JPS5754940B2 - - Google Patents
Info
- Publication number
- JPS5754940B2 JPS5754940B2 JP50030657A JP3065775A JPS5754940B2 JP S5754940 B2 JPS5754940 B2 JP S5754940B2 JP 50030657 A JP50030657 A JP 50030657A JP 3065775 A JP3065775 A JP 3065775A JP S5754940 B2 JPS5754940 B2 JP S5754940B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/61—Formation of materials, e.g. in the shape of layers or pillars of insulating materials using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
- H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/037—Diffusion-deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/043—Dual dielectric
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/085—Isolated-integrated
Landscapes
- Element Separation (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NLAANVRAGE7403470,A NL180466C (nl) | 1974-03-15 | 1974-03-15 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting met een halfgeleiderlichaam voorzien van een in het halfgeleiderlichaam verzonken patroon van isolerend materiaal. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50128480A JPS50128480A (https=) | 1975-10-09 |
| JPS5754940B2 true JPS5754940B2 (https=) | 1982-11-20 |
Family
ID=19820963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50030657A Expired JPS5754940B2 (https=) | 1974-03-15 | 1975-03-13 |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US3996077A (https=) |
| JP (1) | JPS5754940B2 (https=) |
| AT (1) | AT347501B (https=) |
| AU (1) | AU498873B2 (https=) |
| BE (1) | BE826722A (https=) |
| BR (1) | BR7501440A (https=) |
| CH (1) | CH588165A5 (https=) |
| DE (1) | DE2510951C3 (https=) |
| FR (1) | FR2264394B1 (https=) |
| GB (1) | GB1495460A (https=) |
| IT (1) | IT1034216B (https=) |
| NL (1) | NL180466C (https=) |
| SE (1) | SE402504B (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598065B2 (ja) * | 1976-01-30 | 1984-02-22 | 松下電子工業株式会社 | Ｍｏｓ集積回路の製造方法 |
| US4066473A (en) * | 1976-07-15 | 1978-01-03 | Fairchild Camera And Instrument Corporation | Method of fabricating high-gain transistors |
| JPS6035818B2 (ja) * | 1976-09-22 | 1985-08-16 | 日本電気株式会社 | 半導体装置の製造方法 |
| DE2728845A1 (de) * | 1977-06-27 | 1979-01-18 | Siemens Ag | Verfahren zum herstellen eines hochfrequenztransistors |
| NL7709363A (nl) * | 1977-08-25 | 1979-02-27 | Philips Nv | Werkwijze ter vervaardiging van een halfgeleider- inrichting en halfgeleiderinrichting vervaardigd onder toepassing van een dergelijke werkwijze. |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3640806A (en) * | 1970-01-05 | 1972-02-08 | Nippon Telegraph & Telephone | Semiconductor device and method of producing the same |
| US3648125A (en) * | 1971-02-02 | 1972-03-07 | Fairchild Camera Instr Co | Method of fabricating integrated circuits with oxidized isolation and the resulting structure |
| US3796613A (en) * | 1971-06-18 | 1974-03-12 | Ibm | Method of forming dielectric isolation for high density pedestal semiconductor devices |
| US3873989A (en) * | 1973-05-07 | 1975-03-25 | Fairchild Camera Instr Co | Double-diffused, lateral transistor structure |
-
1974
- 1974-03-15 NL NLAANVRAGE7403470,A patent/NL180466C/xx not_active IP Right Cessation
-
1975
- 1975-02-26 US US05/552,976 patent/US3996077A/en not_active Expired - Lifetime
- 1975-03-12 CH CH314275A patent/CH588165A5/xx not_active IP Right Cessation
- 1975-03-12 IT IT21190/75A patent/IT1034216B/it active
- 1975-03-12 BR BR1440/75A patent/BR7501440A/pt unknown
- 1975-03-12 GB GB10278/75A patent/GB1495460A/en not_active Expired
- 1975-03-12 SE SE7502781A patent/SE402504B/xx not_active IP Right Cessation
- 1975-03-13 DE DE2510951A patent/DE2510951C3/de not_active Expired
- 1975-03-13 JP JP50030657A patent/JPS5754940B2/ja not_active Expired
- 1975-03-14 BE BE154366A patent/BE826722A/xx not_active IP Right Cessation
- 1975-03-14 FR FR7508034A patent/FR2264394B1/fr not_active Expired
- 1975-03-14 AT AT197775A patent/AT347501B/de not_active IP Right Cessation
- 1975-03-17 AU AU79150/75A patent/AU498873B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| BR7501440A (pt) | 1975-12-09 |
| SE402504B (sv) | 1978-07-03 |
| AU7915075A (en) | 1976-09-23 |
| SE7502781L (https=) | 1975-09-16 |
| ATA197775A (de) | 1978-05-15 |
| DE2510951B2 (de) | 1979-07-05 |
| AU498873B2 (en) | 1979-03-29 |
| US3996077A (en) | 1976-12-07 |
| CH588165A5 (https=) | 1977-05-31 |
| NL7403470A (nl) | 1975-09-17 |
| IT1034216B (it) | 1979-09-10 |
| AT347501B (de) | 1978-12-27 |
| FR2264394A1 (https=) | 1975-10-10 |
| GB1495460A (en) | 1977-12-21 |
| DE2510951A1 (de) | 1975-09-25 |
| NL180466B (nl) | 1986-09-16 |
| FR2264394B1 (https=) | 1980-10-24 |
| BE826722A (fr) | 1975-09-15 |
| NL180466C (nl) | 1987-02-16 |
| JPS50128480A (https=) | 1975-10-09 |
| DE2510951C3 (de) | 1980-03-13 |