JPS49115261A - - Google Patents

Info

Publication number
JPS49115261A
JPS49115261A JP48024842A JP2484273A JPS49115261A JP S49115261 A JPS49115261 A JP S49115261A JP 48024842 A JP48024842 A JP 48024842A JP 2484273 A JP2484273 A JP 2484273A JP S49115261 A JPS49115261 A JP S49115261A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48024842A
Other languages
Japanese (ja)
Other versions
JPS5756176B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48024842A priority Critical patent/JPS5756176B2/ja
Publication of JPS49115261A publication Critical patent/JPS49115261A/ja
Publication of JPS5756176B2 publication Critical patent/JPS5756176B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP48024842A 1973-03-01 1973-03-01 Expired JPS5756176B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48024842A JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48024842A JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Publications (2)

Publication Number Publication Date
JPS49115261A true JPS49115261A (enrdf_load_stackoverflow) 1974-11-02
JPS5756176B2 JPS5756176B2 (enrdf_load_stackoverflow) 1982-11-29

Family

ID=12149452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48024842A Expired JPS5756176B2 (enrdf_load_stackoverflow) 1973-03-01 1973-03-01

Country Status (1)

Country Link
JP (1) JPS5756176B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086746A (ja) * 1983-09-17 1985-05-16 ライボルト・アクチェンゲゼルシャフト 電子銃
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus
WO2020003428A1 (ja) * 2018-06-28 2020-01-02 株式会社日立ハイテクノロジーズ 荷電粒子線発生装置及び荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473666U (enrdf_load_stackoverflow) * 1971-02-03 1972-09-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473666U (enrdf_load_stackoverflow) * 1971-02-03 1972-09-06

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086746A (ja) * 1983-09-17 1985-05-16 ライボルト・アクチェンゲゼルシャフト 電子銃
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus
WO2020003428A1 (ja) * 2018-06-28 2020-01-02 株式会社日立ハイテクノロジーズ 荷電粒子線発生装置及び荷電粒子線装置
US11139139B2 (en) 2018-06-28 2021-10-05 Hitaclii High-Tech Corporation Charged particle beam generator and charged particle beam apparatus

Also Published As

Publication number Publication date
JPS5756176B2 (enrdf_load_stackoverflow) 1982-11-29

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