JPS5752423B2 - - Google Patents

Info

Publication number
JPS5752423B2
JPS5752423B2 JP11688474A JP11688474A JPS5752423B2 JP S5752423 B2 JPS5752423 B2 JP S5752423B2 JP 11688474 A JP11688474 A JP 11688474A JP 11688474 A JP11688474 A JP 11688474A JP S5752423 B2 JPS5752423 B2 JP S5752423B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11688474A
Other languages
Japanese (ja)
Other versions
JPS5143333A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11688474A priority Critical patent/JPS5143333A/ja
Publication of JPS5143333A publication Critical patent/JPS5143333A/ja
Publication of JPS5752423B2 publication Critical patent/JPS5752423B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP11688474A 1974-10-11 1974-10-11 Purazumaetsuchingusochi Granted JPS5143333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11688474A JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11688474A JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Publications (2)

Publication Number Publication Date
JPS5143333A JPS5143333A (ja) 1976-04-14
JPS5752423B2 true JPS5752423B2 (enrdf_load_stackoverflow) 1982-11-08

Family

ID=14698012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11688474A Granted JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Country Status (1)

Country Link
JP (1) JPS5143333A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995031822A1 (fr) * 1994-05-17 1995-11-23 Hitachi, Ltd. Dispositif et procede de traitement au plasma

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS59129872U (ja) * 1983-02-19 1984-08-31 日本真空技術株式会社 プラズマエツチング装置
JPS60169139A (ja) * 1984-02-13 1985-09-02 Canon Inc 気相法装置
JPS6342380A (ja) * 1986-08-07 1988-02-23 Tokyo Electron Ltd プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995031822A1 (fr) * 1994-05-17 1995-11-23 Hitachi, Ltd. Dispositif et procede de traitement au plasma

Also Published As

Publication number Publication date
JPS5143333A (ja) 1976-04-14

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