JPS51106918U - - Google Patents

Info

Publication number
JPS51106918U
JPS51106918U JP2551375U JP2551375U JPS51106918U JP S51106918 U JPS51106918 U JP S51106918U JP 2551375 U JP2551375 U JP 2551375U JP 2551375 U JP2551375 U JP 2551375U JP S51106918 U JPS51106918 U JP S51106918U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2551375U
Other languages
Japanese (ja)
Other versions
JPS576789Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975025513U priority Critical patent/JPS576789Y2/ja
Publication of JPS51106918U publication Critical patent/JPS51106918U/ja
Application granted granted Critical
Publication of JPS576789Y2 publication Critical patent/JPS576789Y2/ja
Expired legal-status Critical Current

Links

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  • Rotary Pumps (AREA)
JP1975025513U 1975-02-26 1975-02-26 Expired JPS576789Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975025513U JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Publications (2)

Publication Number Publication Date
JPS51106918U true JPS51106918U (enrdf_load_stackoverflow) 1976-08-26
JPS576789Y2 JPS576789Y2 (enrdf_load_stackoverflow) 1982-02-08

Family

ID=28124165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975025513U Expired JPS576789Y2 (enrdf_load_stackoverflow) 1975-02-26 1975-02-26

Country Status (1)

Country Link
JP (1) JPS576789Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293490A (ja) * 1985-10-21 1987-04-28 Hitachi Ltd スクリユ−真空ポンプ
JPS63109292A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd 半導体製造装置用スクリュー真空ポンプ
JP2010019170A (ja) * 2008-07-10 2010-01-28 Kobe Steel Ltd スクリュ圧縮機
WO2016157449A1 (ja) * 2015-03-31 2016-10-06 株式会社日立産機システム ガス圧縮機
WO2021071910A1 (en) * 2019-10-07 2021-04-15 Carrier Corporation Screw compressor with adjustable passage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930167A (enrdf_load_stackoverflow) * 1972-08-03 1974-03-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930167A (enrdf_load_stackoverflow) * 1972-08-03 1974-03-18

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293490A (ja) * 1985-10-21 1987-04-28 Hitachi Ltd スクリユ−真空ポンプ
JPS63109292A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd 半導体製造装置用スクリュー真空ポンプ
JP2010019170A (ja) * 2008-07-10 2010-01-28 Kobe Steel Ltd スクリュ圧縮機
WO2016157449A1 (ja) * 2015-03-31 2016-10-06 株式会社日立産機システム ガス圧縮機
WO2021071910A1 (en) * 2019-10-07 2021-04-15 Carrier Corporation Screw compressor with adjustable passage
CN114555947A (zh) * 2019-10-07 2022-05-27 开利公司 具有可调整通道的螺杆压缩机

Also Published As

Publication number Publication date
JPS576789Y2 (enrdf_load_stackoverflow) 1982-02-08

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