JPS5771133A - Radiation by electron beam - Google Patents

Radiation by electron beam

Info

Publication number
JPS5771133A
JPS5771133A JP14806080A JP14806080A JPS5771133A JP S5771133 A JPS5771133 A JP S5771133A JP 14806080 A JP14806080 A JP 14806080A JP 14806080 A JP14806080 A JP 14806080A JP S5771133 A JPS5771133 A JP S5771133A
Authority
JP
Japan
Prior art keywords
deltal
segment
register
point
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14806080A
Other languages
English (en)
Other versions
JPS5914887B2 (ja
Inventor
Hitoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14806080A priority Critical patent/JPS5914887B2/ja
Publication of JPS5771133A publication Critical patent/JPS5771133A/ja
Publication of JPS5914887B2 publication Critical patent/JPS5914887B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP14806080A 1980-10-22 1980-10-22 電子線露光方法 Expired JPS5914887B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14806080A JPS5914887B2 (ja) 1980-10-22 1980-10-22 電子線露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14806080A JPS5914887B2 (ja) 1980-10-22 1980-10-22 電子線露光方法

Publications (2)

Publication Number Publication Date
JPS5771133A true JPS5771133A (en) 1982-05-01
JPS5914887B2 JPS5914887B2 (ja) 1984-04-06

Family

ID=15444278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14806080A Expired JPS5914887B2 (ja) 1980-10-22 1980-10-22 電子線露光方法

Country Status (1)

Country Link
JP (1) JPS5914887B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992668A (en) * 1986-05-16 1991-02-12 U.S. Philips Corporation Electron beam pattern generator control

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620580U (ja) * 1992-03-30 1994-03-18 旭コンクリート工業株式会社 Ｐｃ鋼材用キャップ
EP3952330A4 (en) 2019-03-25 2022-05-18 Panasonic Intellectual Property Corporation of America EARPHONE BUTTON

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992668A (en) * 1986-05-16 1991-02-12 U.S. Philips Corporation Electron beam pattern generator control

Also Published As

Publication number Publication date
JPS5914887B2 (ja) 1984-04-06

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