JPS5770275A - Pore sealing treatment of ceramic sputtered film - Google Patents

Pore sealing treatment of ceramic sputtered film

Info

Publication number
JPS5770275A
JPS5770275A JP55145678A JP14567880A JPS5770275A JP S5770275 A JPS5770275 A JP S5770275A JP 55145678 A JP55145678 A JP 55145678A JP 14567880 A JP14567880 A JP 14567880A JP S5770275 A JPS5770275 A JP S5770275A
Authority
JP
Japan
Prior art keywords
vacuum
treatment
container
ceramic sputtered
immersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55145678A
Other languages
Japanese (ja)
Inventor
Yoshio Harada
Shizuma Kuribayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP55145678A priority Critical patent/JPS5770275A/en
Publication of JPS5770275A publication Critical patent/JPS5770275A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

PURPOSE:To form an inorg. insulative film which can be used at a high temp. and has good electric insulative capacity and vacuum capacity by combining vacuum degassing treatment, immersion into an ethyl silicate liquid and high temp. drying treatment to carry out the titled treatment. CONSTITUTION:A vacuum container 6 is always held under a vacuum condition by a vacuum pump 9. In said container, a ceramic sputtered substrate plate 2 is moved upwardly and downwardly as shown by an arrow and immersion of said substrate plate into an ethyl silicate liquid within the container 4 and radiation heating and drying treatement by a heater 7 are repeated. By carrying out the above described treatment, SiO2 can be filled in void pores of the ceramic sputtered film in a gas and moisture free condition.
JP55145678A 1980-10-20 1980-10-20 Pore sealing treatment of ceramic sputtered film Pending JPS5770275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55145678A JPS5770275A (en) 1980-10-20 1980-10-20 Pore sealing treatment of ceramic sputtered film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55145678A JPS5770275A (en) 1980-10-20 1980-10-20 Pore sealing treatment of ceramic sputtered film

Publications (1)

Publication Number Publication Date
JPS5770275A true JPS5770275A (en) 1982-04-30

Family

ID=15390552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55145678A Pending JPS5770275A (en) 1980-10-20 1980-10-20 Pore sealing treatment of ceramic sputtered film

Country Status (1)

Country Link
JP (1) JPS5770275A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02149657A (en) * 1988-11-29 1990-06-08 Dainippon Toryo Co Ltd Method for protecting steel stock
JPH02149656A (en) * 1988-11-29 1990-06-08 Dainippon Toryo Co Ltd Treatment for sprayed deposit
JPH0344455A (en) * 1989-07-12 1991-02-26 Sumitomo Metal Ind Ltd Highly corrosion resistant roll and its production
WO1997045566A1 (en) * 1996-05-24 1997-12-04 Nippon Steel Hardfacing Co., Ltd. Method of strengthening sprayed coating
US6284320B1 (en) * 1998-09-19 2001-09-04 Nippon Steel Hardfacing Co., Ltd. Method for producing member for molten metal bath having coating film excellent in resistance to corrosion by molten metal
FR2842213A1 (en) * 2002-07-12 2004-01-16 Electro Rech Device for galvanizing metal components in a bath of molten contained in a crucible includes a support for components that moves vertically between charge/discharge and working positions
CN103352240A (en) * 2013-07-29 2013-10-16 厦门旺朋电子元件有限公司 Electrotinning technology of SMD (Surface-Mounted Device) automotive electronic element

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02149657A (en) * 1988-11-29 1990-06-08 Dainippon Toryo Co Ltd Method for protecting steel stock
JPH02149656A (en) * 1988-11-29 1990-06-08 Dainippon Toryo Co Ltd Treatment for sprayed deposit
JPH0344455A (en) * 1989-07-12 1991-02-26 Sumitomo Metal Ind Ltd Highly corrosion resistant roll and its production
WO1997045566A1 (en) * 1996-05-24 1997-12-04 Nippon Steel Hardfacing Co., Ltd. Method of strengthening sprayed coating
US6284320B1 (en) * 1998-09-19 2001-09-04 Nippon Steel Hardfacing Co., Ltd. Method for producing member for molten metal bath having coating film excellent in resistance to corrosion by molten metal
FR2842213A1 (en) * 2002-07-12 2004-01-16 Electro Rech Device for galvanizing metal components in a bath of molten contained in a crucible includes a support for components that moves vertically between charge/discharge and working positions
CN103352240A (en) * 2013-07-29 2013-10-16 厦门旺朋电子元件有限公司 Electrotinning technology of SMD (Surface-Mounted Device) automotive electronic element

Similar Documents

Publication Publication Date Title
JPS5770275A (en) Pore sealing treatment of ceramic sputtered film
KR900014581A (en) Interfacial method and apparatus for the maturation of alcoholic beverages
JPS5019173B1 (en)
JPS5676242A (en) Treating apparatus using gas plasma reaction
JPS5214946A (en) High frequency heating apparatus
JPS5742391A (en) Sealed body containing activated aluminum plate
JPS5730502A (en) Iodine vapor generator
JPS578115A (en) Improvement of vacuum impregnating method
JPS5631489A (en) Method and apparatus for preparing sterilized water
JPS56126258A (en) Production of silver (2) oxide battery
JPS5698404A (en) Preparation of high heat conductive material
JPS55158134A (en) Converter
JPS57211239A (en) Formation of insulating film
JPS539082A (en) Gas exhausting device for fluorescent lamp
JPS53144057A (en) High frequency heater
JPS5542502A (en) Vacuum thawing device
JPS5368412A (en) Vaccume exhausting method
JPS647902A (en) Microwave concentrator
JPS5712255A (en) Solar heat hot water device utilizing vacuum space
JPS6455039A (en) Liquid-proof rotor
JPS54107267A (en) Vessel for semiconductor integrated circuit unit
JPS553644A (en) Production of semiconductor device
JPS5435458A (en) Electric pot warmer
JPS5565840A (en) High-frequency heater
JPS5464473A (en) High pressure oxidizing method of silicon