JPS5759329A - Device for electron beam exposure - Google Patents

Device for electron beam exposure

Info

Publication number
JPS5759329A
JPS5759329A JP13485180A JP13485180A JPS5759329A JP S5759329 A JPS5759329 A JP S5759329A JP 13485180 A JP13485180 A JP 13485180A JP 13485180 A JP13485180 A JP 13485180A JP S5759329 A JPS5759329 A JP S5759329A
Authority
JP
Japan
Prior art keywords
feeder
driving system
cassette
signal
breakdown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13485180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355210B2 (enrdf_load_stackoverflow
Inventor
Toru Tojo
Kazuyoshi Sugihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13485180A priority Critical patent/JPS5759329A/ja
Publication of JPS5759329A publication Critical patent/JPS5759329A/ja
Publication of JPS6355210B2 publication Critical patent/JPS6355210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP13485180A 1980-09-27 1980-09-27 Device for electron beam exposure Granted JPS5759329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13485180A JPS5759329A (en) 1980-09-27 1980-09-27 Device for electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13485180A JPS5759329A (en) 1980-09-27 1980-09-27 Device for electron beam exposure

Publications (2)

Publication Number Publication Date
JPS5759329A true JPS5759329A (en) 1982-04-09
JPS6355210B2 JPS6355210B2 (enrdf_load_stackoverflow) 1988-11-01

Family

ID=15137948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13485180A Granted JPS5759329A (en) 1980-09-27 1980-09-27 Device for electron beam exposure

Country Status (1)

Country Link
JP (1) JPS5759329A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578776A1 (fr) * 1985-03-15 1986-09-19 Commissariat Energie Atomique Boite de transfert

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578776A1 (fr) * 1985-03-15 1986-09-19 Commissariat Energie Atomique Boite de transfert

Also Published As

Publication number Publication date
JPS6355210B2 (enrdf_load_stackoverflow) 1988-11-01

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