JPS5759148A - Apparatus of emission spectroscopic analysis - Google Patents

Apparatus of emission spectroscopic analysis

Info

Publication number
JPS5759148A
JPS5759148A JP13291880A JP13291880A JPS5759148A JP S5759148 A JPS5759148 A JP S5759148A JP 13291880 A JP13291880 A JP 13291880A JP 13291880 A JP13291880 A JP 13291880A JP S5759148 A JPS5759148 A JP S5759148A
Authority
JP
Japan
Prior art keywords
vapor
spectroscopic analysis
sample
plasma flame
diluting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13291880A
Other languages
Japanese (ja)
Inventor
Yuzuru Komiyama
Yutaka Hiratsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13291880A priority Critical patent/JPS5759148A/en
Publication of JPS5759148A publication Critical patent/JPS5759148A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To make a highly sensitive and bright spectroscopic analysis possible, by conveying sample vapor corresponding to a composition component by laser light irradiation, without diluting and diffusing said vapor by carrier gas passing through a flow-rate control part and forming a plasma flame. CONSTITUTION:The sample vapor corresponding to a composition component is generated from a very small area part of a sample 6 in accordance with laser light irradiation. This vapor is conveyed in a small diameter torch 10 penertrating a waveguide 13 without diluting and diffusing said vapor through carrier gas sent from a gas supply part 10 controlling flow rate by a gas flow-rate controlling part 7. Then, a plasma flame 14 by the sample vapor is formed by microwave energy of the waveguide 13 and a spectroscopic analysis is made. By this constitution, a highly sensitive and accurate spectroscopic analysis by using the plasma flame of the sample vapor converted into high density in the torch 10 is performed.
JP13291880A 1980-09-26 1980-09-26 Apparatus of emission spectroscopic analysis Pending JPS5759148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13291880A JPS5759148A (en) 1980-09-26 1980-09-26 Apparatus of emission spectroscopic analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13291880A JPS5759148A (en) 1980-09-26 1980-09-26 Apparatus of emission spectroscopic analysis

Publications (1)

Publication Number Publication Date
JPS5759148A true JPS5759148A (en) 1982-04-09

Family

ID=15092553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13291880A Pending JPS5759148A (en) 1980-09-26 1980-09-26 Apparatus of emission spectroscopic analysis

Country Status (1)

Country Link
JP (1) JPS5759148A (en)

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