JPS576578B2 - - Google Patents

Info

Publication number
JPS576578B2
JPS576578B2 JP11097674A JP11097674A JPS576578B2 JP S576578 B2 JPS576578 B2 JP S576578B2 JP 11097674 A JP11097674 A JP 11097674A JP 11097674 A JP11097674 A JP 11097674A JP S576578 B2 JPS576578 B2 JP S576578B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11097674A
Other languages
Japanese (ja)
Other versions
JPS5073707A (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5073707A publication Critical patent/JPS5073707A/ja
Publication of JPS576578B2 publication Critical patent/JPS576578B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electron Beam Exposure (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP11097674A 1973-11-05 1974-09-26 Expired JPS576578B2 (en, 2012)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41293473A 1973-11-05 1973-11-05

Publications (2)

Publication Number Publication Date
JPS5073707A JPS5073707A (en, 2012) 1975-06-18
JPS576578B2 true JPS576578B2 (en, 2012) 1982-02-05

Family

ID=23635067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11097674A Expired JPS576578B2 (en, 2012) 1973-11-05 1974-09-26

Country Status (5)

Country Link
US (1) US4133907A (en, 2012)
JP (1) JPS576578B2 (en, 2012)
DE (1) DE2452326C2 (en, 2012)
FR (1) FR2250200B1 (en, 2012)
GB (1) GB1474817A (en, 2012)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225664A (en) * 1979-02-22 1980-09-30 Bell Telephone Laboratories, Incorporated X-ray resist containing poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate)
JPH0536782B2 (en, 2012) * 1979-05-31 1993-05-31 Ei Teii Ando Teii Tekunorojiizu Inc
US4383026A (en) * 1979-05-31 1983-05-10 Bell Telephone Laboratories, Incorporated Accelerated particle lithographic processing and articles so produced
US4289842A (en) * 1980-06-27 1981-09-15 Eastman Kodak Company Negative-working polymers useful as electron beam resists
JPS57157523A (en) * 1981-03-25 1982-09-29 Hitachi Ltd Forming method for pattern
WO1983002339A1 (en) * 1981-12-21 1983-07-07 Molodnyakov, Sergey, Petrovich Photo- and electron resist
JP4524744B2 (ja) * 2004-04-14 2010-08-18 日本電気株式会社 有機マスクの形成方法及び該有機マスクを利用したパターン形成方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE632793A (en, 2012) * 1960-06-20 1900-01-01
US3535137A (en) * 1967-01-13 1970-10-20 Ibm Method of fabricating etch resistant masks
US3627659A (en) * 1967-07-11 1971-12-14 Basf Ag Radiation treatment of halogen containing olefinically unsaturated esters
US3544790A (en) * 1968-03-01 1970-12-01 Western Electric Co An electron beam masking arrangement
US3661582A (en) * 1970-03-23 1972-05-09 Western Electric Co Additives to positive photoresists which increase the sensitivity thereof
US3703402A (en) * 1970-11-23 1972-11-21 Gen Electric Electron sensitive compositions

Also Published As

Publication number Publication date
JPS5073707A (en, 2012) 1975-06-18
DE2452326A1 (de) 1975-05-07
FR2250200A1 (en, 2012) 1975-05-30
GB1474817A (en) 1977-05-25
FR2250200B1 (en, 2012) 1978-09-15
US4133907A (en) 1979-01-09
DE2452326C2 (de) 1985-08-22

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