JPS576789Y2 - - Google Patents

Info

Publication number
JPS576789Y2
JPS576789Y2 JP1975025513U JP2551375U JPS576789Y2 JP S576789 Y2 JPS576789 Y2 JP S576789Y2 JP 1975025513 U JP1975025513 U JP 1975025513U JP 2551375 U JP2551375 U JP 2551375U JP S576789 Y2 JPS576789 Y2 JP S576789Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975025513U
Other languages
Japanese (ja)
Other versions
JPS51106918U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975025513U priority Critical patent/JPS576789Y2/ja
Publication of JPS51106918U publication Critical patent/JPS51106918U/ja
Application granted granted Critical
Publication of JPS576789Y2 publication Critical patent/JPS576789Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rotary Pumps (AREA)
JP1975025513U 1975-02-26 1975-02-26 Expired JPS576789Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Publications (2)

Publication Number Publication Date
JPS51106918U JPS51106918U (enrdf_load_stackoverflow) 1976-08-26
JPS576789Y2 true JPS576789Y2 (enrdf_load_stackoverflow) 1982-02-08

Family

ID=28124165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975025513U Expired JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Country Status (1)

Country Link
JP (1) JPS576789Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103030B2 (ja) * 1985-10-21 1994-12-14 株式会社日立製作所 スクリユ−真空ポンプ
JP2650897B2 (ja) * 1986-10-27 1997-09-10 株式会社日立製作所 半導体製造装置用スクリュー真空ポンプ
JP5180709B2 (ja) * 2008-07-10 2013-04-10 株式会社神戸製鋼所 スクリュ圧縮機
WO2016157449A1 (ja) * 2015-03-31 2016-10-06 株式会社日立産機システム ガス圧縮機
EP4042021A1 (en) * 2019-10-07 2022-08-17 Carrier Corporation Screw compressor with adjustable passage

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930167A (enrdf_load_stackoverflow) * 1972-08-03 1974-03-18

Also Published As

Publication number Publication date
JPS51106918U (enrdf_load_stackoverflow) 1976-08-26

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