JPS5765327A - Plasma reaction treatment - Google Patents
Plasma reaction treatmentInfo
- Publication number
- JPS5765327A JPS5765327A JP14087080A JP14087080A JPS5765327A JP S5765327 A JPS5765327 A JP S5765327A JP 14087080 A JP14087080 A JP 14087080A JP 14087080 A JP14087080 A JP 14087080A JP S5765327 A JPS5765327 A JP S5765327A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- plasma
- reaction tube
- treated
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To carry out desired surface treatment without accompanying modification of a material itself or damage of a surface thereof by inserting a filter between an object to be treated and plasma to alleviate plasma action.
CONSTITUTION: A filter 6 with a diameter slightly smaller than that of a reaction tube is inserted into said reaction tube and fixed by a ring 7 made of Teflon or the like. An object A to be treated is attached in a space between the reaction tube 1 and the filter 6. Thereby, plasma generated in the reaction tube 1 is acted on the object A to be treated through the filter and desired treatment is applied thereto. In this case, glow discharge is passed through the filter 6 but is not invaded into the space between the reaction tube 1 and the filter 6 and direct bombardment toward the object A to be treated due to plasma is avoided. By this method, even a material such as a film like or fibrous material can be subjected to plasma reaction treatment without obstruction.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14087080A JPS5849294B2 (en) | 1980-10-08 | 1980-10-08 | Plasma reaction treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14087080A JPS5849294B2 (en) | 1980-10-08 | 1980-10-08 | Plasma reaction treatment method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5765327A true JPS5765327A (en) | 1982-04-20 |
JPS5849294B2 JPS5849294B2 (en) | 1983-11-02 |
Family
ID=15278661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14087080A Expired JPS5849294B2 (en) | 1980-10-08 | 1980-10-08 | Plasma reaction treatment method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5849294B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5932940A (en) * | 1982-08-16 | 1984-02-22 | Sankyo Dengiyou Kk | Activating apparatus |
-
1980
- 1980-10-08 JP JP14087080A patent/JPS5849294B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5932940A (en) * | 1982-08-16 | 1984-02-22 | Sankyo Dengiyou Kk | Activating apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5849294B2 (en) | 1983-11-02 |
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