JPS5143333A - Purazumaetsuchingusochi - Google Patents

Purazumaetsuchingusochi

Info

Publication number
JPS5143333A
JPS5143333A JP11688474A JP11688474A JPS5143333A JP S5143333 A JPS5143333 A JP S5143333A JP 11688474 A JP11688474 A JP 11688474A JP 11688474 A JP11688474 A JP 11688474A JP S5143333 A JPS5143333 A JP S5143333A
Authority
JP
Japan
Prior art keywords
purazuma
etsuchingusochi
purazuma etsuchingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11688474A
Other languages
English (en)
Other versions
JPS5752423B2 (ja
Inventor
Kyokatsu Jinno
Suekichi Inomata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11688474A priority Critical patent/JPS5143333A/ja
Publication of JPS5143333A publication Critical patent/JPS5143333A/ja
Publication of JPS5752423B2 publication Critical patent/JPS5752423B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP11688474A 1974-10-11 1974-10-11 Purazumaetsuchingusochi Granted JPS5143333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11688474A JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11688474A JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Publications (2)

Publication Number Publication Date
JPS5143333A true JPS5143333A (ja) 1976-04-14
JPS5752423B2 JPS5752423B2 (ja) 1982-11-08

Family

ID=14698012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11688474A Granted JPS5143333A (ja) 1974-10-11 1974-10-11 Purazumaetsuchingusochi

Country Status (1)

Country Link
JP (1) JPS5143333A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS59129872U (ja) * 1983-02-19 1984-08-31 日本真空技術株式会社 プラズマエツチング装置
JPS60169139A (ja) * 1984-02-13 1985-09-02 Canon Inc 気相法装置
JPS6342380A (ja) * 1986-08-07 1988-02-23 Tokyo Electron Ltd プラズマ処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW321821B (ja) * 1994-05-17 1997-12-01 Hitachi Ltd

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置
JPS59129872U (ja) * 1983-02-19 1984-08-31 日本真空技術株式会社 プラズマエツチング装置
JPS60169139A (ja) * 1984-02-13 1985-09-02 Canon Inc 気相法装置
JPS6342380A (ja) * 1986-08-07 1988-02-23 Tokyo Electron Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS5752423B2 (ja) 1982-11-08

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