JPS5752573B1 - - Google Patents

Info

Publication number
JPS5752573B1
JPS5752573B1 JP47043790A JP4379072A JPS5752573B1 JP S5752573 B1 JPS5752573 B1 JP S5752573B1 JP 47043790 A JP47043790 A JP 47043790A JP 4379072 A JP4379072 A JP 4379072A JP S5752573 B1 JPS5752573 B1 JP S5752573B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47043790A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5752573B1 publication Critical patent/JPS5752573B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP47043790A 1971-05-04 1972-05-04 Pending JPS5752573B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR717116048A FR2135425B1 (ja) 1971-05-04 1971-05-04

Publications (1)

Publication Number Publication Date
JPS5752573B1 true JPS5752573B1 (ja) 1982-11-08

Family

ID=9076396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47043790A Pending JPS5752573B1 (ja) 1971-05-04 1972-05-04

Country Status (4)

Country Link
US (1) US3797935A (ja)
JP (1) JPS5752573B1 (ja)
DE (1) DE2221914C2 (ja)
FR (1) FR2135425B1 (ja)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2257102B1 (ja) * 1973-04-19 1976-09-10 Frehling Andre
US4110762A (en) * 1974-05-10 1978-08-29 Commissariat A L'energie Atomique Drawing machines especially for integrated circuit masks
US3917401A (en) * 1974-11-15 1975-11-04 Mc Donnell Douglas Corp Step and repeat controller
US4158501A (en) * 1977-12-27 1979-06-19 The Three Dimensional Photography Corporation Projection printing method and apparatus
US4209240A (en) * 1978-10-10 1980-06-24 California Institute Of Technology Reticle exposure apparatus and method
JPS57102016A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Pattern generator
US4541712A (en) * 1981-12-21 1985-09-17 Tre Semiconductor Equipment Corporation Laser pattern generating system
USRE33931E (en) * 1981-12-21 1992-05-19 American Semiconductor Equipment Technologies Laser pattern generating system
DE3151407C1 (de) * 1981-12-24 1983-10-13 GAO Gesellschaft für Automation und Organisation mbH, 8000 München Ausweiskarte und Verfahren zu deren Herstellung
JPS6032050A (ja) * 1983-08-02 1985-02-19 Canon Inc 露光装置
US4505578A (en) * 1983-11-14 1985-03-19 Digital Optics Corporation Braked gravity transport for laser reading and writing systems
US4608578A (en) * 1983-11-14 1986-08-26 Matrix Instruments Inc. Braked media transport for laser scanners
US4822975A (en) * 1984-01-30 1989-04-18 Canon Kabushiki Kaisha Method and apparatus for scanning exposure
US5010534A (en) * 1984-12-29 1991-04-23 Canon Kabushiki Kaisha Optical information recording-reproducing apparatus
DE3546067A1 (de) * 1984-12-29 1986-07-03 Canon K.K., Tokio/Tokyo Aufzeichnungs/wiedergabegeraet fuer optische informationen
DE3546320A1 (de) * 1984-12-31 1986-07-03 Canon K.K., Tokio/Tokyo Geraet zur aufzeichnung und wiedergabe einer optischen information
US4796038A (en) * 1985-07-24 1989-01-03 Ateq Corporation Laser pattern generation apparatus
US5120136A (en) * 1989-09-12 1992-06-09 Lasertape Systems, Inc. Optical tape recorder having an acousto-optic device for scanning a radiant energy beam onto a media
US6511793B1 (en) * 1999-03-24 2003-01-28 Lg Electronics Inc. Method of manufacturing microstructure using photosensitive glass substrate
US6645677B1 (en) * 2000-09-18 2003-11-11 Micronic Laser Systems Ab Dual layer reticle blank and manufacturing process

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185026A (en) * 1961-05-22 1965-05-25 Ncr Co Method and apparatus employing metachromatic material for forming a plurality of individual micro-images
US3330182A (en) * 1965-10-01 1967-07-11 Gerber Scientific Instr Co Device for exposing discrete portions of a photosensitive surface to a variable intensity light beam
US3422442A (en) * 1966-01-12 1969-01-14 Us Army Micro-electronic form masking system
GB1196254A (en) * 1966-07-12 1970-06-24 Ibm Manufacture of Maps of Functions of a Variable Against Planar Coordinates
DE1933487A1 (de) * 1969-07-02 1971-01-14 Ibm Deutschland Lichtpunktschreiber

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1106401B (de) * 1957-09-28 1961-05-10 Olympia Werke Ag Anordnung zum Bereitstellen von Steuerimpulsen fuer Schalt- und Rechenwerke
US3479605A (en) * 1966-03-30 1969-11-18 Ibm Display formating control
US3498711A (en) * 1967-10-18 1970-03-03 Texas Instruments Inc Step and repeat camera
US3575588A (en) * 1968-09-09 1971-04-20 Ibm Electron beam circuit pattern generator for tracing microcircuit wire patterns on photoresist overlaid substrates
FR2030468A5 (ja) * 1969-01-29 1970-11-13 Thomson Brandt Csf
US3617125A (en) * 1969-04-24 1971-11-02 Ncr Co Automatic generation of microscopic patterns in multiplicity at final size

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185026A (en) * 1961-05-22 1965-05-25 Ncr Co Method and apparatus employing metachromatic material for forming a plurality of individual micro-images
US3330182A (en) * 1965-10-01 1967-07-11 Gerber Scientific Instr Co Device for exposing discrete portions of a photosensitive surface to a variable intensity light beam
US3422442A (en) * 1966-01-12 1969-01-14 Us Army Micro-electronic form masking system
GB1196254A (en) * 1966-07-12 1970-06-24 Ibm Manufacture of Maps of Functions of a Variable Against Planar Coordinates
DE1933487A1 (de) * 1969-07-02 1971-01-14 Ibm Deutschland Lichtpunktschreiber

Also Published As

Publication number Publication date
DE2221914C2 (de) 1982-12-23
DE2221914A1 (de) 1972-11-16
FR2135425B1 (ja) 1973-08-10
FR2135425A1 (ja) 1972-12-22
US3797935A (en) 1974-03-19

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