JPS5772355A - Fabrication of package - Google Patents

Fabrication of package

Info

Publication number
JPS5772355A
JPS5772355A JP14899180A JP14899180A JPS5772355A JP S5772355 A JPS5772355 A JP S5772355A JP 14899180 A JP14899180 A JP 14899180A JP 14899180 A JP14899180 A JP 14899180A JP S5772355 A JPS5772355 A JP S5772355A
Authority
JP
Japan
Prior art keywords
chamber
liquid nitrogen
green sheets
package
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14899180A
Other languages
Japanese (ja)
Other versions
JPS637466B2 (en
Inventor
Masahiro Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14899180A priority Critical patent/JPS5772355A/en
Publication of JPS5772355A publication Critical patent/JPS5772355A/en
Publication of JPS637466B2 publication Critical patent/JPS637466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807Ceramic parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

PURPOSE:To prevent the defect of leakage in package by a method wherein green sheets are adhered under pressure to form package due to pressure generated owing to expansion of liquefied gas and also rise of temperature inside a leak-tight chamber by heating. CONSTITUTION:Liquid nitrogen 12 is infused into a sealed chamber 11 made of stainless steel, and multiple green sheets including 14A, 14B and 14C are placed on a stainless mesh 13 in the chamber 11. Then, the chamber is closed with a sealing lid 15 and a liquid nitrogen introducing valve 16 is closed. A heater 17 buried in the chamber 11 wall with the help of an insulating pipe is powered to vaporize liquid nitrogen. Thus, laminated green sheets 14A, 14B and 14C are evenly pressed to adhere by the inflating force generated when liquid nitrogen is vaporizing and by the temperature rise inside the sealed chamber due to heating of liquid gas.
JP14899180A 1980-10-24 1980-10-24 Fabrication of package Granted JPS5772355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14899180A JPS5772355A (en) 1980-10-24 1980-10-24 Fabrication of package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14899180A JPS5772355A (en) 1980-10-24 1980-10-24 Fabrication of package

Publications (2)

Publication Number Publication Date
JPS5772355A true JPS5772355A (en) 1982-05-06
JPS637466B2 JPS637466B2 (en) 1988-02-17

Family

ID=15465249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14899180A Granted JPS5772355A (en) 1980-10-24 1980-10-24 Fabrication of package

Country Status (1)

Country Link
JP (1) JPS5772355A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102503502B1 (en) 2022-02-14 2023-02-24 (주)도솔메디 Electronic label for patient management

Also Published As

Publication number Publication date
JPS637466B2 (en) 1988-02-17

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