JPS5758232A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS5758232A
JPS5758232A JP13339380A JP13339380A JPS5758232A JP S5758232 A JPS5758232 A JP S5758232A JP 13339380 A JP13339380 A JP 13339380A JP 13339380 A JP13339380 A JP 13339380A JP S5758232 A JPS5758232 A JP S5758232A
Authority
JP
Japan
Prior art keywords
gaseous
recording medium
alloy
magnetic recording
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13339380A
Other languages
Japanese (ja)
Inventor
Tsunemi Oiwa
Soichi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OOSAKAFU
Maxell Holdings Ltd
Osaka Prefecture
Original Assignee
OOSAKAFU
Osaka Prefecture
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OOSAKAFU, Osaka Prefecture, Hitachi Maxell Ltd filed Critical OOSAKAFU
Priority to JP13339380A priority Critical patent/JPS5758232A/en
Publication of JPS5758232A publication Critical patent/JPS5758232A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To manufacture a magnetic recording medium which is excellent in a magnetic characteristic without decreasing a precipitation speed of a ferromagnetic material, by vacuum vapor-depositing Co (alloy) on the base body in a mixing gaseous atmosphere consisting of gaseous Xe or gaseous Kr, and gaseous O2 of a specific condition. CONSTITUTION:In a bell jar 1, a water-cooled substrate 2 which has set a base body 5 on its lower surface, a hearth 3 which has set Co (alloy) 6 and a thermion source 4 are placed. Subsequently, vacuum exhaust is executed by a rotary pump 7 and a diffusion pump 8, also gaseous Ar and gaseous O2 are led in and mixed from a gas lead-in pipe 9 connected to the side wall of the bell jar 1, a gaseous pressure ratio of gaseous Xe or gaseous Kr, and gaseous O2, and a precipitation speed/ gaseous O2 pressure are adjusted to (Xe, Kr/O2)1-1,000, and 20-6,700mu/min/torr, respectively, and after that, the Co (alloy) is vacuum vapor-deposited on the basic body 5. In this way, a ferromagnetic metallic thin film layer which is satisfactory in coercive force and an angular shape is formed, and a magnetic recording medium which is excellent in a magnetic characteristic is obtained.
JP13339380A 1980-09-25 1980-09-25 Manufacture of magnetic recording medium Pending JPS5758232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13339380A JPS5758232A (en) 1980-09-25 1980-09-25 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13339380A JPS5758232A (en) 1980-09-25 1980-09-25 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5758232A true JPS5758232A (en) 1982-04-07

Family

ID=15103691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13339380A Pending JPS5758232A (en) 1980-09-25 1980-09-25 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5758232A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755537A (en) * 1980-09-20 1982-04-02 Hitachi Maxell Ltd Production of magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755537A (en) * 1980-09-20 1982-04-02 Hitachi Maxell Ltd Production of magnetic recording medium

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