JPS5751260B2 - - Google Patents
Info
- Publication number
- JPS5751260B2 JPS5751260B2 JP2476577A JP2476577A JPS5751260B2 JP S5751260 B2 JPS5751260 B2 JP S5751260B2 JP 2476577 A JP2476577 A JP 2476577A JP 2476577 A JP2476577 A JP 2476577A JP S5751260 B2 JPS5751260 B2 JP S5751260B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/143—Masks therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2476577A JPS53110367A (en) | 1977-03-09 | 1977-03-09 | Multi-layer film evaporation method |
GB863378A GB1570777A (en) | 1977-03-09 | 1978-03-03 | Multi-layer vacuum evaporation deposition method |
CA298,247A CA1105333A (en) | 1977-03-09 | 1978-03-06 | Multi-layer vacuum evaporation deposition method |
FR7806618A FR2383241A1 (en) | 1977-03-09 | 1978-03-08 | MULTI-LAYER DEPOSIT PROCESS BY VACUUM EVAPORATION |
DE19782810316 DE2810316C3 (en) | 1977-03-09 | 1978-03-09 | Process for vapor deposition of a substrate with two superimposed layers |
NL7802611A NL7802611A (en) | 1977-03-09 | 1978-03-09 | PROCEDURE FOR VAPORIZING AND DEPOSITING MULTIPLE LAYERS IN VACUUM. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2476577A JPS53110367A (en) | 1977-03-09 | 1977-03-09 | Multi-layer film evaporation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53110367A JPS53110367A (en) | 1978-09-27 |
JPS5751260B2 true JPS5751260B2 (en) | 1982-11-01 |
Family
ID=12147241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2476577A Granted JPS53110367A (en) | 1977-03-09 | 1977-03-09 | Multi-layer film evaporation method |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS53110367A (en) |
CA (1) | CA1105333A (en) |
DE (1) | DE2810316C3 (en) |
FR (1) | FR2383241A1 (en) |
GB (1) | GB1570777A (en) |
NL (1) | NL7802611A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6261315A (en) * | 1985-09-11 | 1987-03-18 | Sharp Corp | Molecular beam epitaxy device |
JPS63144597A (en) * | 1986-12-09 | 1988-06-16 | 古河電気工業株式会社 | Method of forming partial film and multilayer film on substrate continuously |
US7229669B2 (en) | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
CN102877026B (en) * | 2012-09-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Vacuum depositing device for multilayer film devices |
CN110331364B (en) * | 2019-08-02 | 2021-05-07 | 深圳市华星光电半导体显示技术有限公司 | Vapor plating metal mask plate |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1521536A (en) * | 1923-08-21 | 1924-12-30 | Samuel A Holmes | Crutch chair |
US2676114A (en) * | 1951-06-08 | 1954-04-20 | Libbey Owens Ford Glass Co | Method of producing graded coatings |
US2875505A (en) * | 1952-12-11 | 1959-03-03 | Bell Telephone Labor Inc | Semiconductor translating device |
US2906637A (en) * | 1953-05-19 | 1959-09-29 | Electronique Soc Gen | Method of forming a film a short distance from a surface |
NL276676A (en) * | 1961-04-13 | |||
GB1056678A (en) * | 1963-08-01 | 1967-01-25 | Hitachi Ltd | Improvements relating to cryosars |
DE1272680B (en) * | 1963-09-16 | 1968-07-11 | Halbleiterwerk Frankfurt Oder | Device for vacuum vapor deposition of layers on a large number of documents covered with masks |
-
1977
- 1977-03-09 JP JP2476577A patent/JPS53110367A/en active Granted
-
1978
- 1978-03-03 GB GB863378A patent/GB1570777A/en not_active Expired
- 1978-03-06 CA CA298,247A patent/CA1105333A/en not_active Expired
- 1978-03-08 FR FR7806618A patent/FR2383241A1/en active Granted
- 1978-03-09 NL NL7802611A patent/NL7802611A/en not_active Application Discontinuation
- 1978-03-09 DE DE19782810316 patent/DE2810316C3/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1570777A (en) | 1980-07-09 |
NL7802611A (en) | 1978-09-12 |
JPS53110367A (en) | 1978-09-27 |
DE2810316B2 (en) | 1980-08-14 |
CA1105333A (en) | 1981-07-21 |
FR2383241B1 (en) | 1980-04-18 |
DE2810316C3 (en) | 1981-07-09 |
DE2810316A1 (en) | 1978-09-14 |
FR2383241A1 (en) | 1978-10-06 |