JPS575121A - Flow rate control system - Google Patents

Flow rate control system

Info

Publication number
JPS575121A
JPS575121A JP7722480A JP7722480A JPS575121A JP S575121 A JPS575121 A JP S575121A JP 7722480 A JP7722480 A JP 7722480A JP 7722480 A JP7722480 A JP 7722480A JP S575121 A JPS575121 A JP S575121A
Authority
JP
Japan
Prior art keywords
flow rate
chamber
pressure
controller
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7722480A
Other languages
English (en)
Inventor
Kaoru Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIGMA GIJUTSU KOGYO
SIGMA GIJUTSU KOGYO KK
Original Assignee
SIGMA GIJUTSU KOGYO
SIGMA GIJUTSU KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SIGMA GIJUTSU KOGYO, SIGMA GIJUTSU KOGYO KK filed Critical SIGMA GIJUTSU KOGYO
Priority to JP7722480A priority Critical patent/JPS575121A/ja
Publication of JPS575121A publication Critical patent/JPS575121A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
JP7722480A 1980-06-10 1980-06-10 Flow rate control system Pending JPS575121A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7722480A JPS575121A (en) 1980-06-10 1980-06-10 Flow rate control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7722480A JPS575121A (en) 1980-06-10 1980-06-10 Flow rate control system

Publications (1)

Publication Number Publication Date
JPS575121A true JPS575121A (en) 1982-01-11

Family

ID=13627875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7722480A Pending JPS575121A (en) 1980-06-10 1980-06-10 Flow rate control system

Country Status (1)

Country Link
JP (1) JPS575121A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4921006A (en) * 1987-04-07 1990-05-01 R. J. Fullwood & Bland Limited Vacuum regulator apparatus
US5087985A (en) * 1988-07-12 1992-02-11 Toray Industries, Inc. Polarizer for visible light

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4921006A (en) * 1987-04-07 1990-05-01 R. J. Fullwood & Bland Limited Vacuum regulator apparatus
US5087985A (en) * 1988-07-12 1992-02-11 Toray Industries, Inc. Polarizer for visible light

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