JPS577229B2 - - Google Patents
Info
- Publication number
- JPS577229B2 JPS577229B2 JP11175079A JP11175079A JPS577229B2 JP S577229 B2 JPS577229 B2 JP S577229B2 JP 11175079 A JP11175079 A JP 11175079A JP 11175079 A JP11175079 A JP 11175079A JP S577229 B2 JPS577229 B2 JP S577229B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11175079A JPS5638474A (en) | 1979-09-03 | 1979-09-03 | Etching method of aluminum or aluminum-base alloy film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11175079A JPS5638474A (en) | 1979-09-03 | 1979-09-03 | Etching method of aluminum or aluminum-base alloy film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5638474A JPS5638474A (en) | 1981-04-13 |
| JPS577229B2 true JPS577229B2 (ja) | 1982-02-09 |
Family
ID=14569231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11175079A Granted JPS5638474A (en) | 1979-09-03 | 1979-09-03 | Etching method of aluminum or aluminum-base alloy film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5638474A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0746689B2 (ja) * | 1984-11-27 | 1995-05-17 | 松下電器産業株式会社 | アルミニウム−シリコン−銅合金のドライエツチング法 |
| JP2546242B2 (ja) * | 1986-10-13 | 1996-10-23 | ソニー株式会社 | アルミニウム合金のドライエツチング方法 |
| US5245203A (en) * | 1988-06-06 | 1993-09-14 | Canon Kabushiki Kaisha | Photoelectric converter with plural regions |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1499857A (en) * | 1975-09-18 | 1978-02-01 | Standard Telephones Cables Ltd | Glow discharge etching |
| DE2744534A1 (de) * | 1976-10-05 | 1978-04-06 | Christopher David Dobson | Vorrichtung zum aetzen von metall- oberflaechen |
-
1979
- 1979-09-03 JP JP11175079A patent/JPS5638474A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5638474A (en) | 1981-04-13 |