JPS5761611A - Preparation of ultrafine powder of carbide and its device - Google Patents

Info

Publication number

JPS5761611A

JPS5761611A JP55134996A JP13499680A JPS5761611A JP S5761611 A JPS5761611 A JP S5761611A JP 55134996 A JP55134996 A JP 55134996A JP 13499680 A JP13499680 A JP 13499680A JP S5761611 A JPS5761611 A JP S5761611A

Authority

JP

Japan

Prior art keywords

silicon

carbon

carbide

vacuum container

ultrafine powder

Prior art date

1980-09-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000000843 powder Substances 0.000 title abstract 4
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 7
• 229910052710 silicon Inorganic materials 0.000 abstract 7
• 239000010703 silicon Substances 0.000 abstract 7
• VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 3
• 229910052799 carbon Inorganic materials 0.000 abstract 3
• 239000003575 carbonaceous material Substances 0.000 abstract 2
• -1 e.g. Substances 0.000 abstract 2
• 230000005611 electricity Effects 0.000 abstract 2
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 2
• 229910010271 silicon carbide Inorganic materials 0.000 abstract 2
• 239000000126 substance Substances 0.000 abstract 2
• 150000001875 compounds Chemical class 0.000 abstract 1
• 239000004020 conductor Substances 0.000 abstract 1
• 239000012535 impurity Substances 0.000 abstract 1