JPS5772355A - Fabrication of package - Google Patents
Fabrication of packageInfo
- Publication number
- JPS5772355A JPS5772355A JP14899180A JP14899180A JPS5772355A JP S5772355 A JPS5772355 A JP S5772355A JP 14899180 A JP14899180 A JP 14899180A JP 14899180 A JP14899180 A JP 14899180A JP S5772355 A JPS5772355 A JP S5772355A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- liquid nitrogen
- green sheets
- package
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
PURPOSE:To prevent the defect of leakage in package by a method wherein green sheets are adhered under pressure to form package due to pressure generated owing to expansion of liquefied gas and also rise of temperature inside a leak-tight chamber by heating. CONSTITUTION:Liquid nitrogen 12 is infused into a sealed chamber 11 made of stainless steel, and multiple green sheets including 14A, 14B and 14C are placed on a stainless mesh 13 in the chamber 11. Then, the chamber is closed with a sealing lid 15 and a liquid nitrogen introducing valve 16 is closed. A heater 17 buried in the chamber 11 wall with the help of an insulating pipe is powered to vaporize liquid nitrogen. Thus, laminated green sheets 14A, 14B and 14C are evenly pressed to adhere by the inflating force generated when liquid nitrogen is vaporizing and by the temperature rise inside the sealed chamber due to heating of liquid gas.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14899180A JPS5772355A (en) | 1980-10-24 | 1980-10-24 | Fabrication of package |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14899180A JPS5772355A (en) | 1980-10-24 | 1980-10-24 | Fabrication of package |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5772355A true JPS5772355A (en) | 1982-05-06 |
JPS637466B2 JPS637466B2 (en) | 1988-02-17 |
Family
ID=15465249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14899180A Granted JPS5772355A (en) | 1980-10-24 | 1980-10-24 | Fabrication of package |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5772355A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102503502B1 (en) | 2022-02-14 | 2023-02-24 | (주)도솔메디 | Electronic label for patient management |
-
1980
- 1980-10-24 JP JP14899180A patent/JPS5772355A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS637466B2 (en) | 1988-02-17 |
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