JPS5750327B2 - - Google Patents
Info
- Publication number
- JPS5750327B2 JPS5750327B2 JP10616775A JP10616775A JPS5750327B2 JP S5750327 B2 JPS5750327 B2 JP S5750327B2 JP 10616775 A JP10616775 A JP 10616775A JP 10616775 A JP10616775 A JP 10616775A JP S5750327 B2 JPS5750327 B2 JP S5750327B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Insulators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10616775A JPS5229994A (en) | 1975-09-02 | 1975-09-02 | Method of electing an oil filled bushing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10616775A JPS5229994A (en) | 1975-09-02 | 1975-09-02 | Method of electing an oil filled bushing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5229994A JPS5229994A (en) | 1977-03-07 |
| JPS5750327B2 true JPS5750327B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-10-27 |
Family
ID=14426709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10616775A Granted JPS5229994A (en) | 1975-09-02 | 1975-09-02 | Method of electing an oil filled bushing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5229994A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190070853A (ko) | 2017-12-13 | 2019-06-21 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 처리 장치, 기판 처리 장치의 제어 방법, 프로그램을 저장한 기억 매체 |
| US10937675B2 (en) | 2017-12-18 | 2021-03-02 | Ebara Corporation | Substrate processing apparatus, substrate processing apparatus control method, and storage medium storing program |
-
1975
- 1975-09-02 JP JP10616775A patent/JPS5229994A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190070853A (ko) | 2017-12-13 | 2019-06-21 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 처리 장치, 기판 처리 장치의 제어 방법, 프로그램을 저장한 기억 매체 |
| US10991605B2 (en) | 2017-12-13 | 2021-04-27 | Ebara Corporation | Substrate processing device, method for controlling substrate processing device, and storage medium storing a program |
| US10937675B2 (en) | 2017-12-18 | 2021-03-02 | Ebara Corporation | Substrate processing apparatus, substrate processing apparatus control method, and storage medium storing program |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5229994A (en) | 1977-03-07 |