JPS5763444A - Fet sensor with organic polymer film - Google Patents

Fet sensor with organic polymer film

Info

Publication number
JPS5763444A
JPS5763444A JP55138439A JP13843980A JPS5763444A JP S5763444 A JPS5763444 A JP S5763444A JP 55138439 A JP55138439 A JP 55138439A JP 13843980 A JP13843980 A JP 13843980A JP S5763444 A JPS5763444 A JP S5763444A
Authority
JP
Japan
Prior art keywords
layer
organic polymer
metal chromium
film
chromium layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55138439A
Other languages
Japanese (ja)
Inventor
Makoto Yano
Kiyoo Shimada
Kyoichiro Shibatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP55138439A priority Critical patent/JPS5763444A/en
Publication of JPS5763444A publication Critical patent/JPS5763444A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Abstract

PURPOSE:To improve water-resisting property, by a method wherein a metal chromium layer is provided onto a gate insulation layer and then organic polymer is provided thereon by means of coating. CONSTITUTION:A metal chrominum layer is provided by means of evaporation or spattering on an FET gate surface which is coated with an insulation film of silicon nitride, silicon dioxide, alumina, tantalum oxide or the like. A film of organic polymer is formed on the metal chromium layer by means of dipping, spattering or polymerization. By providing the metal chromium layer between the FET gate insulation film and the organic polymer film as above described, separation of the organic polymer film and the gate insulation film is prevented. For example, a metal chromium layer is provided on a gate insulation layer of silicon nitride. Crown compound represented by formula and styrene are copolymerized into polymer (crown compound content 20%) and, using the polymer of one part in weight and polyvinyl chloride of 100pts. as a plasticizer, dioctyl adipate of 100pts. is dissolved in cyclo hexane and applied onto the metal chromium layer thereby the formed layer is stable even after dipping in water for one month.
JP55138439A 1980-10-02 1980-10-02 Fet sensor with organic polymer film Pending JPS5763444A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55138439A JPS5763444A (en) 1980-10-02 1980-10-02 Fet sensor with organic polymer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55138439A JPS5763444A (en) 1980-10-02 1980-10-02 Fet sensor with organic polymer film

Publications (1)

Publication Number Publication Date
JPS5763444A true JPS5763444A (en) 1982-04-16

Family

ID=15222006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55138439A Pending JPS5763444A (en) 1980-10-02 1980-10-02 Fet sensor with organic polymer film

Country Status (1)

Country Link
JP (1) JPS5763444A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839020A (en) * 1986-05-26 1989-06-13 Terumo Kabushiki Kaisha Gas sensor
EP0345347A1 (en) * 1986-11-20 1989-12-13 Terumo Kabushiki Kaisha Fet electrode
US4968400A (en) * 1986-11-20 1990-11-06 Terumo Kabushiki Kaisha Enzyme sensor
US5192417A (en) * 1987-09-21 1993-03-09 Terumo Kabushiki Kaisha Lithium ion sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839020A (en) * 1986-05-26 1989-06-13 Terumo Kabushiki Kaisha Gas sensor
EP0345347A1 (en) * 1986-11-20 1989-12-13 Terumo Kabushiki Kaisha Fet electrode
US4968400A (en) * 1986-11-20 1990-11-06 Terumo Kabushiki Kaisha Enzyme sensor
EP0345347A4 (en) * 1986-11-20 1991-01-09 Terumo Kabushiki Kaisha Fet electrode
US5061976A (en) * 1986-11-20 1991-10-29 Terumo Kabushiki Kaisha Fet electrode with carbon gate
US5192417A (en) * 1987-09-21 1993-03-09 Terumo Kabushiki Kaisha Lithium ion sensor

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