JPS5764929A - Carrying apparatus for glass substrate - Google Patents

Carrying apparatus for glass substrate

Info

Publication number
JPS5764929A
JPS5764929A JP55140333A JP14033380A JPS5764929A JP S5764929 A JPS5764929 A JP S5764929A JP 55140333 A JP55140333 A JP 55140333A JP 14033380 A JP14033380 A JP 14033380A JP S5764929 A JPS5764929 A JP S5764929A
Authority
JP
Japan
Prior art keywords
arm
substrate
moved downward
given amount
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55140333A
Other languages
Japanese (ja)
Other versions
JPH0245323B2 (en
Inventor
Yukio Kakizaki
Nobutoshi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55140333A priority Critical patent/JPS5764929A/en
Publication of JPS5764929A publication Critical patent/JPS5764929A/en
Publication of JPH0245323B2 publication Critical patent/JPH0245323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To enable a substrate to be removed from a container without rubbing against the same, by a method wherein the end part of a carrying arm is abutted against a reference position near the opening of a substrate container, and the arm is moved downward to a given position and moved upward by a given amount after the fact that the arm has moved downward by a given amount is detected. CONSTITUTION:A glass substrate 10 as a mask or the like is horizontally housed in each of a plurality of cassettes held being vertically aligned with each other by means of a cartidge. Fork portions 16a, 16b of an arm 16 are inserted into the space between a bottom lid 3 of the cassette and the substrate 10 by driving a two- dimensional moving means, and the substrate 10 is sucked through suction holes 17 provided in the fork portions and drawn out. In this inserting and removing operation, with the fork ends slightly inserted, the arm is moved downward. When a limit switch 50 detects that the arm 16 has moved downward by a given amount (h), the downward movement of the arm 16 is stopped. Then, the arm 16 is moved upward to a halfway position of the gap (t) between the substrate 10 and the upper surface 3c of the bottom lid. Thereby, it is possible to remove the substrate 10 from the cassette for transfer without rubbing, thereby to prevent dust from adhering to a mask or the like as well as production of flaws thereon.
JP55140333A 1980-10-07 1980-10-07 Carrying apparatus for glass substrate Granted JPS5764929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140333A JPS5764929A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140333A JPS5764929A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Publications (2)

Publication Number Publication Date
JPS5764929A true JPS5764929A (en) 1982-04-20
JPH0245323B2 JPH0245323B2 (en) 1990-10-09

Family

ID=15266379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140333A Granted JPS5764929A (en) 1980-10-07 1980-10-07 Carrying apparatus for glass substrate

Country Status (1)

Country Link
JP (1) JPS5764929A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616825A (en) * 1984-06-20 1986-01-13 Canon Inc Positioning apparatus
JPS616826A (en) * 1984-06-20 1986-01-13 Canon Inc Positioning apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320263A (en) * 1976-08-06 1978-02-24 Komatsu Ltd Automatic fork positioning apparatus for use in fork lift
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320263A (en) * 1976-08-06 1978-02-24 Komatsu Ltd Automatic fork positioning apparatus for use in fork lift
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616825A (en) * 1984-06-20 1986-01-13 Canon Inc Positioning apparatus
JPS616826A (en) * 1984-06-20 1986-01-13 Canon Inc Positioning apparatus

Also Published As

Publication number Publication date
JPH0245323B2 (en) 1990-10-09

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