JPS5753983B2 - - Google Patents

Info

Publication number
JPS5753983B2
JPS5753983B2 JP50042184A JP4218475A JPS5753983B2 JP S5753983 B2 JPS5753983 B2 JP S5753983B2 JP 50042184 A JP50042184 A JP 50042184A JP 4218475 A JP4218475 A JP 4218475A JP S5753983 B2 JPS5753983 B2 JP S5753983B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50042184A
Other languages
Japanese (ja)
Other versions
JPS51117588A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50042184A priority Critical patent/JPS51117588A/ja
Publication of JPS51117588A publication Critical patent/JPS51117588A/ja
Publication of JPS5753983B2 publication Critical patent/JPS5753983B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/90Masterslice integrated circuits

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP50042184A 1975-04-09 1975-04-09 Manufacturing method of semiconductor equipment Granted JPS51117588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50042184A JPS51117588A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50042184A JPS51117588A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor equipment

Publications (2)

Publication Number Publication Date
JPS51117588A JPS51117588A (en) 1976-10-15
JPS5753983B2 true JPS5753983B2 (enrdf_load_html_response) 1982-11-16

Family

ID=12628903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50042184A Granted JPS51117588A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS51117588A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249193A (en) * 1978-05-25 1981-02-03 International Business Machines Corporation LSI Semiconductor device and fabrication thereof
FR2443185A1 (fr) * 1978-11-30 1980-06-27 Ibm Topologie de circuits integres semi-conducteurs et procede pour l'obtention de cette topologie
US4924589A (en) * 1988-05-16 1990-05-15 Leedy Glenn J Method of making and testing an integrated circuit
JP2752262B2 (ja) * 1991-04-19 1998-05-18 株式会社東芝 1チップlsiの製造方法

Also Published As

Publication number Publication date
JPS51117588A (en) 1976-10-15

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