JPS576253B2 - - Google Patents
Info
- Publication number
- JPS576253B2 JPS576253B2 JP7258075A JP7258075A JPS576253B2 JP S576253 B2 JPS576253 B2 JP S576253B2 JP 7258075 A JP7258075 A JP 7258075A JP 7258075 A JP7258075 A JP 7258075A JP S576253 B2 JPS576253 B2 JP S576253B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50072580A JPS51148367A (en) | 1975-06-14 | 1975-06-14 | Layer construction radiant ray resist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50072580A JPS51148367A (en) | 1975-06-14 | 1975-06-14 | Layer construction radiant ray resist |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51148367A JPS51148367A (en) | 1976-12-20 |
| JPS576253B2 true JPS576253B2 (enExample) | 1982-02-04 |
Family
ID=13493449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50072580A Granted JPS51148367A (en) | 1975-06-14 | 1975-06-14 | Layer construction radiant ray resist |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51148367A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921540B2 (ja) * | 1977-10-26 | 1984-05-21 | セイコーエプソン株式会社 | フオトレジストパタ−ンの形成方法 |
| JPS5820422B2 (ja) * | 1977-11-04 | 1983-04-22 | 東京応化工業株式会社 | 超微細パタ−ンの形成方法 |
| US4180604A (en) * | 1977-12-30 | 1979-12-25 | International Business Machines Corporation | Two layer resist system |
| JPS59222928A (ja) * | 1983-06-02 | 1984-12-14 | Matsushita Electronics Corp | マスク製作方法 |
| JPH0287146A (ja) * | 1988-09-26 | 1990-03-28 | Hitachi Ltd | 半導体装置の製造方法 |
| JP4942432B2 (ja) * | 2006-09-12 | 2012-05-30 | 株式会社フジシールインターナショナル | ブリスター包装体 |
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1975
- 1975-06-14 JP JP50072580A patent/JPS51148367A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51148367A (en) | 1976-12-20 |