JPS5768047A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5768047A
JPS5768047A JP55144908A JP14490880A JPS5768047A JP S5768047 A JPS5768047 A JP S5768047A JP 55144908 A JP55144908 A JP 55144908A JP 14490880 A JP14490880 A JP 14490880A JP S5768047 A JPS5768047 A JP S5768047A
Authority
JP
Japan
Prior art keywords
time
measuring
emitting device
light emitting
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55144908A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6117142B2 (enrdf_load_stackoverflow
Inventor
Jiro Suma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55144908A priority Critical patent/JPS5768047A/ja
Publication of JPS5768047A publication Critical patent/JPS5768047A/ja
Publication of JPS6117142B2 publication Critical patent/JPS6117142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55144908A 1980-10-16 1980-10-16 Probe card Granted JPS5768047A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55144908A JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55144908A JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Publications (2)

Publication Number Publication Date
JPS5768047A true JPS5768047A (en) 1982-04-26
JPS6117142B2 JPS6117142B2 (enrdf_load_stackoverflow) 1986-05-06

Family

ID=15373077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55144908A Granted JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Country Status (1)

Country Link
JP (1) JPS5768047A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008066690A (ja) * 2006-08-11 2008-03-21 Seiko Instruments Inc 面光源付プローブカード

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196435U (enrdf_load_stackoverflow) * 1987-06-04 1988-12-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008066690A (ja) * 2006-08-11 2008-03-21 Seiko Instruments Inc 面光源付プローブカード

Also Published As

Publication number Publication date
JPS6117142B2 (enrdf_load_stackoverflow) 1986-05-06

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