JPS5770275A - Pore sealing treatment of ceramic sputtered film - Google Patents
Pore sealing treatment of ceramic sputtered filmInfo
- Publication number
- JPS5770275A JPS5770275A JP55145678A JP14567880A JPS5770275A JP S5770275 A JPS5770275 A JP S5770275A JP 55145678 A JP55145678 A JP 55145678A JP 14567880 A JP14567880 A JP 14567880A JP S5770275 A JPS5770275 A JP S5770275A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- treatment
- container
- ceramic sputtered
- immersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
PURPOSE:To form an inorg. insulative film which can be used at a high temp. and has good electric insulative capacity and vacuum capacity by combining vacuum degassing treatment, immersion into an ethyl silicate liquid and high temp. drying treatment to carry out the titled treatment. CONSTITUTION:A vacuum container 6 is always held under a vacuum condition by a vacuum pump 9. In said container, a ceramic sputtered substrate plate 2 is moved upwardly and downwardly as shown by an arrow and immersion of said substrate plate into an ethyl silicate liquid within the container 4 and radiation heating and drying treatement by a heater 7 are repeated. By carrying out the above described treatment, SiO2 can be filled in void pores of the ceramic sputtered film in a gas and moisture free condition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55145678A JPS5770275A (en) | 1980-10-20 | 1980-10-20 | Pore sealing treatment of ceramic sputtered film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55145678A JPS5770275A (en) | 1980-10-20 | 1980-10-20 | Pore sealing treatment of ceramic sputtered film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5770275A true JPS5770275A (en) | 1982-04-30 |
Family
ID=15390552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55145678A Pending JPS5770275A (en) | 1980-10-20 | 1980-10-20 | Pore sealing treatment of ceramic sputtered film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5770275A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02149657A (en) * | 1988-11-29 | 1990-06-08 | Dainippon Toryo Co Ltd | Method for protecting steel stock |
JPH02149656A (en) * | 1988-11-29 | 1990-06-08 | Dainippon Toryo Co Ltd | Treatment for sprayed deposit |
JPH0344455A (en) * | 1989-07-12 | 1991-02-26 | Sumitomo Metal Ind Ltd | Highly corrosion resistant roll and its production |
WO1997045566A1 (en) * | 1996-05-24 | 1997-12-04 | Nippon Steel Hardfacing Co., Ltd. | Method of strengthening sprayed coating |
US6284320B1 (en) * | 1998-09-19 | 2001-09-04 | Nippon Steel Hardfacing Co., Ltd. | Method for producing member for molten metal bath having coating film excellent in resistance to corrosion by molten metal |
FR2842213A1 (en) * | 2002-07-12 | 2004-01-16 | Electro Rech | Device for galvanizing metal components in a bath of molten contained in a crucible includes a support for components that moves vertically between charge/discharge and working positions |
CN103352240A (en) * | 2013-07-29 | 2013-10-16 | 厦门旺朋电子元件有限公司 | Electrotinning technology of SMD (Surface-Mounted Device) automotive electronic element |
-
1980
- 1980-10-20 JP JP55145678A patent/JPS5770275A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02149657A (en) * | 1988-11-29 | 1990-06-08 | Dainippon Toryo Co Ltd | Method for protecting steel stock |
JPH02149656A (en) * | 1988-11-29 | 1990-06-08 | Dainippon Toryo Co Ltd | Treatment for sprayed deposit |
JPH0344455A (en) * | 1989-07-12 | 1991-02-26 | Sumitomo Metal Ind Ltd | Highly corrosion resistant roll and its production |
WO1997045566A1 (en) * | 1996-05-24 | 1997-12-04 | Nippon Steel Hardfacing Co., Ltd. | Method of strengthening sprayed coating |
US6284320B1 (en) * | 1998-09-19 | 2001-09-04 | Nippon Steel Hardfacing Co., Ltd. | Method for producing member for molten metal bath having coating film excellent in resistance to corrosion by molten metal |
FR2842213A1 (en) * | 2002-07-12 | 2004-01-16 | Electro Rech | Device for galvanizing metal components in a bath of molten contained in a crucible includes a support for components that moves vertically between charge/discharge and working positions |
CN103352240A (en) * | 2013-07-29 | 2013-10-16 | 厦门旺朋电子元件有限公司 | Electrotinning technology of SMD (Surface-Mounted Device) automotive electronic element |
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