JPS5751922B2 - - Google Patents

Info

Publication number
JPS5751922B2
JPS5751922B2 JP14271475A JP14271475A JPS5751922B2 JP S5751922 B2 JPS5751922 B2 JP S5751922B2 JP 14271475 A JP14271475 A JP 14271475A JP 14271475 A JP14271475 A JP 14271475A JP S5751922 B2 JPS5751922 B2 JP S5751922B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14271475A
Other languages
Japanese (ja)
Other versions
JPS5265664A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14271475A priority Critical patent/JPS5265664A/ja
Publication of JPS5265664A publication Critical patent/JPS5265664A/ja
Publication of JPS5751922B2 publication Critical patent/JPS5751922B2/ja
Granted legal-status Critical Current

Links

JP14271475A 1975-11-26 1975-11-26 Selective introduction of impurity in compound semiconductor substrate Granted JPS5265664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14271475A JPS5265664A (en) 1975-11-26 1975-11-26 Selective introduction of impurity in compound semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14271475A JPS5265664A (en) 1975-11-26 1975-11-26 Selective introduction of impurity in compound semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5265664A JPS5265664A (en) 1977-05-31
JPS5751922B2 true JPS5751922B2 (index.php) 1982-11-05

Family

ID=15321856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14271475A Granted JPS5265664A (en) 1975-11-26 1975-11-26 Selective introduction of impurity in compound semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5265664A (index.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595322A (en) * 1979-01-12 1980-07-19 Nec Corp Diffusing method of impurity
JPS55105380A (en) * 1979-02-07 1980-08-12 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
US4843033A (en) * 1985-09-27 1989-06-27 Texas Instruments Incorporated Method for outdiffusion of zinc into III-V substrates using zinc tungsten silicide as dopant source

Also Published As

Publication number Publication date
JPS5265664A (en) 1977-05-31

Similar Documents

Publication Publication Date Title
JPS5222020Y1 (index.php)
JPS5250352U (index.php)
CH597614A5 (index.php)
BG21730A1 (index.php)
BG22614A1 (index.php)
CH1181375A4 (index.php)
CH575173A5 (index.php)
CH581903A5 (index.php)
CH584375A5 (index.php)
CH585086A5 (index.php)
CH585458A5 (index.php)
CH586631A5 (index.php)
CH591001A5 (index.php)
CH591201A5 (index.php)
CH591582B5 (index.php)
CH591718B5 (index.php)
CH592817A5 (index.php)
CH593146A5 (index.php)
CH593510B5 (index.php)
CH593840A5 (index.php)
CH594111A5 (index.php)
CH594232A5 (index.php)
CH594362A5 (index.php)
CH594370A5 (index.php)
CH594934A5 (index.php)