JPS5753655A - Ultrasonic microscope - Google Patents

Ultrasonic microscope

Info

Publication number
JPS5753655A
JPS5753655A JP55129895A JP12989580A JPS5753655A JP S5753655 A JPS5753655 A JP S5753655A JP 55129895 A JP55129895 A JP 55129895A JP 12989580 A JP12989580 A JP 12989580A JP S5753655 A JPS5753655 A JP S5753655A
Authority
JP
Japan
Prior art keywords
sample
ultrasonic
lens
isolation film
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55129895A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342742B2 (enrdf_load_stackoverflow
Inventor
Fumio Uchino
Isao Momii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP55129895A priority Critical patent/JPS5753655A/ja
Publication of JPS5753655A publication Critical patent/JPS5753655A/ja
Publication of JPS6342742B2 publication Critical patent/JPS6342742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609—Display arrangements, e.g. colour displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP55129895A 1980-09-18 1980-09-18 Ultrasonic microscope Granted JPS5753655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55129895A JPS5753655A (en) 1980-09-18 1980-09-18 Ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55129895A JPS5753655A (en) 1980-09-18 1980-09-18 Ultrasonic microscope

Publications (2)

Publication Number Publication Date
JPS5753655A true JPS5753655A (en) 1982-03-30
JPS6342742B2 JPS6342742B2 (enrdf_load_stackoverflow) 1988-08-25

Family

ID=15021012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55129895A Granted JPS5753655A (en) 1980-09-18 1980-09-18 Ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS5753655A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986125A (en) * 1989-01-19 1991-01-22 Olympus Optical Co., Ltd. Ultrasonic microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986125A (en) * 1989-01-19 1991-01-22 Olympus Optical Co., Ltd. Ultrasonic microscope

Also Published As

Publication number Publication date
JPS6342742B2 (enrdf_load_stackoverflow) 1988-08-25

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