JPS5753623A - Gas flow rate controller - Google Patents

Gas flow rate controller

Info

Publication number
JPS5753623A
JPS5753623A JP12946580A JP12946580A JPS5753623A JP S5753623 A JPS5753623 A JP S5753623A JP 12946580 A JP12946580 A JP 12946580A JP 12946580 A JP12946580 A JP 12946580A JP S5753623 A JPS5753623 A JP S5753623A
Authority
JP
Japan
Prior art keywords
flow rate
coil
gas flow
signal
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12946580A
Other languages
Japanese (ja)
Inventor
Miyuki Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12946580A priority Critical patent/JPS5753623A/en
Publication of JPS5753623A publication Critical patent/JPS5753623A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure

Abstract

PURPOSE:To make automatic correction so that the mass of gass flow per unit time, by correcting a gas flow rate signal on the basis of detected temperature and pressure. CONSTITUTION:As the quantity of gas flow rate varies in piping 3, a detection coil 6 shifts in position to send a signal to a servo-motor 14, and the opening of a flow control valve 12 is adjusted to set a float 4 at a prescribed position, thereby holding the quantity of gas flow rate constant. As the temperature and pressure of the gas varies, those are detected by a temperature detector 15 and a pressure detector 16 and a mol flow rate operator 18 finds the deviation of a mol flow rate. Its arithmetic output signal is supplied to a coil position corrector 19, whose correction output shifts the coil 6 in position. Consequently, the position relation between the float 4 and coil 6 changes and a signal which corresponds to the reactance of the coil 6 is transferred to the motor 14 to correct the opening of the valve.
JP12946580A 1980-09-18 1980-09-18 Gas flow rate controller Pending JPS5753623A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12946580A JPS5753623A (en) 1980-09-18 1980-09-18 Gas flow rate controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12946580A JPS5753623A (en) 1980-09-18 1980-09-18 Gas flow rate controller

Publications (1)

Publication Number Publication Date
JPS5753623A true JPS5753623A (en) 1982-03-30

Family

ID=15010158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12946580A Pending JPS5753623A (en) 1980-09-18 1980-09-18 Gas flow rate controller

Country Status (1)

Country Link
JP (1) JPS5753623A (en)

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