
JP
Japan
Prior art keywords
pattern
mask plate
substrate
printed wiring
open
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14768381A
Other languages
Japanese (ja)
Inventor
Teruaki Takamune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14768381A priority Critical patent/JPS5782754A/en
Publication of JPS5782754A publication Critical patent/JPS5782754A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To find an abnormal pattern rapidly with high precision, by floating the open and short circuit part of the circuit pattern part of a printed writing substrate by using a mask plate. CONSTITUTION:A pattern part 1 drawn on a printed wiring substrate with etching resist ink is exposed out, and the other part is covered with a mask plate. This mask plate is provided with mark parts 6 and 7 for location alignment. Then, this mark plate is superposed on the substrate and then adjusted so that inspection mark parts 6 and 7 provided on the substrate are coincident with the mark parts 8 and 9. At this time, if there is an open part A in the pattern part, the open part A is seen floating. Further, when the mask plate is provided covering the pattern part while exposing the other part, the short circuit part of the pattern part is seen floating. Thus, the abnormality of the pattern is found rapidly with high precision.
JP14768381A 1981-09-17 1981-09-17 Inspection device for printed wiring substrate Pending JPS5782754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14768381A JPS5782754A (en) 1981-09-17 1981-09-17 Inspection device for printed wiring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14768381A JPS5782754A (en) 1981-09-17 1981-09-17 Inspection device for printed wiring substrate

Publications (1)

Publication Number Publication Date
JPS5782754A true JPS5782754A (en) 1982-05-24

Family

ID=15435916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14768381A Pending JPS5782754A (en) 1981-09-17 1981-09-17 Inspection device for printed wiring substrate

Country Status (1)

Country Link
JP (1) JPS5782754A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010064A (en) * 1987-06-17 1991-04-23 Edmond Pharma S.R.L. Inclusion complexes of dipyridamole with cyclodextrins

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010064A (en) * 1987-06-17 1991-04-23 Edmond Pharma S.R.L. Inclusion complexes of dipyridamole with cyclodextrins

Similar Documents

Publication Publication Date Title
DE3479341D1 (en) Adapter for a printed-circuit board testing device
EP0366333A3 (en) Solder mask resins having improved stability
JPS5782754A (en) Inspection device for printed wiring substrate
DE69203110D1 (en) Device for connecting the contact pins of an integrated circuit mounted in a dual-in-line (DIL) housing with printed circuits on a printed circuit board in n different ways.
JPS5791523A (en) Manufacture of semiconductor device
JPS55157737A (en) Resist pattern forming method for photofabrication
US3607474A (en) Method of making an optical mask for reproducing circuit boards
JPS6488546A (en) Method for exposing thick film resist
JPS5788451A (en) Photomask
JPS6421450A (en) Production of mask
JPS52143774A (en) Negative positioning mechanism in reduction projecting and printing apparatus
JPS57132008A (en) Measuring method for pattern size
JPS554982A (en) Semiconductor device manufacturing method using automatic exposure capable of fitting pattern
JPS56160040A (en) Printing device
GB1535995A (en) Photolithographic production of resistance elements
JPS56107858A (en) Pattern processing method on ceramic printed circuit board
JPS55140838A (en) Mask preparing apparatus
JPS53139946A (en) Simple universal type electronic circuit for defective printed circuit board back up
JPS6464292A (en) Manufacture of printed board
JPS57124732A (en) Manufacture of mask for automatic registering
JPS57189139A (en) Printing and exposing apparatus for film carrier
JPS53126879A (en) Formation mathod of electrode wiring layer
JPS5616126A (en) Exposing method
JPS56167329A (en) Piling joint setting mark to be used in fine processing exposure technology
JPS5555528A (en) Mask aligner