JPS5229994A - Method of electing an oil filled bushing - Google Patents

Method of electing an oil filled bushing

Info

Publication number
JPS5229994A
JPS5229994A JP10616775A JP10616775A JPS5229994A JP S5229994 A JPS5229994 A JP S5229994A JP 10616775 A JP10616775 A JP 10616775A JP 10616775 A JP10616775 A JP 10616775A JP S5229994 A JPS5229994 A JP S5229994A
Authority
JP
Japan
Prior art keywords
electing
oil filled
filled bushing
bushing
oil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10616775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5750327B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Jihei Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10616775A priority Critical patent/JPS5229994A/ja
Publication of JPS5229994A publication Critical patent/JPS5229994A/ja
Publication of JPS5750327B2 publication Critical patent/JPS5750327B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Insulators (AREA)
JP10616775A 1975-09-02 1975-09-02 Method of electing an oil filled bushing Granted JPS5229994A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10616775A JPS5229994A (en) 1975-09-02 1975-09-02 Method of electing an oil filled bushing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10616775A JPS5229994A (en) 1975-09-02 1975-09-02 Method of electing an oil filled bushing

Publications (2)

Publication Number Publication Date
JPS5229994A true JPS5229994A (en) 1977-03-07
JPS5750327B2 JPS5750327B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-10-27

Family

ID=14426709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10616775A Granted JPS5229994A (en) 1975-09-02 1975-09-02 Method of electing an oil filled bushing

Country Status (1)

Country Link
JP (1) JPS5229994A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7030497B2 (ja) 2017-12-13 2022-03-07 株式会社荏原製作所 基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体
JP2019110200A (ja) 2017-12-18 2019-07-04 株式会社荏原製作所 基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体

Also Published As

Publication number Publication date
JPS5750327B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-10-27

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