JPS5756176B2 - - Google Patents

Info

Publication number
JPS5756176B2
JPS5756176B2 JP48024842A JP2484273A JPS5756176B2 JP S5756176 B2 JPS5756176 B2 JP S5756176B2 JP 48024842 A JP48024842 A JP 48024842A JP 2484273 A JP2484273 A JP 2484273A JP S5756176 B2 JPS5756176 B2 JP S5756176B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48024842A
Other languages
Japanese (ja)
Other versions
JPS49115261A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48024842A priority Critical patent/JPS5756176B2/ja
Publication of JPS49115261A publication Critical patent/JPS49115261A/ja
Publication of JPS5756176B2 publication Critical patent/JPS5756176B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP48024842A 1973-03-01 1973-03-01 Expired JPS5756176B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48024842A JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48024842A JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Publications (2)

Publication Number Publication Date
JPS49115261A JPS49115261A (enrdf_load_stackoverflow) 1974-11-02
JPS5756176B2 true JPS5756176B2 (enrdf_load_stackoverflow) 1982-11-29

Family

ID=12149452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48024842A Expired JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Country Status (1)

Country Link
JP (1) JPS5756176B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3333686A1 (de) * 1983-09-17 1985-04-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone zum erwaermen von materialien, insbesondere zum schweissen
JP2008226683A (ja) 2007-03-14 2008-09-25 Hitachi High-Technologies Corp 荷電粒子線装置
EP3817028B1 (en) 2018-06-28 2022-11-02 Hitachi High-Tech Corporation Charged particle beam generation device and charged particle beam device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473666U (enrdf_load_stackoverflow) * 1971-02-03 1972-09-06

Also Published As

Publication number Publication date
JPS49115261A (enrdf_load_stackoverflow) 1974-11-02

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