JPS575471B2 - - Google Patents
Info
- Publication number
- JPS575471B2 JPS575471B2 JP15478377A JP15478377A JPS575471B2 JP S575471 B2 JPS575471 B2 JP S575471B2 JP 15478377 A JP15478377 A JP 15478377A JP 15478377 A JP15478377 A JP 15478377A JP S575471 B2 JPS575471 B2 JP S575471B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15478377A JPS5487070A (en) | 1977-12-22 | 1977-12-22 | Simultaneous multi-contact probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15478377A JPS5487070A (en) | 1977-12-22 | 1977-12-22 | Simultaneous multi-contact probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5487070A JPS5487070A (en) | 1979-07-11 |
| JPS575471B2 true JPS575471B2 (en) | 1982-01-30 |
Family
ID=15591791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15478377A Granted JPS5487070A (en) | 1977-12-22 | 1977-12-22 | Simultaneous multi-contact probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5487070A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013145839A1 (en) * | 2012-03-28 | 2013-10-03 | シャープ株式会社 | Defect detection apparatus |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2575013B2 (en) * | 1987-01-29 | 1997-01-22 | 東京エレクトロン株式会社 | Liquid crystal display inspection equipment |
| JPH087235B2 (en) * | 1992-12-01 | 1996-01-29 | 日本電子材料株式会社 | Narrow pitch compatible probe card |
| JP3240793B2 (en) * | 1993-12-15 | 2001-12-25 | ソニー株式会社 | Probe assembly, method for manufacturing the same, and probe card for IC measurement using the same |
| JP2010164452A (en) * | 2009-01-16 | 2010-07-29 | Micronics Japan Co Ltd | Probe and probe card |
-
1977
- 1977-12-22 JP JP15478377A patent/JPS5487070A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013145839A1 (en) * | 2012-03-28 | 2013-10-03 | シャープ株式会社 | Defect detection apparatus |
| JP2013205234A (en) * | 2012-03-28 | 2013-10-07 | Sharp Corp | Defect detection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5487070A (en) | 1979-07-11 |